[Scan]
initial_time=2016-01-28T18:55:04
final_time=2016-01-28T18:55:24
ip_count=19
run=1026
dataset=4
scan=322
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08723E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.37882E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.02979E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.30555E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-7.18832E-11
mult1=-1.01136E-8
mult2=-2.85035E-9
rf_tmon=-4.55448E-3
rf_agc=3.30872E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.77581E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.44415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20562E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.10343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05336E1
cs_ea1_imon=1.23085E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38613E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.39437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.0E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.21744E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.42292E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=9.74949E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.04855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.19543E-8
tplens_vset=1.4E-1
tplens_vmon=1.6314E0
tplens_imon=4.79749E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.55647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.02634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=9.29999E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69793E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.24225E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.54468E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-1.2536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=8.09305E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.20301E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50094E3
multb_neg_imon=6.89319E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.38948E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.24719E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34668E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62457E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27203E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21625E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31925E-3
inlet_lpb_pmon=2.99916E-1
chamber_ion_pmon=1.20019E-7
chamber_cvt_pmon=2.52502E-3
foreline_cvt_pmon=2.52502E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97734E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16751E-1	-7.98631E-1	-9.13188E0	-9.14204E0	4.74453E-3	9.33647E-2	2.72555E1	-3.26396E1	-3.26065E1	2.67992E1	1.19902E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.00197E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16846E-1	-7.98607E-1	-9.13177E0	-9.14207E0	4.91142E-3	9.35316E-2	2.73345E1	-3.26741E1	-3.2644E1	2.68112E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16417E-1	-7.98655E-1	-9.13174E0	-9.14199E0	4.55379E-3	9.38416E-2	2.73105E1	-3.26615E1	-3.27083E1	2.6787E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16345E-1	-7.98655E-1	-9.1315E0	-9.14197E0	4.60148E-3	9.35555E-2	2.72997E1	-3.26597E1	-3.26044E1	2.681E1	1.19601E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16607E-1	-7.98488E-1	-9.13143E0	-9.14209E0	4.64916E-3	9.33886E-2	2.73159E1	-3.26729E1	-3.26032E1	2.67884E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16798E-1	-7.98583E-1	-9.13174E0	-9.14204E0	4.60148E-3	9.36031E-2	2.72799E1	-3.26849E1	-3.26446E1	2.67824E1	1.19998E-7	2.52008E-3	2.52008E-3	6.32125E-3	3.01675E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16441E-1	-7.98297E-1	-9.13157E0	-9.14197E0	4.88758E-3	9.35078E-2	2.72949E1	-3.26428E1	-3.26104E1	2.68188E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16464E-1	-7.98368E-1	-9.13169E0	-9.14211E0	4.673E-3	9.32693E-2	2.73145E1	-3.26172E1	-3.25741E1	2.67931E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16274E-1	-7.9844E-1	-9.13162E0	-9.14187E0	4.673E-3	9.35793E-2	2.7302E1	-3.26756E1	-3.25997E1	2.68046E1	1.20055E-7	2.52276E-3	2.52276E-3	6.35059E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16274E-1	-7.98273E-1	-9.13143E0	-9.1419E0	4.91142E-3	9.35793E-2	2.73652E1	-3.26723E1	-3.26356E1	2.68016E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.02813E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16369E-1	-7.98845E-1	-9.13112E0	-9.14223E0	4.81606E-3	9.32932E-2	2.73423E1	-3.26496E1	-3.26602E1	2.68094E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16298E-1	-7.98678E-1	-9.13148E0	-9.14199E0	4.81606E-3	9.34362E-2	2.72895E1	-3.26771E1	-3.26278E1	2.67944E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.16274E-1	-7.98535E-1	-9.13126E0	-9.14159E0	4.88758E-3	9.34601E-2	2.73351E1	-3.26549E1	-3.25347E1	2.67625E1	1.20383E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.16417E-1	-7.98464E-1	-9.13136E0	-9.14195E0	4.48227E-3	9.35555E-2	2.72768E1	-3.26461E1	-3.26372E1	2.68286E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16321E-1	-7.98321E-1	-9.13138E0	-9.14192E0	4.74453E-3	9.36031E-2	2.73424E1	-3.26482E1	-3.26068E1	2.68214E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16441E-1	-7.98583E-1	-9.13124E0	-9.14183E0	4.72069E-3	9.32455E-2	2.73105E1	-3.26657E1	-3.26164E1	2.67862E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16488E-1	-7.98678E-1	-9.13157E0	-9.14207E0	4.74453E-3	9.32693E-2	2.72986E1	-3.26667E1	-3.27422E1	2.67914E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16464E-1	-7.98798E-1	-9.13172E0	-9.14187E0	4.26769E-3	9.35793E-2	2.72939E1	-3.26456E1	-3.26014E1	2.68093E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03976E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16441E-1	-7.98535E-1	-9.13153E0	-9.14197E0	4.43459E-3	9.37223E-2	2.73185E1	-3.26419E1	-3.271E1	2.67686E1	1.20099E-7	2.51823E-3	2.51823E-3	6.3074E-3	3.01249E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16178E-1	-7.98345E-1	-9.1316E0	-9.14192E0	4.74453E-3	9.34362E-2	2.73171E1	-3.26723E1	-3.26026E1	2.68065E1	1.20019E-7	2.52502E-3	2.52502E-3	6.31925E-3	2.99916E-1