[Scan]
initial_time=2016-01-28T19:01:55
final_time=2016-01-28T19:02:15
ip_count=19
run=1026
dataset=5
scan=337
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84261E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.76935E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.45713E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.2329E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.61681E-8
mult1=-9.61525E-9
mult2=-2.77008E-9
rf_tmon=-7.27601E-3
rf_agc=3.20341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.57125E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19346E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.10776E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.24946E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06539E0
lens1_imon=1.63291E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.41962E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=3.00793E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.22356E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.4373E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.71161E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.04963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.93039E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26405E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26417E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.7533E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=9.31146E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.25781E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.56138E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.11665E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.06197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.69644E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.39507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62364E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.25187E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29623E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63298E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.04229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.41E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80007E1	-6.91414E-4	-8.80007E1	2.86102E-4	4.673E-3	9.3317E-2	2.73364E1	-3.26469E1	-3.25918E1	2.68111E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
2.0E0	8.718E3	1.1E1	3.16E2	1.6E2	-7.40967E-2	-8.80009E1	-4.29153E-4	-8.80006E1	4.52995E-4	4.41074E-3	9.34124E-2	2.73112E1	-3.26499E1	-3.26701E1	2.68082E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80009E1	-9.05991E-4	-8.80007E1	1.19209E-4	4.72069E-3	9.35078E-2	2.72952E1	-3.26619E1	-3.26527E1	2.68099E1	1.19978E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00676E-1
4.0E0	2.094E3	1.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80008E1	-7.62939E-4	-8.80007E1	2.38419E-4	4.41074E-3	9.33886E-2	2.73033E1	-3.26645E1	-3.2632E1	2.67812E1	1.19891E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80011E1	-8.82149E-4	-8.80006E1	1.43051E-4	4.76837E-3	9.36031E-2	2.72797E1	-3.26661E1	-3.26555E1	2.68094E1	1.19646E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80008E1	-5.96046E-4	-8.80007E1	-2.38419E-5	4.52995E-3	9.35316E-2	2.72874E1	-3.26602E1	-3.26396E1	2.67788E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80005E1	-5.00679E-4	-8.80005E1	3.33786E-4	4.64916E-3	9.35555E-2	2.72965E1	-3.26676E1	-3.26572E1	2.68052E1	1.19757E-7	2.51116E-3	2.51116E-3	6.28006E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80009E1	-7.15256E-4	-8.80006E1	2.38419E-4	4.36306E-3	9.37223E-2	2.72618E1	-3.26458E1	-3.25954E1	2.68118E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80008E1	-4.52995E-4	-8.80007E1	5.48363E-4	4.8399E-3	9.34362E-2	2.72585E1	-3.26325E1	-3.26213E1	2.68117E1	1.20122E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02133E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80009E1	-6.4373E-4	-8.80007E1	2.86102E-4	4.673E-3	9.35555E-2	2.73216E1	-3.26673E1	-3.26543E1	2.6807E1	1.20383E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02659E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80009E1	-5.00679E-4	-8.80005E1	6.4373E-4	4.88758E-3	9.36985E-2	2.729E1	-3.26579E1	-3.25896E1	2.6797E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0071E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80011E1	-3.8147E-4	-8.80007E1	2.14577E-4	4.79221E-3	9.36747E-2	2.73044E1	-3.26831E1	-3.26623E1	2.6792E1	1.19725E-7	2.52568E-3	2.52568E-3	6.31761E-3	2.99179E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.8001E1	-4.76837E-4	-8.80005E1	2.86102E-4	5.05447E-3	9.35793E-2	2.73514E1	-3.26813E1	-3.26056E1	2.67866E1	1.1973E-7	2.51065E-3	2.51065E-3	6.32483E-3	2.99535E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80007E1	-3.8147E-4	-8.80007E1	2.86102E-4	5.07832E-3	9.3627E-2	2.73057E1	-3.26705E1	-3.262E1	2.68124E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.8E1	2.36E2	1.0E0	7.27E2	5.0E2	-7.10825E-2	-8.80007E1	-4.05312E-4	-8.80006E1	1.66893E-4	4.673E-3	9.36747E-2	2.72841E1	-3.27113E1	-3.27113E1	2.68046E1	1.20017E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.02659E-1
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80009E1	-6.67572E-4	-8.80006E1	4.05312E-4	4.57764E-3	9.36985E-2	2.72691E1	-3.26579E1	-3.26296E1	2.6785E1	1.20069E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02396E-1
2.0E1	2.227E3	2.0E0	8.08E2	5.58E2	-7.22418E-2	-8.8001E1	-6.19888E-4	-8.80005E1	1.90735E-4	4.48227E-3	9.3627E-2	2.72673E1	-3.2675E1	-3.25983E1	2.67872E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80007E1	-6.67572E-4	-8.80007E1	1.90735E-4	4.79221E-3	9.38892E-2	2.73249E1	-3.2653E1	-3.2614E1	2.67842E1	1.198E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.99686E-1
2.2E1	1.93E2	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80007E1	-7.86781E-4	-8.80009E1	2.38419E-4	4.64916E-3	9.35793E-2	2.73345E1	-3.26639E1	-3.26543E1	2.67842E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80008E1	-5.72205E-4	-8.80009E1	7.15256E-5	4.88758E-3	9.36508E-2	2.73045E1	-3.26417E1	-3.26405E1	2.67937E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1