[Scan]
initial_time=2016-01-28T19:05:55
final_time=2016-01-28T19:06:15
ip_count=19
run=1026
dataset=5
scan=346
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.84178E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.4832E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.44962E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.9011E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.61727E-8
mult1=-1.05351E-8
mult2=-2.79047E-9
rf_tmon=-5.09523E-3
rf_agc=3.33095E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.795E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.0955E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.22928E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01552E0
lens1_imon=1.40219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04081E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.99892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.21877E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.4409E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=9.77289E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.04098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.9395E-8
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.59141E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=9.44845E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.2073E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4726E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.37229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.2049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.49033E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.00853E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.40083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.02231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23916E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42871E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=9.25367E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.274E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63579E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01393E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.26E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80016E1	-5.96046E-4	-8.80007E1	3.57628E-4	4.88758E-3	9.36031E-2	2.73151E1	-3.26738E1	-3.2616E1	2.67932E1	1.19965E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01871E-1
2.0E0	8.722E3	1.7E1	3.16E2	1.6E2	-7.286E-2	-8.80015E1	-5.00679E-4	-8.8001E1	6.91414E-4	4.673E-3	9.36985E-2	2.73193E1	-3.2652E1	-3.26531E1	2.68186E1	1.19749E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80011E1	-6.91414E-4	-8.80006E1	2.86102E-4	5.03063E-3	9.39131E-2	2.73045E1	-3.26685E1	-3.25776E1	2.68148E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
4.0E0	2.016E3	1.0E0	6.55E2	3.98E2	-7.286E-2	-8.8001E1	-8.34465E-4	-8.80006E1	6.4373E-4	4.64916E-3	9.36985E-2	2.73063E1	-3.26964E1	-3.26572E1	2.67914E1	1.19601E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80011E1	-7.62939E-4	-8.80007E1	4.76837E-5	4.45843E-3	9.35555E-2	2.72821E1	-3.26608E1	-3.26183E1	2.67962E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80011E1	-5.24521E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.3627E-2	2.73137E1	-3.26627E1	-3.26064E1	2.68244E1	1.198E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8001E1	-5.96046E-4	-8.80005E1	-2.38419E-5	4.57764E-3	9.34124E-2	2.73111E1	-3.26573E1	-3.26314E1	2.68088E1	1.20031E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80012E1	-5.96046E-4	-8.80004E1	9.53674E-5	4.57764E-3	9.34839E-2	2.72642E1	-3.26735E1	-3.26266E1	2.68052E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9952E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80013E1	-2.86102E-4	-8.80007E1	2.14577E-4	4.673E-3	9.37223E-2	2.72974E1	-3.26443E1	-3.26307E1	2.67776E1	1.19861E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80014E1	-3.09944E-4	-8.80003E1	-2.38419E-5	4.76837E-3	9.33409E-2	2.73279E1	-3.26909E1	-3.26753E1	2.68346E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01223E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80012E1	-5.96046E-4	-8.80004E1	1.19209E-4	4.52995E-3	9.36031E-2	2.73273E1	-3.26663E1	-3.26524E1	2.67884E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9926E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.8001E1	-2.6226E-4	-8.80006E1	3.09944E-4	4.69685E-3	9.38416E-2	2.73141E1	-3.2632E1	-3.26296E1	2.6777E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98222E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80011E1	-1.43051E-4	-8.80005E1	1.43051E-4	4.64916E-3	9.33886E-2	2.72937E1	-3.26645E1	-3.26434E1	2.6795E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80015E1	-5.00679E-4	-8.80005E1	2.86102E-4	4.69685E-3	9.36508E-2	2.73279E1	-3.26885E1	-3.25743E1	2.67842E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.8E1	2.26E2	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80013E1	-4.05312E-4	-8.80004E1	3.33786E-4	4.69685E-3	9.35793E-2	2.73399E1	-3.27053E1	-3.26062E1	2.68004E1	1.19757E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.03449E-1
1.9E1	3.65E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80012E1	-7.15256E-4	-8.80005E1	3.33786E-4	4.52995E-3	9.37223E-2	2.72576E1	-3.26434E1	-3.26026E1	2.68214E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
2.0E1	2.189E3	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80013E1	-8.10623E-4	-8.80002E1	3.09944E-4	4.57764E-3	9.35316E-2	2.73175E1	-3.26726E1	-3.26744E1	2.68012E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80014E1	-7.62939E-4	-8.80005E1	3.09944E-4	4.55379E-3	9.37939E-2	2.73222E1	-3.26868E1	-3.25965E1	2.68064E1	1.20158E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.02511E-1
2.2E1	1.7E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80013E1	-6.4373E-4	-8.80005E1	1.43051E-4	4.673E-3	9.38654E-2	2.73093E1	-3.26549E1	-3.26356E1	2.67896E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	-6.19888E-4	-8.80006E1	2.14577E-4	4.93526E-3	9.38892E-2	2.73051E1	-3.26645E1	-3.2602E1	2.68424E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9952E-1