[Scan]
initial_time=2016-01-28T18:53:18
final_time=2016-01-28T18:53:37
ip_count=19
run=1026
dataset=4
scan=318
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.37626E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.00841E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.39699E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-9.02534E-11
mult1=-8.8253E-9
mult2=-2.73458E-9
rf_tmon=-5.55185E-3
rf_agc=3.218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.73323E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20361E1
lens5a_imon=2.0166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04823E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53711E1
cs_ef1b_imon=3.10453E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.22423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37737E0
lens1_imon=2.98116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64714E1
os_ef1alow_imon=2.97092E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84113E1
cs_ef1a_imon=2.99562E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.22269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11379E1
os_restr1_imon=4.29841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.44919E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.09367E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.68638E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91832E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01834E1
cs_anode1_imon=2.05698E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.18578E-8
tplens_vset=1.4E-1
tplens_vmon=1.67628E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.48018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02874E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.95715E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=9.25018E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74807E1
cs_ef2b_imon=3.12287E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50444E0
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00179E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.70156E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7081E-1
os_ef2bup_imon=-5.39248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11024E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.11125E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.06594E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.26081E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.52266E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14698E0
cs_ionaccel_imon=-1.07354E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47133E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56592E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=1.95141E-1
window_imon=-1.17459E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86463E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.22201E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.43E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61792E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3054E1
cs_fil1_imon=9.25373E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33753E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.82468E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25111E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32206E-1
cs_fil2_imon=-2.56894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02394E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21747E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03048E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16631E-1	-7.98512E-1	-9.1315E0	-9.14185E0	4.76837E-3	9.36747E-2	2.73169E1	-3.26531E1	-3.26526E1	2.67978E1	1.20297E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.99083E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.1656E-1	-7.98416E-1	-9.13157E0	-9.14164E0	4.98295E-3	9.34601E-2	2.72751E1	-3.26524E1	-3.26308E1	2.6822E1	1.19959E-7	2.51701E-3	2.51701E-3	6.31555E-3	3.00507E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16536E-1	-7.98655E-1	-9.1316E0	-9.14166E0	4.79221E-3	9.36747E-2	2.72968E1	-3.26785E1	-3.26396E1	2.68163E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16393E-1	-7.9844E-1	-9.13155E0	-9.14178E0	4.98295E-3	9.35793E-2	2.72668E1	-3.26472E1	-3.26419E1	2.6789E1	1.19841E-7	2.52342E-3	2.52342E-3	6.3445E-3	3.02621E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16703E-1	-7.98583E-1	-9.1315E0	-9.14202E0	4.50611E-3	9.36508E-2	2.73237E1	-3.2653E1	-3.26254E1	2.68214E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16798E-1	-7.9875E-1	-9.13177E0	-9.14199E0	4.88758E-3	9.36985E-2	2.72573E1	-3.2662E1	-3.25871E1	2.6813E1	1.19705E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16464E-1	-7.98583E-1	-9.13131E0	-9.1418E0	4.72069E-3	9.34839E-2	2.73124E1	-3.26664E1	-3.25789E1	2.6804E1	1.19705E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16178E-1	-7.9844E-1	-9.13162E0	-9.14204E0	4.88758E-3	9.36747E-2	2.72555E1	-3.26667E1	-3.26431E1	2.68621E1	1.19757E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16345E-1	-7.9813E-1	-9.13155E0	-9.1423E0	4.48227E-3	9.3627E-2	2.72654E1	-3.2638E1	-3.26164E1	2.68106E1	1.198E-7	2.52815E-3	2.52815E-3	6.32896E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16369E-1	-7.98535E-1	-9.13157E0	-9.14204E0	4.60148E-3	9.32693E-2	2.72961E1	-3.26795E1	-3.25791E1	2.68138E1	1.19705E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16464E-1	-7.98583E-1	-9.13143E0	-9.14204E0	4.33922E-3	9.33409E-2	2.73219E1	-3.26681E1	-3.26362E1	2.67722E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16512E-1	-7.98392E-1	-9.13134E0	-9.1418E0	4.69685E-3	9.36985E-2	2.73291E1	-3.26518E1	-3.26446E1	2.68036E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.02545E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1656E-1	-7.98488E-1	-9.13148E0	-9.14211E0	4.76837E-3	9.36985E-2	2.73189E1	-3.26561E1	-3.26506E1	2.68226E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16369E-1	-7.98559E-1	-9.13172E0	-9.14168E0	4.69685E-3	9.35793E-2	2.73123E1	-3.26464E1	-3.26609E1	2.67962E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16584E-1	-7.98488E-1	-9.13146E0	-9.1419E0	4.72069E-3	9.37939E-2	2.73057E1	-3.26068E1	-3.26356E1	2.68026E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09302E0	-8.16798E-1	-7.98559E-1	-9.13136E0	-9.14195E0	4.81606E-3	9.39846E-2	2.72787E1	-3.26795E1	-3.26266E1	2.67758E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16202E-1	-7.98154E-1	-9.13162E0	-9.14185E0	5.00679E-3	9.34362E-2	2.72873E1	-3.26468E1	-3.26027E1	2.6792E1	1.20031E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16536E-1	-7.98273E-1	-9.13138E0	-9.14183E0	4.86374E-3	9.32217E-2	2.7308E1	-3.26844E1	-3.26095E1	2.67798E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16345E-1	-7.98392E-1	-9.13167E0	-9.14207E0	5.126E-3	9.31501E-2	2.72797E1	-3.26602E1	-3.26343E1	2.67854E1	1.2026E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16298E-1	-7.98368E-1	-9.13167E0	-9.14211E0	4.72069E-3	9.35555E-2	2.73033E1	-3.26452E1	-3.26536E1	2.67908E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1