[Scan]
initial_time=2016-01-28T18:59:15
final_time=2016-01-28T18:59:35
ip_count=19
run=1026
dataset=5
scan=331
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.84545E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-9.15217E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.473E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.74986E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.62071E-8
mult1=-9.51162E-9
mult2=-2.76851E-9
rf_tmon=-3.76139E-3
rf_agc=3.40185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=5.89585E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.09695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=1.22819E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02994E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.39582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.21862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.41422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=9.51694E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93283E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.04783E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.92873E-8
tplens_vset=1.4E-1
tplens_vmon=1.65886E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.76677E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=9.52776E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4744E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.38274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.10838E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.33359E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.54865E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08209E0
cs_ionaccel_imon=-1.05899E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.34676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.45994E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.17372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.38816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30593E1
cs_fil1_imon=9.26208E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34968E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.636E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21895E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58691E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.95E2	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.79999E1	-4.05312E-4	-8.80008E1	2.38419E-4	4.62532E-3	9.38416E-2	2.72886E1	-3.2659E1	-3.26148E1	2.67914E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.0E0	8.853E3	5.0E0	3.16E2	1.6E2	-7.31692E-2	-8.79998E1	-6.19888E-4	-8.80011E1	3.57628E-4	4.45843E-3	9.37462E-2	2.73259E1	-3.26566E1	-3.26315E1	2.68051E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.79996E1	-8.82149E-4	-8.80012E1	3.33786E-4	4.72069E-3	9.35793E-2	2.72813E1	-3.26706E1	-3.26457E1	2.67937E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.02277E-1
4.0E0	2.055E3	2.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79998E1	-7.86781E-4	-8.8001E1	1.66893E-4	4.31538E-3	9.37939E-2	2.73123E1	-3.26663E1	-3.25713E1	2.67998E1	1.19953E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.03545E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8E1	-5.48363E-4	-8.8001E1	1.90735E-4	4.33922E-3	9.37462E-2	2.73017E1	-3.26516E1	-3.26408E1	2.67836E1	1.20568E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.79999E1	-8.10623E-4	-8.80011E1	-2.38419E-5	4.74453E-3	9.38416E-2	2.72929E1	-3.26713E1	-3.26499E1	2.68126E1	1.20177E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.01237E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79999E1	-5.96046E-4	-8.8001E1	1.43051E-4	4.45843E-3	9.36747E-2	2.72831E1	-3.26438E1	-3.25752E1	2.68064E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79997E1	-6.67572E-4	-8.8001E1	-4.76837E-5	4.31538E-3	9.36985E-2	2.73014E1	-3.26416E1	-3.26409E1	2.68021E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.98819E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.79999E1	-4.05312E-4	-8.80009E1	-2.14577E-4	4.72069E-3	9.35078E-2	2.72929E1	-3.26359E1	-3.26173E1	2.68117E1	1.2005E-7	2.51436E-3	2.51436E-3	6.32902E-3	2.99845E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.8E1	-5.24521E-4	-8.80009E1	-1.66893E-4	4.93526E-3	9.34362E-2	2.72957E1	-3.26616E1	-3.26051E1	2.68233E1	1.19991E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.03383E-1
1.4E1	3.08E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8E1	-2.6226E-4	-8.80009E1	2.38419E-5	4.76837E-3	9.36031E-2	2.73045E1	-3.2662E1	-3.26142E1	2.68052E1	1.19833E-7	2.51355E-3	2.51355E-3	6.31696E-3	3.01381E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80001E1	-3.33786E-4	-8.80007E1	0.0E0	4.8399E-3	9.37462E-2	2.72935E1	-3.26548E1	-3.26389E1	2.68148E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79999E1	-5.72205E-4	-8.80009E1	-4.76837E-5	4.86374E-3	9.377E-2	2.73381E1	-3.26649E1	-3.26248E1	2.67955E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80001E1	-5.96046E-4	-8.80011E1	1.19209E-4	4.98295E-3	9.38177E-2	2.73628E1	-3.26849E1	-3.26116E1	2.68001E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.9892E-1
1.8E1	2.11E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80002E1	-5.96046E-4	-8.80014E1	1.43051E-4	4.673E-3	9.37939E-2	2.72874E1	-3.26632E1	-3.26502E1	2.68082E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.02277E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80002E1	-5.00679E-4	-8.80011E1	7.15256E-5	5.05447E-3	9.35078E-2	2.72841E1	-3.26675E1	-3.26278E1	2.68046E1	1.20344E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.01609E-1
2.0E1	2.23E3	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80002E1	-5.24521E-4	-8.80012E1	1.90735E-4	4.57764E-3	9.33409E-2	2.72733E1	-3.26554E1	-3.262E1	2.68088E1	1.19861E-7	2.51935E-3	2.51935E-3	6.32936E-3	2.9939E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80001E1	-2.14577E-4	-8.80011E1	1.43051E-4	4.95911E-3	9.35793E-2	2.73009E1	-3.26801E1	-3.25906E1	2.6813E1					
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.8E1	-5.24521E-4	-8.8001E1	1.43051E-4	4.72069E-3	9.35555E-2	2.73104E1	-3.26425E1	-3.25971E1	2.67995E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.8E1	-7.39098E-4	-8.80013E1	1.66893E-4	4.22001E-3	9.37223E-2	2.72979E1	-3.26681E1	-3.26362E1	2.68334E1	1.2026E-7	2.51203E-3	2.51203E-3	6.35059E-3	2.9943E-1