[Scan]
initial_time=2016-01-28T18:52:24
final_time=2016-01-28T18:52:44
ip_count=19
run=1026
dataset=4
scan=316
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.38242E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.98886E-9
ql3_vset=
ql3_vmon=-9.13215E0
ql3_imon=3.49522E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.1518E-10
mult1=-9.72835E-9
mult2=-2.86033E-9
rf_tmon=-3.86954E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.70877E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66785E0
bslens_imon=2.5598E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21348E1
lens5a_imon=1.99414E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02177E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=1.24279E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38691E0
lens1_imon=2.45498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04221E1
cs_ea2_imon=1.41575E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.21173E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.30932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15013E1
os_ea1_imon=2.42465E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25147E0
cs_ionrep_imon=9.85234E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.04855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.18287E-8
tplens_vset=1.4E-1
tplens_vmon=1.62396E0
tplens_imon=-2.29188E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.48688E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.57448E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.9829E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.03216E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25647E0
ionrepsh_imon=9.13357E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18281E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43803E0
os_ea2_imon=-6.6719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00544E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30003E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09717E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.22685E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.49944E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.56075E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.39654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.61412E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.22807E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49619E0
defgridb_imon=6.23227E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33217E1
os_fil1_imon=9.44384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61708E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30602E1
cs_fil1_imon=9.25608E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35569E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62923E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41152E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22022E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21797E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03741E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16536E-1	-7.98655E-1	-9.13181E0	-9.14178E0	4.64916E-3	9.37939E-2	2.7319E1	-3.26614E1	-3.25895E1	2.67944E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.00942E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16512E-1	-7.98488E-1	-9.13212E0	-9.14178E0	4.95911E-3	9.39131E-2	2.73106E1	-3.26854E1	-3.26113E1	2.6813E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16917E-1	-7.98249E-1	-9.13193E0	-9.1418E0	4.76837E-3	9.39846E-2	2.72825E1	-3.2681E1	-3.26277E1	2.67995E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16393E-1	-7.98488E-1	-9.13165E0	-9.14173E0	4.43459E-3	9.37939E-2	2.73454E1	-3.26272E1	-3.26657E1	2.67884E1	1.20344E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16512E-1	-7.98202E-1	-9.1321E0	-9.14173E0	4.64916E-3	9.37939E-2	2.7298E1	-3.26567E1	-3.26354E1	2.68046E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1656E-1	-7.98464E-1	-9.13177E0	-9.14187E0	4.88758E-3	9.37939E-2	2.73448E1	-3.26657E1	-3.26693E1	2.68018E1	1.19861E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16631E-1	-7.98202E-1	-9.13167E0	-9.14207E0	5.10216E-3	9.408E-2	2.72805E1	-3.26693E1	-3.26326E1	2.68244E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.16584E-1	-7.9844E-1	-9.13162E0	-9.14204E0	5.00679E-3	9.39846E-2	2.72745E1	-3.26705E1	-3.26182E1	2.68184E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16321E-1	-7.98368E-1	-9.13157E0	-9.1419E0	5.03063E-3	9.38654E-2	2.72964E1	-3.26637E1	-3.25849E1	2.67854E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16441E-1	-7.98512E-1	-9.13155E0	-9.14223E0	4.76837E-3	9.38892E-2	2.73087E1	-3.26717E1	-3.26206E1	2.68273E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16226E-1	-7.98464E-1	-9.13172E0	-9.1418E0	5.05447E-3	9.38177E-2	2.73075E1	-3.26543E1	-3.26422E1	2.6798E1	1.20209E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16441E-1	-7.98655E-1	-9.13155E0	-9.14216E0	4.86374E-3	9.37939E-2	2.73045E1	-3.26933E1	-3.26615E1	2.67607E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16417E-1	-7.98631E-1	-9.13167E0	-9.14218E0	5.05447E-3	9.35316E-2	2.73045E1	-3.26296E1	-3.26756E1	2.67806E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16274E-1	-7.98416E-1	-9.13193E0	-9.14195E0	5.07832E-3	9.36985E-2	2.72931E1	-3.2632E1	-3.265E1	2.68034E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9892E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16536E-1	-7.98559E-1	-9.13186E0	-9.14214E0	4.95911E-3	9.377E-2	2.72648E1	-3.26458E1	-3.26476E1	2.6798E1	1.20084E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16536E-1	-7.98607E-1	-9.13177E0	-9.14209E0	5.00679E-3	9.39369E-2	2.72992E1	-3.2659E1	-3.26307E1	2.67704E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16751E-1	-7.98011E-1	-9.13177E0	-9.14204E0	5.00679E-3	9.408E-2	2.73111E1	-3.26813E1	-3.26386E1	2.67878E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16441E-1	-7.98202E-1	-9.13193E0	-9.14192E0	4.72069E-3	9.39131E-2	2.73165E1	-3.26458E1	-3.26134E1	2.68331E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16369E-1	-7.9844E-1	-9.13212E0	-9.14202E0	4.88758E-3	9.39846E-2	2.72898E1	-3.26685E1	-3.2652E1	2.67914E1	1.19697E-7	2.52923E-3	2.52923E-3	6.30202E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16321E-1	-7.98726E-1	-9.13215E0	-9.14192E0	5.05447E-3	9.37939E-2	2.72967E1	-3.26927E1	-3.26332E1	2.67854E1	1.20004E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0148E-1