[Scan]
initial_time=2016-01-28T18:47:04
final_time=2016-01-28T18:47:23
ip_count=19
run=1026
dataset=4
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08849E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.37641E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.99642E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.64411E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-1.23215E-10
mult1=-9.27475E-9
mult2=-2.76245E-9
rf_tmon=-4.64515E-3
rf_agc=3.3079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.71577E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.10812E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.01958E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=1.25173E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39675E0
lens1_imon=2.3946E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.38906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.21177E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=2.42434E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.55837E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.05144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.18732E-8
tplens_vset=1.4E-1
tplens_vmon=1.63435E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.56992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.0068E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=9.53005E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33315E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47567E0
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.10802E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.29069E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.49482E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.68956E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21362E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.41201E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07624E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61668E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30552E1
cs_fil1_imon=9.25175E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28481E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62997E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.03804E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83919E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16441E-1	-7.98368E-1	-9.13146E0	-9.14204E0	4.79221E-3	9.34839E-2	2.73027E1	-3.26791E1	-3.2639E1	2.67984E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9874E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16798E-1	-7.98512E-1	-9.13141E0	-9.14202E0	4.76837E-3	9.35316E-2	2.73204E1	-3.26744E1	-3.26566E1	2.6797E1	1.20092E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.98092E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16703E-1	-7.98464E-1	-9.13141E0	-9.14192E0	4.57764E-3	9.34839E-2	2.73045E1	-3.26637E1	-3.26301E1	2.68157E1	1.19937E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9944E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16774E-1	-7.98345E-1	-9.13153E0	-9.14149E0	4.91142E-3	9.35793E-2	2.73039E1	-3.26446E1	-3.26176E1	2.6789E1	1.1993E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16536E-1	-7.98416E-1	-9.13129E0	-9.14192E0	5.07832E-3	9.35078E-2	2.72985E1	-3.26657E1	-3.26278E1	2.68358E1	1.1966E-7	2.51136E-3	2.51136E-3	6.31858E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.16727E-1	-7.98202E-1	-9.13148E0	-9.14142E0	5.22137E-3	9.31978E-2	2.72544E1	-3.26408E1	-3.26236E1	2.68082E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16703E-1	-7.98321E-1	-9.13134E0	-9.14204E0	4.76837E-3	9.33409E-2	2.72861E1	-3.2648E1	-3.26285E1	2.6786E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16655E-1	-7.98416E-1	-9.13191E0	-9.14183E0	5.00679E-3	9.32455E-2	2.72992E1	-3.26526E1	-3.26354E1	2.6822E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16703E-1	-7.98321E-1	-9.13177E0	-9.14176E0	4.88758E-3	9.36031E-2	2.73243E1	-3.2653E1	-3.26549E1	2.68154E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16655E-1	-7.98345E-1	-9.13188E0	-9.1418E0	5.00679E-3	9.32932E-2	2.73333E1	-3.26561E1	-3.26506E1	2.67952E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1656E-1	-7.98559E-1	-9.13184E0	-9.14164E0	4.88758E-3	9.34601E-2	2.72967E1	-3.26633E1	-3.26344E1	2.68076E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16631E-1	-7.98202E-1	-9.13148E0	-9.14195E0	5.03063E-3	9.33647E-2	2.73128E1	-3.26567E1	-3.26354E1	2.6797E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9913E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.1656E-1	-7.98178E-1	-9.13146E0	-9.14161E0	4.79221E-3	9.33409E-2	2.7291E1	-3.26634E1	-3.26511E1	2.68142E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16274E-1	-7.98082E-1	-9.13162E0	-9.14183E0	4.98295E-3	9.3627E-2	2.72787E1	-3.26488E1	-3.25816E1	2.6802E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98222E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16226E-1	-7.98297E-1	-9.13146E0	-9.14187E0	4.57764E-3	9.35555E-2	2.73063E1	-3.2675E1	-3.26425E1	2.67873E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.1625E-1	-7.98273E-1	-9.13131E0	-9.14183E0	5.00679E-3	9.34839E-2	2.73303E1	-3.27065E1	-3.26098E1	2.67782E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-8.16298E-1	-7.98368E-1	-9.13157E0	-9.14187E0	4.91142E-3	9.37223E-2	2.73139E1	-3.26897E1	-3.26266E1	2.68124E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09727E0	-8.16393E-1	-7.98321E-1	-9.13141E0	-9.1419E0	4.93526E-3	9.36747E-2	2.72947E1	-3.26718E1	-3.26689E1	2.68157E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.16703E-1	-7.98178E-1	-9.13141E0	-9.14173E0	4.76837E-3	9.3627E-2	2.73081E1	-3.26741E1	-3.25972E1	2.68094E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16822E-1	-7.98321E-1	-9.13138E0	-9.14197E0	4.74453E-3	9.34839E-2	2.7285E1	-3.26461E1	-3.2639E1	2.67908E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03804E-1