[Scan]
initial_time=2016-01-28T19:05:02
final_time=2016-01-28T19:05:21
ip_count=19
run=1026
dataset=5
scan=344
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81083E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.85525E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.41193E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.98954E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.61499E-8
mult1=-1.07277E-8
mult2=-2.76851E-9
rf_tmon=-3.77942E-3
rf_agc=3.46975E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=5.61404E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20963E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.11497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=1.23333E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07135E0
lens1_imon=1.52745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.42339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.21265E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.42823E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.59376E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.05648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.93107E-8
tplens_vset=1.4E-1
tplens_vmon=1.61961E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.73041E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=9.2646E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.16278E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43438E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.20492E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.49113E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.33562E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56206E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.38107E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=9.25193E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32686E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1189E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.37688E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.31E2	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.8001E1	-8.82149E-4	-8.80006E1	3.33786E-4	5.03063E-3	9.36747E-2	2.7288E1	-3.26349E1	-3.26472E1	2.68123E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00824E-1
2.0E0	8.858E3	5.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80013E1	-6.4373E-4	-8.80006E1	2.86102E-4	5.03063E-3	9.3627E-2	2.73319E1	-3.26634E1	-3.26641E1	2.67995E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80013E1	-6.19888E-4	-8.80004E1	2.14577E-4	4.76837E-3	9.37223E-2	2.72906E1	-3.26828E1	-3.26301E1	2.68117E1	1.20045E-7	2.51952E-3	2.51952E-3	6.33592E-3	2.9917E-1
4.0E0	2.024E3	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80012E1	-7.39098E-4	-8.80006E1	4.52995E-4	4.86374E-3	9.37939E-2	2.72648E1	-3.26458E1	-3.26296E1	2.67866E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-7.39098E-4	-8.80003E1	5.72205E-4	5.03063E-3	9.34839E-2	2.73246E1	-3.26773E1	-3.26608E1	2.67836E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80014E1	-4.52995E-4	-8.80003E1	1.43051E-4	4.76837E-3	9.37223E-2	2.72846E1	-3.26488E1	-3.25958E1	2.6806E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80011E1	-6.67572E-4	-8.80003E1	6.91414E-4	4.79221E-3	9.33409E-2	2.72681E1	-3.26429E1	-3.26325E1	2.67913E1	1.1988E-7	2.51265E-3	2.51265E-3	6.323E-3	3.01237E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8001E1	-6.19888E-4	-8.80003E1	5.00679E-4	5.24521E-3	9.39131E-2	2.72933E1	-3.26449E1	-3.26543E1	2.6825E1	1.19738E-7	2.52029E-3	2.52029E-3	6.33112E-3	3.00479E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80013E1	-3.09944E-4	-8.80008E1	5.96046E-4	5.45979E-3	9.3627E-2	2.72588E1	-3.26314E1	-3.2593E1	2.68376E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99941E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80012E1	-5.96046E-4	-8.80007E1	6.19888E-4	4.91142E-3	9.36031E-2	2.73297E1	-3.26711E1	-3.2635E1	2.68274E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.4E1	3.14E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80012E1	-7.86781E-4	-8.80007E1	3.8147E-4	4.86374E-3	9.34839E-2	2.73033E1	-3.26997E1	-3.25906E1	2.67935E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80014E1	-9.05991E-4	-8.80003E1	3.8147E-4	4.91142E-3	9.36985E-2	2.72853E1	-3.26669E1	-3.25785E1	2.68165E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80013E1	-3.8147E-4	-8.80006E1	2.38419E-4	4.86374E-3	9.34839E-2	2.72991E1	-3.26663E1	-3.26645E1	2.67806E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
1.7E1	6.3E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80013E1	-5.48363E-4	-8.80004E1	1.19209E-4	5.17368E-3	9.33886E-2	2.73171E1	-3.26753E1	-3.2629E1	2.6822E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
1.8E1	2.16E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80011E1	-4.76837E-4	-8.80005E1	-1.19209E-4	4.76837E-3	9.36747E-2	2.72892E1	-3.2557E1	-3.25688E1	2.68136E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02133E-1
1.9E1	3.72E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80011E1	-5.96046E-4	-8.80011E1	1.19209E-4	4.43459E-3	9.37939E-2	2.73116E1	-3.26343E1	-3.26443E1	2.6818E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
2.0E1	2.227E3	1.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80013E1	-8.34465E-4	-8.80008E1	2.38419E-4	4.93526E-3	9.33886E-2	2.7272E1	-3.26848E1	-3.26376E1	2.68232E1	1.19595E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80011E1	-9.29832E-4	-8.80008E1	2.38419E-4	4.81606E-3	9.35793E-2	2.73322E1	-3.26508E1	-3.25924E1	2.67943E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
2.2E1	1.51E2	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80012E1	-7.86781E-4	-8.80006E1	1.43051E-4	4.41074E-3	9.39608E-2	2.72957E1	-3.2688E1	-3.26526E1	2.68148E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80013E1	-8.34465E-4	-8.80008E1	1.90735E-4	5.07832E-3	9.38654E-2	2.73099E1	-3.26729E1	-3.2641E1	2.67956E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02511E-1