[Scan]
initial_time=2016-01-28T19:07:15
final_time=2016-01-28T19:07:35
ip_count=19
run=1026
dataset=5
scan=349
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79089E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.82807E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.42181E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.84219E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.61308E-8
mult1=-9.36486E-9
mult2=-2.7504E-9
rf_tmon=-5.60513E-3
rf_agc=3.26121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.73742E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61627E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.205E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=3.1092E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.23757E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08041E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.41421E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.00613E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.21058E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=2.43153E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=9.78731E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.04315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.92885E-8
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26505E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.92413E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=9.46647E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.469E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.38526E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19776E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.47213E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-9.79699E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9272E3
multa_neg_imon=7.07278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.43603E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62469E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.25866E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26559E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08998E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22199E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.15E2	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80016E1	-1.3113E-3	-8.80005E1	2.86102E-4	4.98295E-3	9.38177E-2	2.72603E1	-3.26537E1	-3.26655E1	2.67897E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0071E-1
2.0E0	8.554E3	1.0E1	3.16E2	1.6E2	-7.40192E-2	-8.80015E1	-1.21593E-3	-8.80006E1	4.76837E-4	4.673E-3	9.37462E-2	2.73314E1	-3.26529E1	-3.26003E1	2.68101E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01347E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80013E1	-7.39098E-4	-8.80007E1	4.76837E-4	4.98295E-3	9.35555E-2	2.73063E1	-3.26637E1	-3.26474E1	2.68279E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
4.0E0	2.089E3	1.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80013E1	-8.34465E-4	-8.80007E1	2.14577E-4	4.86374E-3	9.36747E-2	2.73399E1	-3.26717E1	-3.26218E1	2.68124E1	1.19646E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80011E1	-8.34465E-4	-8.80009E1	3.33786E-4	4.69685E-3	9.33886E-2	2.72991E1	-3.26729E1	-3.26164E1	2.67962E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80014E1	-8.58307E-4	-8.80007E1	4.29153E-4	4.41074E-3	9.33647E-2	2.73003E1	-3.26356E1	-3.26753E1	2.68046E1	1.19872E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.03349E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.8001E1	-8.10623E-4	-8.80005E1	3.09944E-4	4.72069E-3	9.32693E-2	2.72862E1	-3.2616E1	-3.26189E1	2.68059E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80013E1	-1.00136E-3	-8.80005E1	1.66893E-4	4.69685E-3	9.34124E-2	2.72767E1	-3.26608E1	-3.25924E1	2.68059E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01347E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80012E1	-7.86781E-4	-8.80004E1	4.76837E-4	4.50611E-3	9.377E-2	2.72962E1	-3.26484E1	-3.26649E1	2.68058E1	1.19782E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.00494E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80014E1	-5.72205E-4	-8.80003E1	3.09944E-4	4.98295E-3	9.36031E-2	2.73063E1	-3.26771E1	-3.2626E1	2.67986E1	1.20226E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02133E-1
1.4E1	2.93E2	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80012E1	-9.53674E-4	-8.80008E1	7.15256E-4	4.86374E-3	9.36985E-2	2.73171E1	-3.26663E1	-3.2611E1	2.67931E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80013E1	-4.05312E-4	-8.80005E1	3.57628E-4	4.88758E-3	9.35078E-2	2.72968E1	-3.26714E1	-3.26254E1	2.68082E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80013E1	-6.19888E-4	-8.80005E1	-9.53674E-5	4.95911E-3	9.36985E-2	2.73009E1	-3.26452E1	-3.26789E1	2.67932E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80014E1	-6.19888E-4	-8.80009E1	7.15256E-5	4.36306E-3	9.36985E-2	2.72582E1	-3.26987E1	-3.2617E1	2.67992E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.8E1	2.71E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80016E1	-5.72205E-4	-8.80007E1	2.38419E-5	4.12464E-3	9.35793E-2	2.73832E1	-3.25858E1	-3.26488E1	2.6804E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.9E1	3.55E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80014E1	-7.62939E-4	-8.8001E1	7.15256E-5	4.74453E-3	9.38177E-2	2.72998E1	-3.26649E1	-3.26337E1	2.67908E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
2.0E1	2.169E3	1.0E0	8.08E2	5.58E2	-7.286E-2	-8.80017E1	-6.67572E-4	-8.80008E1	-2.38419E-5	4.60148E-3	9.35793E-2	2.73134E1	-3.26484E1	-3.26767E1	2.67775E1	1.20363E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00966E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80016E1	-6.91414E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.37223E-2	2.72845E1	-3.26632E1	-3.26207E1	2.68106E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
2.2E1	1.63E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	-7.15256E-4	-8.80004E1	2.86102E-4	4.60148E-3	9.35555E-2	2.72691E1	-3.26384E1	-3.26095E1	2.68088E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80016E1	-5.48363E-4	-8.80005E1	-7.15256E-5	4.74453E-3	9.35078E-2	2.73063E1	-3.26566E1	-3.26505E1	2.678E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99686E-1