[Scan]
initial_time=2016-01-28T18:47:57
final_time=2016-01-28T18:48:17
ip_count=19
run=1026
dataset=4
scan=306
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.3738E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.03594E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=3.68822E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.30224E-10
mult1=-9.84875E-9
mult2=-2.73458E-9
rf_tmon=-3.6232E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.68283E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68476E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2056E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.09875E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.24261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42063E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04213E1
cs_ea2_imon=1.4106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.22043E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.42468E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=9.73684E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.0518E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.18531E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.48379E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.97155E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=9.28983E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34277E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45758E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00352E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.2425E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.4768E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.40804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.89254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=5.9228E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40486E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61879E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30579E1
cs_fil1_imon=9.25091E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30223E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24764E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1625E-1	-7.98559E-1	-9.13155E0	-9.14173E0	4.93526E-3	9.37462E-2	2.72918E1	-3.26457E1	-3.25999E1	2.68012E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01995E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16464E-1	-7.98583E-1	-9.13126E0	-9.14178E0	4.72069E-3	9.34839E-2	2.7288E1	-3.26891E1	-3.2667E1	2.68001E1	1.20142E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16298E-1	-7.98655E-1	-9.13124E0	-9.14161E0	4.74453E-3	9.37223E-2	2.72856E1	-3.26856E1	-3.25947E1	2.68007E1	1.19819E-7	2.51248E-3	2.51248E-3	6.29067E-3	3.03618E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16298E-1	-7.98297E-1	-9.13134E0	-9.1418E0	4.95911E-3	9.35316E-2	2.72915E1	-3.26543E1	-3.26868E1	2.67992E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16607E-1	-7.98416E-1	-9.13165E0	-9.1418E0	5.17368E-3	9.36747E-2	2.72898E1	-3.2662E1	-3.25983E1	2.68151E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16417E-1	-7.98464E-1	-9.13169E0	-9.14166E0	5.00679E-3	9.35793E-2	2.72871E1	-3.26669E1	-3.26603E1	2.68292E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16345E-1	-7.98893E-1	-9.13174E0	-9.14154E0	4.74453E-3	9.35793E-2	2.73145E1	-3.26809E1	-3.26236E1	2.68124E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16917E-1	-7.98464E-1	-9.13188E0	-9.14199E0	5.03063E-3	9.37939E-2	2.72853E1	-3.26362E1	-3.26446E1	2.67956E1	1.19749E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17156E-1	-7.98392E-1	-9.13188E0	-9.14199E0	4.79221E-3	9.36747E-2	2.72709E1	-3.26607E1	-3.25828E1	2.68199E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16679E-1	-7.98392E-1	-9.13181E0	-9.14223E0	4.93526E-3	9.3627E-2	2.73038E1	-3.26686E1	-3.26546E1	2.67868E1	1.1993E-7	2.52093E-3	2.52093E-3	6.3282E-3	3.00247E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1656E-1	-7.98154E-1	-9.13184E0	-9.14211E0	5.07832E-3	9.36031E-2	2.73099E1	-3.26735E1	-3.26068E1	2.68058E1	1.20188E-7	2.52029E-3	2.52029E-3	6.3074E-3	3.01326E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16464E-1	-7.98464E-1	-9.13141E0	-9.1419E0	5.10216E-3	9.38654E-2	2.72925E1	-3.26627E1	-3.26446E1	2.67812E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16631E-1	-7.98488E-1	-9.13148E0	-9.14218E0	4.57764E-3	9.36031E-2	2.73257E1	-3.26555E1	-3.2613E1	2.67984E1	1.19856E-7	2.51484E-3	2.51484E-3	6.29655E-3	3.00766E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16441E-1	-7.98464E-1	-9.13153E0	-9.14216E0	4.76837E-3	9.377E-2	2.73291E1	-3.26386E1	-3.25996E1	2.67956E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16512E-1	-7.98607E-1	-9.13157E0	-9.14214E0	4.95911E-3	9.3627E-2	2.73081E1	-3.26561E1	-3.26206E1	2.68154E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16512E-1	-7.98893E-1	-9.13138E0	-9.14202E0	5.05447E-3	9.36031E-2	2.73087E1	-3.26975E1	-3.26272E1	2.68004E1	1.19861E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16298E-1	-7.98631E-1	-9.13148E0	-9.14195E0	4.81606E-3	9.34124E-2	2.73093E1	-3.26476E1	-3.2629E1	2.6792E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16607E-1	-7.98607E-1	-9.13174E0	-9.14204E0	4.673E-3	9.35078E-2	2.73204E1	-3.26815E1	-3.26048E1	2.67989E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.1656E-1	-7.98416E-1	-9.13181E0	-9.14211E0	4.86374E-3	9.32455E-2	2.73122E1	-3.26785E1	-3.26679E1	2.67968E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16417E-1	-7.98678E-1	-9.13174E0	-9.14204E0	4.95911E-3	9.37223E-2	2.72835E1	-3.26687E1	-3.26176E1	2.68166E1	1.20311E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1