[Scan]
initial_time=2016-01-28T18:46:37
final_time=2016-01-28T18:46:56
ip_count=19
run=1026
dataset=4
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37603E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.01086E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.3958E-10
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=-1.23227E-10
mult1=-9.87283E-9
mult2=-2.69466E-9
rf_tmon=-6.39902E-3
rf_agc=3.17834E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70243E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.68556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.08938E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0524E1
cs_ea1_imon=1.23865E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41642E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.42935E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84028E1
cs_ef1a_imon=2.99495E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.20559E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.3122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.6323E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.04819E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.18033E-8
tplens_vset=1.4E-1
tplens_vmon=1.59877E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.56382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.01168E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=9.27541E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.0037E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.07102E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.22448E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.48741E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.27162E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.43087E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07311E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30566E1
cs_fil1_imon=9.25433E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38452E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6297E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1583E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.20249E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16464E-1	-7.98368E-1	-9.13141E0	-9.14176E0	5.07832E-3	9.3627E-2	2.72974E1	-3.26809E1	-3.26219E1	2.67978E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16464E-1	-7.97939E-1	-9.1315E0	-9.14204E0	4.88758E-3	9.38416E-2	2.73173E1	-3.26358E1	-3.26254E1	2.68088E1	1.20209E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16464E-1	-7.98202E-1	-9.13155E0	-9.14187E0	5.05447E-3	9.33409E-2	2.73161E1	-3.26509E1	-3.2637E1	2.68111E1	1.19819E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.01475E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16345E-1	-7.98321E-1	-9.13169E0	-9.1418E0	5.05447E-3	9.32217E-2	2.73063E1	-3.26597E1	-3.26038E1	2.67968E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16345E-1	-7.98392E-1	-9.13169E0	-9.14192E0	5.19753E-3	9.3627E-2	2.7279E1	-3.26695E1	-3.26411E1	2.68105E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16631E-1	-7.98464E-1	-9.1315E0	-9.14187E0	5.34058E-3	9.34839E-2	2.73063E1	-3.26669E1	-3.2626E1	2.68052E1	1.20209E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16584E-1	-7.98392E-1	-9.13141E0	-9.14183E0	5.17368E-3	9.35078E-2	2.72871E1	-3.26554E1	-3.26254E1	2.67986E1	1.19902E-7	2.52707E-3	2.52707E-3	6.30202E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.1656E-1	-7.98345E-1	-9.1315E0	-9.14173E0	5.10216E-3	9.32932E-2	2.73169E1	-3.26455E1	-3.26119E1	2.6801E1	1.20174E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16417E-1	-7.98416E-1	-9.13124E0	-9.14176E0	5.05447E-3	9.3627E-2	2.73141E1	-3.26386E1	-3.2617E1	2.681E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16607E-1	-7.98297E-1	-9.13119E0	-9.14207E0	5.00679E-3	9.35316E-2	2.72915E1	-3.26549E1	-3.2636E1	2.6825E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3514E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09719E0	-8.1687E-1	-7.98345E-1	-9.13119E0	-9.14173E0	5.14984E-3	9.377E-2	2.73253E1	-3.26891E1	-3.26603E1	2.68094E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16751E-1	-7.98082E-1	-9.13112E0	-9.14221E0	4.8399E-3	9.34601E-2	2.73045E1	-3.26797E1	-3.26083E1	2.68058E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16274E-1	-7.98297E-1	-9.13105E0	-9.14216E0	4.93526E-3	9.34839E-2	2.72837E1	-3.26658E1	-3.26278E1	2.67896E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01216E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1687E-1	-7.98392E-1	-9.13165E0	-9.14183E0	4.64916E-3	9.35078E-2	2.73263E1	-3.26956E1	-3.2616E1	2.68166E1					
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16941E-1	-7.98488E-1	-9.13162E0	-9.14171E0	4.48227E-3	9.34601E-2	2.73195E1	-3.26795E1	-3.2626E1	2.67962E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16607E-1	-7.98464E-1	-9.13131E0	-9.14214E0	4.57764E-3	9.36747E-2	2.72829E1	-3.26554E1	-3.2626E1	2.6798E1	1.19861E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01609E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16798E-1	-7.98392E-1	-9.13138E0	-9.1419E0	4.74453E-3	9.36031E-2	2.73086E1	-3.26791E1	-3.26537E1	2.68058E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16584E-1	-7.98631E-1	-9.13141E0	-9.14218E0	4.64916E-3	9.34839E-2	2.72927E1	-3.26478E1	-3.26142E1	2.68204E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16607E-1	-7.98726E-1	-9.13138E0	-9.14192E0	4.62532E-3	9.37223E-2	2.73145E1	-3.26691E1	-3.26644E1	2.68118E1	1.20106E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16488E-1	-7.98464E-1	-9.13129E0	-9.14235E0	4.55379E-3	9.36031E-2	2.73057E1	-3.26603E1	-3.26278E1	2.6819E1	1.19841E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.00852E-1