[Scan]
initial_time=2016-01-28T18:45:16
final_time=2016-01-28T18:45:36
ip_count=19
run=1026
dataset=4
scan=300
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.37669E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.01242E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.56185E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-1.21272E-10
mult1=-9.89692E-9
mult2=-2.8803E-9
rf_tmon=-3.96567E-3
rf_agc=3.40365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.75487E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20253E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.09859E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.25667E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41462E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.42358E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.99746E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.21564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.42035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=9.73324E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.05532E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.18083E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.01543E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.35111E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74889E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4708E0
os_ea2_imon=-9.19398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05688E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.38078E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01572E1
cs_anode2_imon=2.10432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.22503E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.49118E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-9.37738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.74245E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92693E3
multa_neg_imon=6.67263E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.42513E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07265E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61751E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30556E1
cs_fil1_imon=9.25154E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35923E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63168E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8834E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32399E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.82899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6384E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16441E-1	-7.98535E-1	-9.13157E0	-9.14192E0	4.8399E-3	9.35316E-2	2.73157E1	-3.26679E1	-3.26201E1	2.68322E1	1.20311E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01995E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16655E-1	-7.98464E-1	-9.13126E0	-9.14218E0	4.79221E-3	9.35793E-2	2.72953E1	-3.26609E1	-3.26272E1	2.67957E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16655E-1	-7.98464E-1	-9.13136E0	-9.14221E0	4.62532E-3	9.37462E-2	2.72921E1	-3.26502E1	-3.25535E1	2.68117E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.98819E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16655E-1	-7.98273E-1	-9.13153E0	-9.14211E0	4.98295E-3	9.39846E-2	2.72673E1	-3.2685E1	-3.26484E1	2.68106E1	1.20106E-7	2.51203E-3	2.51203E-3	6.34518E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16679E-1	-7.98607E-1	-9.13153E0	-9.14192E0	5.07832E-3	9.35078E-2	2.7251E1	-3.26771E1	-3.26206E1	2.6816E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16321E-1	-7.98726E-1	-9.13126E0	-9.14195E0	4.95911E-3	9.37223E-2	2.73225E1	-3.26405E1	-3.26585E1	2.68088E1	1.20278E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16441E-1	-7.98678E-1	-9.13141E0	-9.1419E0	4.76837E-3	9.377E-2	2.73045E1	-3.26479E1	-3.25855E1	2.68051E1	1.20092E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.17013E-1	-7.98607E-1	-9.13153E0	-9.14207E0	4.95911E-3	9.38416E-2	2.72862E1	-3.26856E1	-3.25924E1	2.68406E1	1.19937E-7	2.52521E-3	2.52521E-3	6.31879E-3	3.02972E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17156E-1	-7.98512E-1	-9.13126E0	-9.14218E0	5.07832E-3	9.34601E-2	2.73165E1	-3.26771E1	-3.26398E1	2.684E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16512E-1	-7.98535E-1	-9.13129E0	-9.14195E0	5.126E-3	9.35078E-2	2.7269E1	-3.2647E1	-3.26765E1	2.68292E1	1.20226E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16131E-1	-7.9875E-1	-9.13119E0	-9.14197E0	5.22137E-3	9.3627E-2	2.73442E1	-3.26591E1	-3.26068E1	2.67896E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16202E-1	-7.98607E-1	-9.13141E0	-9.14216E0	4.95911E-3	9.35555E-2	2.72874E1	-3.26809E1	-3.25995E1	2.6807E1	1.19819E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.01742E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16059E-1	-7.9875E-1	-9.13148E0	-9.14207E0	5.26905E-3	9.36985E-2	2.73137E1	-3.2667E1	-3.26413E1	2.67884E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1625E-1	-7.98941E-1	-9.13126E0	-9.14226E0	5.22137E-3	9.36508E-2	2.72862E1	-3.26626E1	-3.26614E1	2.67998E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03185E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16178E-1	-7.98702E-1	-9.13143E0	-9.14204E0	5.29289E-3	9.37462E-2	2.73171E1	-3.26503E1	-3.26298E1	2.6794E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16607E-1	-7.98631E-1	-9.13138E0	-9.14223E0	5.07832E-3	9.36031E-2	2.73521E1	-3.26702E1	-3.26277E1	2.68121E1	1.20088E-7	2.52011E-3	2.52011E-3	6.31052E-3	2.99014E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16607E-1	-7.98702E-1	-9.1315E0	-9.14218E0	4.98295E-3	9.31263E-2	2.73107E1	-3.27039E1	-3.2677E1	2.68292E1	1.20161E-7	2.51752E-3	2.51752E-3	6.31251E-3	2.99906E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16393E-1	-7.98869E-1	-9.13155E0	-9.14218E0	4.98295E-3	9.32693E-2	2.73081E1	-3.26517E1	-3.25838E1	2.68185E1	1.19937E-7	2.51914E-3	2.51914E-3	6.31879E-3	3.01428E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16584E-1	-7.98845E-1	-9.13157E0	-9.14204E0	4.98295E-3	9.34601E-2	2.72901E1	-3.26771E1	-3.26386E1	2.67836E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17108E-1	-7.9875E-1	-9.13131E0	-9.14197E0	5.03063E-3	9.34601E-2	2.73399E1	-3.26759E1	-3.265E1	2.67992E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1