[Scan]
initial_time=2016-01-28T18:54:38
final_time=2016-01-28T18:54:57
ip_count=19
run=1026
dataset=4
scan=321
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37169E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.98706E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.54373E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.09255E-10
mult1=-9.6561E-9
mult2=-2.74456E-9
rf_tmon=-4.54847E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.72018E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66823E0
bslens_imon=2.66283E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=1.96708E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53452E1
cs_ef1b_imon=3.09361E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=1.22692E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4043E0
lens1_imon=2.60358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64703E1
os_ef1alow_imon=2.96184E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03627E1
cs_ea2_imon=1.4017E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8411E1
cs_ef1a_imon=3.00239E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21997E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11461E1
os_restr1_imon=4.30346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15356E1
os_ea1_imon=2.41736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.09321E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22953E0
cs_ionrep_imon=9.67509E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93234E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0195E1
cs_anode1_imon=2.05283E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.19288E-8
tplens_vset=1.4E-1
tplens_vmon=1.63509E0
tplens_imon=-1.17531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.48422E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98092E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.99526E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27819E0
ionrepsh_imon=9.32807E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33123E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7467E1
cs_ef2b_imon=3.11997E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48415E0
os_ea2_imon=-7.09997E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71082E1
cs_ef2a_imon=3.17389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05523E0
os_ef2alow_imon=-2.68347E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89315E-1
os_ef2bup_imon=-5.4324E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10975E1
os_restr2_imon=3.38229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30817E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01673E1
cs_anode2_imon=2.10351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.08516E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67698E1
iondef4_imon=1.08584E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.21047E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.51808E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13284E0
cs_ionaccel_imon=-9.88709E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5629E1
einzel_imon=7.69189E-6
window_vset=0.0E0
window_vmon=2.01275E-1
window_imon=-1.06169E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86412E1
mask2_imon=-7.94094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=8.71445E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93769E3
defgrida_imon=6.21339E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50184E3
multb_neg_imon=6.39537E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13389E0
defgridb_imon=5.77328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.41616E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07235E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30538E1
cs_fil1_imon=9.25283E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31289E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62822E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19315E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8052E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.38381E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33876E-1
cs_fil2_imon=-2.2425E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46733E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40079E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56899E-1
res40_imon=-2.49291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16584E-1	-7.98082E-1	-9.13157E0	-9.14161E0	4.81606E-3	9.32932E-2	2.72774E1	-3.26779E1	-3.25647E1	2.68082E1	1.20022E-7	2.51049E-3	2.51049E-3	6.33965E-3	2.99769E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16727E-1	-7.98273E-1	-9.13181E0	-9.14185E0	4.8399E-3	9.34601E-2	2.72904E1	-3.26603E1	-3.26352E1	2.68157E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16631E-1	-7.98106E-1	-9.13141E0	-9.1419E0	5.14984E-3	9.33647E-2	2.73092E1	-3.26602E1	-3.2636E1	2.68244E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.99E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16464E-1	-7.98011E-1	-9.13157E0	-9.1418E0	5.38826E-3	9.34839E-2	2.72715E1	-3.26711E1	-3.26272E1	2.67782E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16417E-1	-7.98154E-1	-9.13148E0	-9.1419E0	5.19753E-3	9.33647E-2	2.72817E1	-3.26494E1	-3.26428E1	2.68058E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16607E-1	-7.98559E-1	-9.13157E0	-9.14207E0	5.29289E-3	9.35555E-2	2.72691E1	-3.26508E1	-3.26408E1	2.68082E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16512E-1	-7.98535E-1	-9.13172E0	-9.14221E0	4.98295E-3	9.3317E-2	2.72937E1	-3.26446E1	-3.26681E1	2.67788E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16464E-1	-7.98416E-1	-9.1315E0	-9.14214E0	4.98295E-3	9.33886E-2	2.73051E1	-3.26416E1	-3.26518E1	2.68058E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16417E-1	-7.9844E-1	-9.13172E0	-9.14235E0	4.8399E-3	9.36747E-2	2.72684E1	-3.26302E1	-3.26224E1	2.68106E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16178E-1	-7.98535E-1	-9.13162E0	-9.14216E0	5.05447E-3	9.31501E-2	2.73296E1	-3.2656E1	-3.26321E1	2.67668E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16369E-1	-7.98368E-1	-9.13146E0	-9.14207E0	5.14984E-3	9.36747E-2	2.72763E1	-3.2626E1	-3.26152E1	2.67992E1	1.20457E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.1625E-1	-7.98488E-1	-9.13155E0	-9.14199E0	5.03063E-3	9.34839E-2	2.72673E1	-3.26803E1	-3.26567E1	2.68358E1	1.20383E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16011E-1	-7.9844E-1	-9.1316E0	-9.14211E0	5.24521E-3	9.35316E-2	2.73201E1	-3.26633E1	-3.26344E1	2.68082E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16107E-1	-7.98202E-1	-9.13131E0	-9.14199E0	5.07832E-3	9.36985E-2	2.73273E1	-3.26524E1	-3.26332E1	2.67908E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15964E-1	-7.98225E-1	-9.13155E0	-9.14209E0	4.81606E-3	9.35078E-2	2.72856E1	-3.26714E1	-3.25983E1	2.68118E1	1.19953E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16059E-1	-7.98225E-1	-9.13157E0	-9.14197E0	4.93526E-3	9.35316E-2	2.72889E1	-3.26957E1	-3.26182E1	2.67962E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16083E-1	-7.98082E-1	-9.13138E0	-9.14207E0	5.10216E-3	9.32217E-2	2.72829E1	-3.26699E1	-3.26038E1	2.68142E1	1.20487E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16226E-1	-7.9813E-1	-9.13124E0	-9.14197E0	4.88758E-3	9.36747E-2	2.73134E1	-3.26632E1	-3.26549E1	2.68346E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16441E-1	-7.98512E-1	-9.13155E0	-9.14195E0	4.8399E-3	9.377E-2	2.73134E1	-3.26697E1	-3.26296E1	2.68082E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16488E-1	-7.98392E-1	-9.1315E0	-9.14192E0	4.76837E-3	9.36985E-2	2.73117E1	-3.26897E1	-3.2632E1	2.67698E1	1.20004E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.02511E-1