[Scan]
initial_time=2016-01-28T19:02:48
final_time=2016-01-28T19:03:08
ip_count=19
run=1026
dataset=5
scan=339
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.84252E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-8.22294E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.43421E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.13187E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.61931E-8
mult1=-1.16308E-8
mult2=-2.70863E-9
rf_tmon=-4.18798E-3
rf_agc=3.3628E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.92637E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57646E0
bslens_imon=2.52165E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20322E1
lens5a_imon=1.98388E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05105E1
cs_ea1_imon=1.24455E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11386E0
lens1_imon=1.47375E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.9659E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.034E1
cs_ea2_imon=1.40567E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84259E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.20921E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.42416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.08307E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21413E0
cs_ionrep_imon=9.75748E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01835E1
cs_anode1_imon=2.04675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.92589E-8
tplens_vset=1.4E-1
tplens_vmon=1.64972E0
tplens_imon=-2.86537E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26362E1
iondef2_imon=1.58584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98437E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.75556E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28592E0
ionrepsh_imon=9.31844E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33348E1
lens5b_imon=2.17772E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74819E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4516E0
os_ea2_imon=-6.92439E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00498E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70866E1
cs_ef2a_imon=3.19051E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0897E0
os_ef2alow_imon=-2.85782E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93369E-1
os_ef2bup_imon=-5.49322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10927E1
os_restr2_imon=3.37783E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01883E1
cs_anode2_imon=2.08851E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72817E1
iondef1_imon=1.08137E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.10125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.26645E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.51866E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08081E0
cs_ionaccel_imon=-1.12251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47084E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55885E1
einzel_imon=7.72433E-6
window_vset=0.0E0
window_vmon=1.58027E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.8681E1
mask2_imon=-6.3597E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.35934E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.60552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.2765E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58656E0
defgridb_imon=6.02566E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.43386E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0712E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30765E1
cs_fil1_imon=9.23601E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.20477E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63285E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.76958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95387E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26627E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31691E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45382E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2203E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32099E-3
inlet_lpb_pmon=3.01674E-1
chamber_ion_pmon=1.20062E-7
chamber_cvt_pmon=2.52351E-3
foreline_cvt_pmon=2.52351E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.52835E-1
res40_imon=-2.59833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.29E2	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80012E1	-5.00679E-4	-8.80005E1	2.14577E-4	4.88758E-3	9.36985E-2	2.73051E1	-3.26556E1	-3.26868E1	2.67856E1	1.20246E-7	2.51153E-3	2.51153E-3	6.33264E-3	3.00857E-1
2.0E0	8.908E3	3.0E0	3.16E2	1.6E2	-7.286E-2	-8.80013E1	-7.86781E-4	-8.80004E1	9.53674E-5	4.93526E-3	9.38177E-2	2.73369E1	-3.26462E1	-3.26413E1	2.67995E1	1.19941E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.02115E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80011E1	-7.86781E-4	-8.80002E1	1.43051E-4	5.24521E-3	9.37939E-2	2.72939E1	-3.26626E1	-3.26048E1	2.67955E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0201E-1
4.0E0	2.061E3	1.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80013E1	-7.15256E-4	-8.80004E1	2.38419E-4	4.72069E-3	9.37462E-2	2.72781E1	-3.26879E1	-3.26771E1	2.67908E1	1.198E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-5.72205E-4	-8.80007E1	1.66893E-4	4.79221E-3	9.37223E-2	2.72895E1	-3.26747E1	-3.2614E1	2.67872E1	1.19851E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80014E1	-4.52995E-4	-8.80008E1	1.43051E-4	4.64916E-3	9.39131E-2	2.73004E1	-3.2685E1	-3.2616E1	2.68136E1	1.20191E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80011E1	-6.91414E-4	-8.80006E1	1.43051E-4	4.76837E-3	9.37223E-2	2.73183E1	-3.26603E1	-3.26368E1	2.68358E1	1.20158E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80011E1	-6.91414E-4	-8.80006E1	1.43051E-4	4.79221E-3	9.37462E-2	2.73455E1	-3.26646E1	-3.26505E1	2.68082E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01871E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80016E1	-4.52995E-4	-8.80004E1	-2.38419E-4	5.126E-3	9.39608E-2	2.73057E1	-3.2659E1	-3.26266E1	2.6834E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80012E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.81606E-3	9.377E-2	2.73339E1	-3.26693E1	-3.26224E1	2.68118E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
1.4E1	2.83E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80012E1	-9.05991E-4	-8.80006E1	1.90735E-4	4.79221E-3	9.39131E-2	2.73187E1	-3.27039E1	-3.26561E1	2.68244E1	1.1983E-7	2.52026E-3	2.52026E-3	6.32099E-3	3.00637E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.8001E1	-7.86781E-4	-8.80004E1	2.38419E-4	4.74453E-3	9.38177E-2	2.7302E1	-3.26272E1	-3.26468E1	2.68038E1					
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80014E1	-6.91414E-4	-8.80005E1	4.05312E-4	4.93526E-3	9.40323E-2	2.73057E1	-3.26903E1	-3.26392E1	2.6798E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80011E1	-4.29153E-4	-8.80005E1	5.48363E-4	4.79221E-3	9.39131E-2	2.72811E1	-3.26633E1	-3.26554E1	2.68112E1	1.20031E-7	2.51248E-3	2.51248E-3	6.34099E-3	2.99613E-1
1.8E1	2.41E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.8001E1	-5.72205E-4	-8.80008E1	2.38419E-5	4.43459E-3	9.377E-2	2.73928E1	-3.2769E1	-3.25611E1	2.6786E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9841E-1
1.9E1	3.54E2	1.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80009E1	-5.72205E-4	-8.80006E1	2.38419E-4	4.31538E-3	9.37223E-2	2.72845E1	-3.26708E1	-3.26266E1	2.67873E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97187E-1
2.0E1	2.291E3	3.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80011E1	-5.72205E-4	-8.80006E1	1.66893E-4	4.76837E-3	9.39608E-2	2.72853E1	-3.26873E1	-3.26344E1	2.67836E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
2.1E1	1.0E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80012E1	-7.86781E-4	-8.80007E1	4.76837E-5	4.3869E-3	9.39846E-2	2.73387E1	-3.26855E1	-3.26777E1	2.68394E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
2.2E1	1.88E2	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80009E1	-5.72205E-4	-8.80006E1	3.09944E-4	4.52995E-3	9.38416E-2	2.73003E1	-3.26711E1	-3.26314E1	2.67932E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02659E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80011E1	-6.19888E-4	-8.80004E1	1.19209E-4	4.62532E-3	9.38416E-2	2.72817E1	-3.26362E1	-3.26056E1	2.68064E1	1.20062E-7	2.52351E-3	2.52351E-3	6.32099E-3	3.01674E-1