[Scan]
initial_time=2016-01-28T18:48:51
final_time=2016-01-28T18:49:10
ip_count=19
run=1026
dataset=4
scan=308
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37523E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.04443E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.75664E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-9.83715E-11
mult1=-1.08602E-8
mult2=-2.8763E-9
rf_tmon=-4.47637E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.706E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19478E1
lens5a_imon=1.96577E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.09512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.23973E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.40484E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=3.00511E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21609E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11042E1
os_restr1_imon=4.29582E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.41639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=9.83778E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01948E1
cs_anode1_imon=2.04733E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.18238E-8
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.94692E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=9.31506E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.2055E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49423E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.79005E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.45904E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.38113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.27072E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.54117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-1.00724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=6.60774E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.42154E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07086E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62022E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30594E1
cs_fil1_imon=9.25322E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30363E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62979E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.54755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21805E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25236E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16798E-1	-7.98416E-1	-9.13153E0	-9.14176E0	4.81606E-3	9.37223E-2	2.73033E1	-3.26891E1	-3.26189E1	2.68004E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00041E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.16441E-1	-7.98345E-1	-9.1311E0	-9.14233E0	4.8399E-3	9.35793E-2	2.73123E1	-3.2653E1	-3.26561E1	2.68154E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16631E-1	-7.98249E-1	-9.13086E0	-9.14207E0	4.93526E-3	9.35316E-2	2.72685E1	-3.26797E1	-3.26531E1	2.67694E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16679E-1	-7.98464E-1	-9.13069E0	-9.14226E0	4.95911E-3	9.35555E-2	2.72997E1	-3.26452E1	-3.25731E1	2.68257E1	1.19851E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16703E-1	-7.98392E-1	-9.13103E0	-9.14207E0	5.05447E-3	9.34601E-2	2.72687E1	-3.26687E1	-3.26243E1	2.68216E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16584E-1	-7.9813E-1	-9.13098E0	-9.14202E0	4.93526E-3	9.37939E-2	2.73223E1	-3.26585E1	-3.2626E1	2.67985E1	1.20226E-7	2.51162E-3	2.51162E-3	6.31779E-3	3.00247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16703E-1	-7.98082E-1	-9.13105E0	-9.14221E0	4.57764E-3	9.32932E-2	2.72895E1	-3.26633E1	-3.25611E1	2.68088E1	1.20005E-7	2.51874E-3	2.51874E-3	6.3074E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16536E-1	-7.98512E-1	-9.13122E0	-9.14216E0	4.79221E-3	9.34362E-2	2.72835E1	-3.26182E1	-3.26356E1	2.68292E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16584E-1	-7.98607E-1	-9.13138E0	-9.14199E0	4.48227E-3	9.32932E-2	2.73472E1	-3.26476E1	-3.26302E1	2.68058E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16917E-1	-7.98607E-1	-9.13138E0	-9.14211E0	4.52995E-3	9.35793E-2	2.73303E1	-3.26536E1	-3.25773E1	2.68094E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16751E-1	-7.98368E-1	-9.13141E0	-9.1419E0	4.60148E-3	9.34362E-2	2.73123E1	-3.26512E1	-3.26783E1	2.68046E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16488E-1	-7.98702E-1	-9.13155E0	-9.14171E0	4.8399E-3	9.35555E-2	2.72702E1	-3.26765E1	-3.26104E1	2.67995E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16441E-1	-7.98273E-1	-9.13136E0	-9.14168E0	4.74453E-3	9.36985E-2	2.72967E1	-3.26452E1	-3.26567E1	2.67938E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1656E-1	-7.98106E-1	-9.13134E0	-9.14178E0	4.79221E-3	9.35793E-2	2.73315E1	-3.26771E1	-3.2584E1	2.68064E1	1.19653E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16584E-1	-7.98297E-1	-9.13124E0	-9.14202E0	4.69685E-3	9.35078E-2	2.73151E1	-3.26602E1	-3.26266E1	2.68106E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16488E-1	-7.98178E-1	-9.13143E0	-9.1419E0	4.86374E-3	9.35316E-2	2.73213E1	-3.26206E1	-3.26386E1	2.68112E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01223E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16369E-1	-7.97963E-1	-9.13157E0	-9.14176E0	5.10216E-3	9.36508E-2	2.73057E1	-3.26915E1	-3.26278E1	2.68154E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16298E-1	-7.9813E-1	-9.13138E0	-9.14168E0	4.76837E-3	9.36985E-2	2.73093E1	-3.26807E1	-3.25996E1	2.67848E1	1.20017E-7	2.51826E-3	2.51826E-3	6.29645E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16584E-1	-7.97915E-1	-9.13131E0	-9.14168E0	5.24521E-3	9.35316E-2	2.73198E1	-3.26614E1	-3.26136E1	2.67746E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16441E-1	-7.98154E-1	-9.1315E0	-9.14218E0	4.86374E-3	9.33647E-2	2.73189E1	-3.26693E1	-3.26242E1	2.68024E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1