[Scan]
initial_time=2016-01-28T18:57:02
final_time=2016-01-28T18:57:21
ip_count=19
run=1026
dataset=5
scan=326
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.82544E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-1.42992E-9
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.43327E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-4.25991E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.63784E-8
mult1=-1.00294E-8
mult2=-2.68667E-9
rf_tmon=-4.99909E-3
rf_agc=3.29551E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=6.28364E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20674E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.09731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=1.23216E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0762E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.42142E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.23095E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.43802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.84499E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.06008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.93979E-8
tplens_vset=1.4E-1
tplens_vmon=1.66006E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26837E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=9.35817E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=9.30425E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42694E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.4004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.07426E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.34264E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.5771E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.01934E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.69066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33179E1
os_fil1_imon=9.4054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62499E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30599E1
cs_fil1_imon=9.25241E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2752E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63354E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9714E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21631E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.55398E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.52E2	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.79985E1	-5.96046E-4	-8.80011E1	3.8147E-4	4.88758E-3	9.377E-2	2.7298E1	-3.26815E1	-3.2606E1	2.67613E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
2.0E0	8.665E3	7.0E0	3.16E2	1.6E2	-7.286E-2	-8.79983E1	-5.96046E-4	-8.80013E1	5.72205E-4	5.05447E-3	9.36985E-2	2.72727E1	-3.26765E1	-3.26329E1	2.68032E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.79983E1	-6.91414E-4	-8.80009E1	2.86102E-4	4.98295E-3	9.38892E-2	2.7326E1	-3.2659E1	-3.26556E1	2.67926E1	1.20031E-7	2.5225E-3	2.5225E-3	6.3074E-3	2.98554E-1
4.0E0	2.018E3	1.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79986E1	-5.96046E-4	-8.80013E1	1.90735E-4	5.00679E-3	9.36985E-2	2.72839E1	-3.26667E1	-3.26502E1	2.68221E1	1.19841E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79988E1	-7.86781E-4	-8.80014E1	2.38419E-4	4.60148E-3	9.34124E-2	2.73075E1	-3.26645E1	-3.26176E1	2.6825E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79989E1	-6.19888E-4	-8.80008E1	3.8147E-4	4.93526E-3	9.36747E-2	2.72955E1	-3.26651E1	-3.25954E1	2.68118E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.79992E1	-5.00679E-4	-8.80012E1	4.05312E-4	4.79221E-3	9.35555E-2	2.73051E1	-3.26779E1	-3.26484E1	2.68328E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.98554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.79987E1	-5.96046E-4	-8.80011E1	4.76837E-4	4.3869E-3	9.36031E-2	2.73267E1	-3.26837E1	-3.25858E1	2.68502E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
1.2E1	1.0E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.79988E1	-8.34465E-4	-8.80012E1	5.24521E-4	4.74453E-3	9.34601E-2	2.72709E1	-3.26506E1	-3.262E1	2.68154E1	1.20517E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.79989E1	-6.4373E-4	-8.80011E1	4.52995E-4	4.69685E-3	9.35316E-2	2.72715E1	-3.26494E1	-3.26422E1	2.68292E1	1.19978E-7	2.51359E-3	2.51359E-3	6.27399E-3	2.99613E-1
1.4E1	3.2E2	2.0E0	5.66E2	3.82E2	-7.37103E-2	-8.7999E1	-7.15256E-4	-8.80013E1	-1.66893E-4	4.48227E-3	9.36985E-2	2.73399E1	-3.26615E1	-3.26206E1	2.68052E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.7999E1	-6.19888E-4	-8.80014E1	1.19209E-4	4.76837E-3	9.37939E-2	2.73216E1	-3.2648E1	-3.26278E1	2.68106E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.7999E1	-8.10623E-4	-8.80013E1	7.15256E-5	4.45843E-3	9.3627E-2	2.72709E1	-3.26486E1	-3.26144E1	2.68184E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.7E1	6.8E1	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.7999E1	-5.72205E-4	-8.80009E1	3.09944E-4	4.3869E-3	9.37223E-2	2.72733E1	-3.26651E1	-3.26711E1	2.68204E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.8E1	2.16E2	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.7999E1	-4.05312E-4	-8.80008E1	3.09944E-4	4.45843E-3	9.38177E-2	2.72961E1	-3.2635E1	-3.26176E1	2.68226E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
1.9E1	3.58E2	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.7999E1	-4.76837E-4	-8.80011E1	2.86102E-4	4.72069E-3	9.37223E-2	2.73261E1	-3.26549E1	-3.26218E1	2.68256E1	1.20031E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.0041E-1
2.0E1	2.201E3	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.7999E1	-6.67572E-4	-8.80012E1	2.6226E-4	4.76837E-3	9.34124E-2	2.73387E1	-3.26452E1	-3.2617E1	2.67842E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1
2.1E1	9.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.7999E1	-5.96046E-4	-8.80013E1	1.19209E-4	5.03063E-3	9.34601E-2	2.72937E1	-3.26362E1	-3.26362E1	2.68106E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
2.2E1	1.66E2	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.79989E1	-4.05312E-4	-8.80014E1	-1.19209E-4	4.88758E-3	9.34839E-2	2.72957E1	-3.26891E1	-3.25723E1	2.68064E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79991E1	-5.00679E-4	-8.80014E1	2.38419E-5	4.79221E-3	9.36508E-2	2.72907E1	-3.26819E1	-3.26837E1	2.67986E1	1.20055E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1