[Scan]
initial_time=2016-01-28T18:44:22
final_time=2016-01-28T18:44:42
ip_count=19
run=1026
dataset=4
scan=298
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.38249E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.00635E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=4.10199E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.30224E-10
mult1=-9.921E-9
mult2=-2.73258E-9
rf_tmon=-3.80946E-3
rf_agc=3.367E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.73711E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20247E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=1.24117E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41882E0
lens1_imon=2.51252E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04315E1
cs_ea2_imon=1.41385E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.2075E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10967E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.44595E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.75487E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=2.05396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.17014E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.91979E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23708E0
ionrepsh_imon=9.37995E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33189E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47801E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06064E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.51349E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.21004E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.44547E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.56676E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86855E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.36478E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07299E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61871E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30557E1
cs_fil1_imon=9.24875E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23436E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23306E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67101E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16464E-1	-7.98559E-1	-9.13177E0	-9.14161E0	5.03063E-3	9.37939E-2	2.72933E1	-3.26431E1	-3.26756E1	2.6816E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00197E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16321E-1	-7.98821E-1	-9.1315E0	-9.1418E0	4.74453E-3	9.38177E-2	2.72913E1	-3.26705E1	-3.26332E1	2.68316E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16464E-1	-7.98821E-1	-9.1316E0	-9.14185E0	4.8399E-3	9.35078E-2	2.7265E1	-3.26779E1	-3.26083E1	2.67989E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16703E-1	-7.98583E-1	-9.13153E0	-9.14199E0	4.93526E-3	9.33886E-2	2.72762E1	-3.26626E1	-3.2659E1	2.6816E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.1656E-1	-7.98512E-1	-9.13177E0	-9.14178E0	4.69685E-3	9.36031E-2	2.73363E1	-3.26456E1	-3.26327E1	2.68088E1	1.19646E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16369E-1	-7.98678E-1	-9.13153E0	-9.14173E0	4.60148E-3	9.38416E-2	2.72622E1	-3.26532E1	-3.26191E1	2.68059E1	1.20226E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16345E-1	-7.98559E-1	-9.13141E0	-9.14187E0	4.52995E-3	9.34601E-2	2.73131E1	-3.2648E1	-3.25783E1	2.68363E1	1.20517E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.16298E-1	-7.98631E-1	-9.13148E0	-9.14168E0	4.74453E-3	9.34839E-2	2.72895E1	-3.26428E1	-3.26398E1	2.67902E1	1.19925E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.1625E-1	-7.98345E-1	-9.1315E0	-9.14164E0	4.8399E-3	9.36508E-2	2.72542E1	-3.26644E1	-3.25986E1	2.68077E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.16083E-1	-7.98583E-1	-9.13188E0	-9.1419E0	4.86374E-3	9.35555E-2	2.72945E1	-3.26726E1	-3.26486E1	2.68004E1	1.20024E-7	2.5202E-3	2.5202E-3	6.3074E-3	3.00848E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09263E0	-8.16131E-1	-7.98583E-1	-9.13143E0	-9.14168E0	4.93526E-3	9.37939E-2	2.72914E1	-3.26734E1	-3.26241E1	2.6797E1	1.20083E-7	2.51819E-3	2.51819E-3	6.32673E-3	2.99463E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09317E0	-8.16298E-1	-7.98535E-1	-9.13148E0	-9.14176E0	4.8399E-3	9.39131E-2	2.72709E1	-3.26681E1	-3.2635E1	2.68256E1	1.20297E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0201E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.16035E-1	-7.98464E-1	-9.13153E0	-9.14168E0	4.673E-3	9.39846E-2	2.73039E1	-3.26554E1	-3.26296E1	2.67788E1	1.19819E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.98026E-1
1.7E1	3.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16369E-1	-7.98583E-1	-9.13148E0	-9.14168E0	4.76837E-3	9.39608E-2	2.72979E1	-3.26621E1	-3.26699E1	2.67908E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16298E-1	-7.98416E-1	-9.13153E0	-9.1419E0	4.76837E-3	9.377E-2	2.73045E1	-3.26561E1	-3.26386E1	2.6822E1	1.20226E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16631E-1	-7.98726E-1	-9.13131E0	-9.14178E0	4.88758E-3	9.34124E-2	2.72833E1	-3.26661E1	-3.26372E1	2.68196E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E1	5.0E0	1.0E0	8.08E2	5.58E2	-2.09456E0	-8.16131E-1	-7.98893E-1	-9.13126E0	-9.14166E0	5.10216E-3	9.32217E-2	2.73118E1	-3.26499E1	-3.26015E1	2.6798E1	1.20209E-7	2.51203E-3	2.51203E-3	6.35059E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16369E-1	-7.9906E-1	-9.13143E0	-9.14161E0	4.93526E-3	9.34601E-2	2.73381E1	-3.26795E1	-3.2617E1	2.68244E1	1.20724E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.00676E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16178E-1	-7.99108E-1	-9.13141E0	-9.14185E0	4.55379E-3	9.33647E-2	2.72927E1	-3.26596E1	-3.26809E1	2.6786E1	1.20487E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16345E-1	-7.98845E-1	-9.13172E0	-9.14192E0	5.14984E-3	9.33886E-2	2.72943E1	-3.26681E1	-3.26404E1	2.68123E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1