[Scan]
initial_time=2016-01-28T18:57:55
final_time=2016-01-28T18:58:14
ip_count=19
run=1026
dataset=5
scan=328
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79188E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-1.14212E-9
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.49562E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-3.3285E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.63358E-8
mult1=-1.02604E-8
mult2=-2.83378E-9
rf_tmon=-5.06031E-3
rf_agc=3.35549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=6.10208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66041E0
bslens_imon=2.75714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.96575E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04846E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53762E1
cs_ef1b_imon=3.09131E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04809E1
cs_ea1_imon=1.23793E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08356E0
lens1_imon=1.51762E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64796E1
os_ef1alow_imon=2.97649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03843E1
cs_ea2_imon=1.41631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84297E1
cs_ef1a_imon=2.99751E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.2224E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11363E1
os_restr1_imon=4.29714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15313E1
os_ea1_imon=2.45837E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6346E1
os_ef1bup_imon=3.07963E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26004E0
cs_ionrep_imon=9.61023E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.04623E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.92868E-8
tplens_vset=1.4E-1
tplens_vmon=1.61561E0
tplens_imon=-3.73431E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.48861E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.56926E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.9829E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.83079E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27395E0
ionrepsh_imon=9.35597E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33685E1
lens5b_imon=2.18862E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74436E1
cs_ef2b_imon=3.11972E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46001E0
os_ea2_imon=-7.07147E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71478E1
cs_ef2a_imon=3.18122E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07142E0
os_ef2alow_imon=-2.50605E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92667E-1
os_ef2bup_imon=-5.3552E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10981E1
os_restr2_imon=3.37506E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31756E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0199E1
cs_anode2_imon=2.10267E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72812E1
iondef1_imon=1.08696E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.10274E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.36443E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.54605E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11068E0
cs_ionaccel_imon=-1.05812E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47234E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56074E1
einzel_imon=7.65281E-6
window_vset=0.0E0
window_vmon=1.90625E-1
window_imon=-1.02698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39111E-4
mask2_vset=0.0E0
mask2_vmon=-1.86467E1
mask2_imon=-8.05123E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.40532E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.67433E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.56026E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40899E0
defgridb_imon=6.01087E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.41376E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06979E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62334E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30577E1
cs_fil1_imon=9.2556E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33284E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63114E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.66525E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94062E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03137E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34126E-1
cs_fil2_imon=-2.39279E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.99986E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21837E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28897E-1
res40_imon=-2.59947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.11E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.79995E1	-7.39098E-4	-8.80009E1	2.86102E-4	4.673E-3	9.35316E-2	2.73228E1	-3.26685E1	-3.26071E1	2.68034E1	1.19963E-7	2.52384E-3	2.52384E-3	6.31332E-3	3.01326E-1
2.0E0	8.805E3	8.0E0	3.16E2	1.6E2	-7.31692E-2	-8.79991E1	-4.29153E-4	-8.80011E1	-9.53674E-5	4.86374E-3	9.36031E-2	2.73033E1	-3.26927E1	-3.26419E1	2.68214E1	1.198E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.01995E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.79993E1	-8.34465E-4	-8.8001E1	1.19209E-4	4.50611E-3	9.40084E-2	2.73068E1	-3.26562E1	-3.25879E1	2.68001E1	1.19766E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.02545E-1
4.0E0	2.037E3	5.0E0	6.55E2	3.98E2	-7.17779E-2	-8.79994E1	-4.52995E-4	-8.8001E1	1.43051E-4	4.93526E-3	9.377E-2	2.73094E1	-3.2645E1	-3.26444E1	2.68052E1	1.20078E-7	2.51886E-3	2.51886E-3	6.27633E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.79993E1	-4.05312E-4	-8.8001E1	-2.38419E-5	4.76837E-3	9.40561E-2	2.72903E1	-3.26602E1	-3.26685E1	2.67908E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.79994E1	-7.86781E-4	-8.80006E1	3.8147E-4	5.07832E-3	9.33886E-2	2.73135E1	-3.26753E1	-3.26002E1	2.68119E1	1.19646E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.79994E1	-7.39098E-4	-8.80009E1	2.86102E-4	4.76837E-3	9.38177E-2	2.73231E1	-3.26308E1	-3.26368E1	2.68007E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.79992E1	-6.19888E-4	-8.80008E1	5.48363E-4	4.98295E-3	9.377E-2	2.72768E1	-3.26219E1	-3.26413E1	2.67986E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.79993E1	-3.09944E-4	-8.80014E1	2.86102E-4	4.95911E-3	9.36031E-2	2.73207E1	-3.26609E1	-3.26164E1	2.67974E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.79993E1	-3.09944E-4	-8.80012E1	1.90735E-4	5.07832E-3	9.3627E-2	2.72837E1	-3.26487E1	-3.26432E1	2.6768E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.99E-1
1.4E1	2.74E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.79997E1	-5.72205E-4	-8.8001E1	9.53674E-5	4.76837E-3	9.3627E-2	2.73364E1	-3.26791E1	-3.25947E1	2.67953E1	1.20031E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.79994E1	-3.33786E-4	-8.80009E1	2.38419E-5	4.72069E-3	9.35555E-2	2.72768E1	-3.26661E1	-3.26248E1	2.68025E1	1.20226E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00041E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.79994E1	-6.67572E-4	-8.8001E1	4.05312E-4	4.93526E-3	9.35555E-2	2.731E1	-3.26823E1	-3.26774E1	2.67839E1	1.19941E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.99845E-1
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79996E1	-5.96046E-4	-8.80012E1	4.05312E-4	4.76837E-3	9.37223E-2	2.72769E1	-3.26398E1	-3.25972E1	2.6813E1	1.20084E-7	2.51915E-3	2.51915E-3	6.35223E-3	3.00676E-1
1.8E1	2.34E2	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.79998E1	-5.48363E-4	-8.80012E1	3.8147E-4	5.10216E-3	9.34601E-2	2.73411E1	-3.26679E1	-3.26349E1	2.68036E1	1.19601E-7	2.50571E-3	2.50571E-3	6.33486E-3	3.01871E-1
1.9E1	3.68E2	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79999E1	-5.00679E-4	-8.80012E1	3.57628E-4	5.00679E-3	9.3317E-2	2.73099E1	-3.26747E1	-3.26176E1	2.67746E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01995E-1
2.0E1	2.225E3	1.0E0	8.08E2	5.58E2	-7.20871E-2	-8.79999E1	-6.19888E-4	-8.80013E1	5.00679E-4	4.81606E-3	9.34839E-2	2.72762E1	-3.26614E1	-3.26006E1	2.6819E1	1.19705E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.79997E1	-6.91414E-4	-8.8001E1	5.00679E-4	4.98295E-3	9.31501E-2	2.73151E1	-3.26679E1	-3.26431E1	2.67931E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02511E-1
2.2E1	1.38E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79995E1	-4.76837E-4	-8.80009E1	2.6226E-4	5.4121E-3	9.36508E-2	2.72839E1	-3.26608E1	-3.2616E1	2.67992E1	1.20311E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.79994E1	-3.57628E-4	-8.80009E1	3.57628E-4	4.86374E-3	9.37462E-2	2.72812E1	-3.26915E1	-3.26248E1	2.68034E1	1.19851E-7	2.50989E-3	2.50989E-3	6.33977E-3	3.01223E-1