[Scan]
initial_time=2016-01-28T18:52:51
final_time=2016-01-28T18:53:11
ip_count=19
run=1026
dataset=4
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.38066E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.02025E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=3.4548E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-9.49144E-11
mult1=-9.5357E-9
mult2=-2.7266E-9
rf_tmon=-4.84288E-3
rf_agc=3.24984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.72577E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59602E0
bslens_imon=2.69899E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18704E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=3.10867E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.2581E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43037E0
lens1_imon=2.73439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.39543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=3.00302E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.21456E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11054E1
os_restr1_imon=4.30346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15577E1
os_ea1_imon=2.45761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63826E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.74596E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01676E1
cs_anode1_imon=2.06019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.18054E-8
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.95482E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=9.57606E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46269E0
os_ea2_imon=-8.47495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.68232E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10553E-1
os_ef2bup_imon=-5.48684E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.378E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.32547E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.0859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.08326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.07634E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.28525E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.53927E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-8.89085E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47122E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=1.89884E-1
window_imon=-1.11845E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.3922E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-9.34263E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.67186E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.51801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54139E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.41934E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06466E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30605E1
cs_fil1_imon=9.24262E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30363E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63134E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1999E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32042E-3
inlet_lpb_pmon=2.99517E-1
chamber_ion_pmon=1.19937E-7
chamber_cvt_pmon=2.52163E-3
foreline_cvt_pmon=2.52163E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.59409E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16321E-1	-7.98345E-1	-9.13198E0	-9.14204E0	4.64916E-3	9.39846E-2	2.72991E1	-3.26603E1	-3.26146E1	2.67902E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01738E-1
2.0E0	4.9E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16059E-1	-7.98655E-1	-9.13198E0	-9.1419E0	4.95911E-3	9.40323E-2	2.73235E1	-3.26866E1	-3.26278E1	2.67968E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16035E-1	-7.98941E-1	-9.13186E0	-9.14183E0	4.95911E-3	9.40323E-2	2.73293E1	-3.26614E1	-3.26236E1	2.6807E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.02545E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16345E-1	-7.98774E-1	-9.13212E0	-9.14199E0	4.81606E-3	9.38177E-2	2.72626E1	-3.26638E1	-3.26649E1	2.67794E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03545E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16345E-1	-7.98798E-1	-9.13196E0	-9.14195E0	4.673E-3	9.37223E-2	2.73659E1	-3.267E1	-3.26005E1	2.6806E1	1.20209E-7	2.51793E-3	2.51793E-3	6.32087E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16607E-1	-7.98488E-1	-9.13162E0	-9.14207E0	5.10216E-3	9.36985E-2	2.72989E1	-3.26585E1	-3.26266E1	2.68063E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16488E-1	-7.98845E-1	-9.13138E0	-9.14202E0	4.98295E-3	9.36031E-2	2.73405E1	-3.26458E1	-3.2632E1	2.68162E1	1.2035E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16512E-1	-7.9875E-1	-9.13191E0	-9.14202E0	4.79221E-3	9.37462E-2	2.73063E1	-3.26657E1	-3.26651E1	2.68389E1	1.19978E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16202E-1	-7.9875E-1	-9.13193E0	-9.14195E0	4.76837E-3	9.34839E-2	2.73291E1	-3.26645E1	-3.26152E1	2.67836E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16488E-1	-7.98416E-1	-9.1316E0	-9.1419E0	4.79221E-3	9.34601E-2	2.72738E1	-3.26347E1	-3.26353E1	2.67812E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16488E-1	-7.98583E-1	-9.1316E0	-9.14202E0	4.8399E-3	9.34839E-2	2.72993E1	-3.26886E1	-3.26254E1	2.68065E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16321E-1	-7.98631E-1	-9.13169E0	-9.14187E0	4.69685E-3	9.36508E-2	2.72907E1	-3.26728E1	-3.25786E1	2.68136E1	1.1979E-7	2.52342E-3	2.52342E-3	6.3074E-3	3.01356E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16369E-1	-7.98345E-1	-9.13184E0	-9.14199E0	4.79221E-3	9.34601E-2	2.73008E1	-3.2626E1	-3.26854E1	2.67745E1	1.19607E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.0201E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16441E-1	-7.98154E-1	-9.13167E0	-9.14187E0	5.10216E-3	9.36031E-2	2.72992E1	-3.26537E1	-3.26408E1	2.6801E1	1.19713E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16607E-1	-7.98368E-1	-9.132E0	-9.14195E0	4.86374E-3	9.38177E-2	2.73147E1	-3.26458E1	-3.26056E1	2.6792E1	1.20004E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16774E-1	-7.98583E-1	-9.13196E0	-9.14199E0	4.673E-3	9.38177E-2	2.73381E1	-3.26844E1	-3.26071E1	2.68502E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16298E-1	-7.98368E-1	-9.13169E0	-9.14185E0	4.64916E-3	9.36747E-2	2.73153E1	-3.26567E1	-3.26452E1	2.68046E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.97394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16178E-1	-7.98655E-1	-9.13193E0	-9.14207E0	4.64916E-3	9.36985E-2	2.73104E1	-3.26762E1	-3.26225E1	2.67824E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16178E-1	-7.98559E-1	-9.13174E0	-9.1418E0	4.79221E-3	9.33886E-2	2.73004E1	-3.26585E1	-3.26181E1	2.68205E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16345E-1	-7.98726E-1	-9.13169E0	-9.14178E0	4.76837E-3	9.36031E-2	2.73303E1	-3.26759E1	-3.26068E1	2.67962E1	1.19937E-7	2.52163E-3	2.52163E-3	6.32042E-3	2.99517E-1