[Scan]
initial_time=2016-01-28T19:06:22
final_time=2016-01-28T19:06:41
ip_count=19
run=1026
dataset=5
scan=347
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81792E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-7.15005E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.41035E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.9406E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.61241E-8
mult1=-1.171E-8
mult2=-2.71346E-9
rf_tmon=-4.00216E-3
rf_agc=3.38636E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.71609E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66438E0
bslens_imon=2.47507E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20522E1
lens5a_imon=1.98998E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53639E1
cs_ef1b_imon=3.0917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04915E1
cs_ea1_imon=1.23832E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02927E0
lens1_imon=1.54543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64829E1
os_ef1alow_imon=2.97182E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03975E1
cs_ea2_imon=1.42902E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84329E1
cs_ef1a_imon=3.01385E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.21781E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.29441E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15207E1
os_ea1_imon=2.43652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63726E1
os_ef1bup_imon=3.07535E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25806E0
cs_ionrep_imon=9.56653E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93396E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.04506E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.92926E-8
tplens_vset=1.4E-1
tplens_vmon=1.62091E0
tplens_imon=-1.54927E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26909E1
iondef3_imon=1.48146E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98521E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.61335E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31103E0
ionrepsh_imon=9.30035E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33479E1
lens5b_imon=2.18306E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13451E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47193E0
os_ea2_imon=-9.05787E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00436E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7116E1
cs_ef2a_imon=3.18356E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.6345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77746E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1102E1
os_restr2_imon=3.38284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30047E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10111E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.0818E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08795E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.22921E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.50132E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16712E0
cs_ionaccel_imon=-9.99737E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.561E1
einzel_imon=7.73065E-6
window_vset=0.0E0
window_vmon=1.76353E-1
window_imon=-1.20214E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39022E-4
mask2_vset=0.0E0
mask2_vmon=-1.86532E1
mask2_imon=-4.74278E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.66753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.39226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.15106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39242E0
defgridb_imon=5.97114E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.41817E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07186E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62488E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30846E1
cs_fil1_imon=9.24535E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33349E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63232E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47248E-2
os_fil2_imon=-2.74309E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92116E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.85097E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33008E-1
cs_fil2_imon=-2.39279E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03891E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22149E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.89876E-1
res40_imon=-2.4788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.22E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80015E1	-1.09673E-3	-8.80007E1	3.33786E-4	4.50611E-3	9.41038E-2	2.7298E1	-3.26496E1	-3.26242E1	2.67932E1	1.20149E-7	2.51829E-3	2.51829E-3	6.30136E-3	3.006E-1
2.0E0	8.749E3	7.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80016E1	-6.4373E-4	-8.80007E1	2.6226E-4	4.26769E-3	9.38177E-2	2.73045E1	-3.26609E1	-3.26389E1	2.6777E1	1.198E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80013E1	-7.86781E-4	-8.80005E1	-4.76837E-5	4.86374E-3	9.34839E-2	2.72962E1	-3.2662E1	-3.26573E1	2.68308E1	1.20084E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01475E-1
4.0E0	2.113E3	2.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80016E1	-9.53674E-4	-8.80007E1	2.38419E-5	4.69685E-3	9.377E-2	2.72751E1	-3.26488E1	-3.2641E1	2.68026E1	1.19841E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80015E1	-9.05991E-4	-8.80006E1	-1.66893E-4	4.57764E-3	9.35793E-2	2.72702E1	-3.26633E1	-3.25852E1	2.68094E1	1.19713E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80016E1	-7.39098E-4	-8.80007E1	2.38419E-4	4.74453E-3	9.3317E-2	2.73147E1	-3.26681E1	-3.2647E1	2.68142E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80014E1	-7.62939E-4	-8.80007E1	7.15256E-5	4.55379E-3	9.31978E-2	2.73165E1	-3.2632E1	-3.25888E1	2.68178E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80014E1	-1.00136E-3	-8.80005E1	-2.14577E-4	4.88758E-3	9.32932E-2	2.72797E1	-3.26679E1	-3.2613E1	2.68024E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80015E1	-6.91414E-4	-8.80007E1	3.09944E-4	4.76837E-3	9.36031E-2	2.72937E1	-3.26639E1	-3.2641E1	2.68034E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80015E1	-7.39098E-4	-8.80006E1	-4.76837E-5	4.86374E-3	9.32455E-2	2.73255E1	-3.26711E1	-3.25599E1	2.67884E1	1.19601E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.4E1	3.27E2	4.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80018E1	-7.86781E-4	-8.80006E1	7.15256E-5	4.79221E-3	9.35078E-2	2.73207E1	-3.27048E1	-3.26196E1	2.68343E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80017E1	-7.15256E-4	-8.80003E1	7.15256E-5	4.57764E-3	9.3627E-2	2.73045E1	-3.26685E1	-3.25796E1	2.68289E1	1.19991E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.006E-1
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80016E1	-5.96046E-4	-8.80005E1	2.14577E-4	4.673E-3	9.35316E-2	2.72876E1	-3.26383E1	-3.26903E1	2.68504E1	1.19967E-7	2.5165E-3	2.5165E-3	6.32784E-3	3.00149E-1
1.7E1	6.6E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80013E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.98295E-3	9.35793E-2	2.7311E1	-3.26791E1	-3.26461E1	2.68172E1	1.19851E-7	2.51675E-3	2.51675E-3	6.34301E-3	2.99634E-1
1.8E1	2.12E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80016E1	-7.15256E-4	-8.80006E1	3.09944E-4	4.88758E-3	9.34839E-2	2.73033E1	-3.26878E1	-3.26248E1	2.68196E1	1.19697E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9714E-1
1.9E1	3.87E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80012E1	-5.24521E-4	-8.80005E1	4.29153E-4	5.00679E-3	9.36747E-2	2.73234E1	-3.26732E1	-3.258E1	2.68094E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00676E-1
2.0E1	2.252E3	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80016E1	-9.29832E-4	-8.80005E1	2.86102E-4	4.86374E-3	9.3627E-2	2.73075E1	-3.26529E1	-3.26621E1	2.68082E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80015E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.62532E-3	9.36747E-2	2.72768E1	-3.26083E1	-3.26496E1	2.6807E1	1.20017E-7	2.51935E-3	2.51935E-3	6.30466E-3	3.0174E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80015E1	-5.96046E-4	-8.80004E1	1.66893E-4	4.55379E-3	9.377E-2	2.73027E1	-3.26579E1	-3.26148E1	2.68018E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80013E1	-7.39098E-4	-8.80006E1	3.33786E-4	4.81606E-3	9.36031E-2	2.72968E1	-3.26714E1	-3.26909E1	2.67902E1	1.19902E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00197E-1