[Scan]
initial_time=2016-01-28T18:53:44
final_time=2016-01-28T18:54:04
ip_count=19
run=1026
dataset=4
scan=319
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08724E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.37418E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.00623E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=3.27635E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.24776E-10
mult1=-8.92163E-9
mult2=-2.77849E-9
rf_tmon=-5.66E-3
rf_agc=3.17474E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.71689E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61567E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18451E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54038E1
cs_ef1b_imon=3.10485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=1.24802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.40076E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04159E1
cs_ea2_imon=1.42178E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.00024E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.2172E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.29165E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.43261E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.71161E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=2.05776E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.1893E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.01233E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=9.26099E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45337E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0644E0
os_ef2alow_imon=-2.68232E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9781E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.09008E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72841E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.07843E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.25422E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.49198E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08902E0
cs_ionaccel_imon=-1.09412E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.86508E-6
window_vset=0.0E0
window_vmon=1.81775E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-8.12629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=8.0281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.40543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30543E1
cs_fil1_imon=9.25693E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31695E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63067E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.61126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28132E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.17037E-1	-7.97892E-1	-9.1315E0	-9.14164E0	4.88758E-3	9.37939E-2	2.73169E1	-3.26773E1	-3.26319E1	2.681E1	1.20011E-7	2.52134E-3	2.52134E-3	6.32916E-3	3.00378E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.17037E-1	-7.98249E-1	-9.13143E0	-9.14195E0	4.72069E-3	9.39608E-2	2.72886E1	-3.26505E1	-3.26321E1	2.67982E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16703E-1	-7.98464E-1	-9.13177E0	-9.14176E0	4.74453E-3	9.35793E-2	2.73045E1	-3.26608E1	-3.25664E1	2.68094E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16441E-1	-7.98249E-1	-9.13167E0	-9.14202E0	4.74453E-3	9.38416E-2	2.72802E1	-3.26399E1	-3.26376E1	2.68088E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16393E-1	-7.98535E-1	-9.13165E0	-9.1419E0	4.62532E-3	9.34839E-2	2.73369E1	-3.26629E1	-3.26604E1	2.68051E1	1.20177E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00741E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16226E-1	-7.98607E-1	-9.13162E0	-9.14204E0	4.60148E-3	9.3627E-2	2.73075E1	-3.26697E1	-3.26437E1	2.6816E1	1.19895E-7	2.52686E-3	2.52686E-3	6.31902E-3	2.99811E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16369E-1	-7.98559E-1	-9.13169E0	-9.14204E0	4.64916E-3	9.38177E-2	2.72793E1	-3.26591E1	-3.26032E1	2.6813E1	1.20106E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16345E-1	-7.98512E-1	-9.13169E0	-9.14176E0	4.52995E-3	9.34601E-2	2.73193E1	-3.26437E1	-3.26236E1	2.67776E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16131E-1	-7.9844E-1	-9.13188E0	-9.14185E0	4.26769E-3	9.34839E-2	2.73249E1	-3.26669E1	-3.26152E1	2.68106E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16345E-1	-7.98464E-1	-9.13162E0	-9.14192E0	4.62532E-3	9.36747E-2	2.72775E1	-3.27035E1	-3.2638E1	2.6796E1	1.20209E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16226E-1	-7.98535E-1	-9.13172E0	-9.14195E0	4.74453E-3	9.35316E-2	2.72913E1	-3.26344E1	-3.26549E1	2.67788E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16226E-1	-7.98559E-1	-9.13148E0	-9.14216E0	4.76837E-3	9.34362E-2	2.73069E1	-3.26777E1	-3.26554E1	2.68256E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16488E-1	-7.98392E-1	-9.13157E0	-9.14226E0	4.72069E-3	9.35555E-2	2.73189E1	-3.26747E1	-3.26554E1	2.68166E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16512E-1	-7.98368E-1	-9.13167E0	-9.14223E0	4.72069E-3	9.34601E-2	2.73009E1	-3.26543E1	-3.26356E1	2.67836E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16441E-1	-7.9813E-1	-9.13177E0	-9.14202E0	4.79221E-3	9.36508E-2	2.73315E1	-3.26843E1	-3.2608E1	2.67896E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16298E-1	-7.98082E-1	-9.13191E0	-9.14199E0	4.64916E-3	9.31025E-2	2.73069E1	-3.26224E1	-3.26176E1	2.67758E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16488E-1	-7.98035E-1	-9.13146E0	-9.14214E0	4.81606E-3	9.34362E-2	2.72998E1	-3.26549E1	-3.259E1	2.67752E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16321E-1	-7.98345E-1	-9.1316E0	-9.14199E0	4.673E-3	9.35793E-2	2.73069E1	-3.26997E1	-3.26189E1	2.68058E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16226E-1	-7.98297E-1	-9.13157E0	-9.14195E0	4.98295E-3	9.33409E-2	2.73139E1	-3.26425E1	-3.26649E1	2.67891E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16321E-1	-7.98464E-1	-9.13157E0	-9.14218E0	4.98295E-3	9.32455E-2	2.72841E1	-3.26909E1	-3.26134E1	2.68418E1	1.20092E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.00097E-1