[Scan]
initial_time=2016-01-28T19:08:08
final_time=2016-01-28T19:08:28
ip_count=19
run=1026
dataset=5
scan=351
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.79559E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.63197E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.4183E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.80418E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.61886E-8
mult1=-1.05591E-8
mult2=-2.74256E-9
rf_tmon=-4.96905E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.53358E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6449E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19961E1
lens5a_imon=1.99179E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5363E1
cs_ef1b_imon=3.10902E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04565E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04606E1
cs_ea1_imon=1.24365E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0919E0
lens1_imon=1.41682E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64808E1
os_ef1alow_imon=2.95969E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03639E1
cs_ea2_imon=1.39404E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84937E1
cs_ef1a_imon=3.02219E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.20741E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11248E1
os_restr1_imon=4.29916E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15109E1
os_ea1_imon=2.44487E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63529E1
os_ef1bup_imon=3.09255E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24764E0
cs_ionrep_imon=9.72645E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9183E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=2.04313E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.91886E-8
tplens_vset=1.4E-1
tplens_vmon=1.65543E0
tplens_imon=-3.50452E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.48985E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.59062E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.74925E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27182E0
ionrepsh_imon=9.40964E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12773E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43786E0
os_ea2_imon=-7.32152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70965E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07452E0
os_ef2alow_imon=-2.51443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76424E-1
os_ef2bup_imon=-5.42242E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11017E1
os_restr2_imon=3.37362E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29966E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.09632E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.15389E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.47824E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.08477E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47121E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.87123E-6
window_vset=0.0E0
window_vmon=1.80795E-1
window_imon=-1.21202E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86537E1
mask2_imon=-7.59164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.58511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.59651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.27593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43642E0
defgridb_imon=6.0125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.40274E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06967E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62173E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=9.24711E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38993E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63349E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3309E-2
os_fil2_imon=-2.63131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18476E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33282E-1
cs_fil2_imon=-2.12607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22091E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33211E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52045E-3
foreline_cvt_pmon=2.52045E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.38602E-1
res40_imon=-2.63794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.13E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80015E1	-5.24521E-4	-8.80009E1	3.33786E-4	4.45843E-3	9.36747E-2	2.73145E1	-3.26496E1	-3.26213E1	2.68196E1	1.19626E-7	2.51203E-3	2.51203E-3	6.31925E-3	3.00479E-1
2.0E0	8.652E3	1.0E1	3.16E2	1.6E2	-7.37103E-2	-8.80014E1	-7.86781E-4	-8.80009E1	9.53674E-5	4.57764E-3	9.38892E-2	2.73143E1	-3.26566E1	-3.26211E1	2.67998E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80014E1	-8.10623E-4	-8.80006E1	2.86102E-4	4.3869E-3	9.38654E-2	2.72732E1	-3.26644E1	-3.26254E1	2.68076E1	1.19705E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
4.0E0	2.085E3	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80013E1	-7.15256E-4	-8.80007E1	2.86102E-4	4.3869E-3	9.37939E-2	2.7268E1	-3.26695E1	-3.26996E1	2.68262E1	1.20311E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80016E1	-9.05991E-4	-8.80004E1	1.43051E-4	4.3869E-3	9.377E-2	2.72733E1	-3.26291E1	-3.25244E1	2.68022E1	1.20043E-7	2.51771E-3	2.51771E-3	6.31014E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80017E1	-6.4373E-4	-8.80007E1	1.90735E-4	4.64916E-3	9.39369E-2	2.72691E1	-3.26083E1	-3.26301E1	2.67932E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80016E1	-7.15256E-4	-8.80005E1	1.66893E-4	4.52995E-3	9.36985E-2	2.72886E1	-3.26508E1	-3.26408E1	2.68059E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80013E1	-4.52995E-4	-8.80003E1	1.43051E-4	4.91142E-3	9.37939E-2	2.73075E1	-3.26603E1	-3.26591E1	2.68154E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80012E1	-9.05991E-4	-8.80006E1	2.14577E-4	4.81606E-3	9.36031E-2	2.72909E1	-3.26272E1	-3.26148E1	2.6819E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02396E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80013E1	-1.04904E-3	-8.80006E1	3.57628E-4	4.62532E-3	9.36031E-2	2.72624E1	-3.26362E1	-3.26783E1	2.68238E1	1.20311E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.4E1	3.02E2	1.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80016E1	-7.39098E-4	-8.80009E1	2.14577E-4	4.48227E-3	9.35078E-2	2.73015E1	-3.26554E1	-3.265E1	2.67938E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80017E1	-7.86781E-4	-8.80007E1	1.90735E-4	4.62532E-3	9.35316E-2	2.73417E1	-3.2647E1	-3.26434E1	2.68064E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.98481E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80015E1	-6.67572E-4	-8.80006E1	1.90735E-4	4.60148E-3	9.35555E-2	2.73051E1	-3.26903E1	-3.25997E1	2.67842E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
1.7E1	6.0E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80016E1	-8.34465E-4	-8.80005E1	2.14577E-4	4.57764E-3	9.3627E-2	2.7344E1	-3.27098E1	-3.25859E1	2.67974E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00942E-1
1.8E1	2.34E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80017E1	-6.91414E-4	-8.80004E1	4.76837E-5	4.48227E-3	9.3627E-2	2.73269E1	-3.26579E1	-3.25776E1	2.67804E1	1.20209E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.03804E-1
1.9E1	3.34E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80013E1	-8.82149E-4	-8.80003E1	-7.15256E-5	4.36306E-3	9.35793E-2	2.72973E1	-3.26621E1	-3.26278E1	2.6801E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
2.0E1	2.219E3	3.0E0	8.08E2	5.58E2	-7.286E-2	-8.80013E1	-8.82149E-4	-8.80005E1	-2.38419E-5	4.64916E-3	9.36031E-2	2.7301E1	-3.26614E1	-3.25682E1	2.68136E1	1.19705E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80015E1	-3.33786E-4	-8.80005E1	9.53674E-5	4.41074E-3	9.35078E-2	2.73151E1	-3.26832E1	-3.26467E1	2.68024E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9943E-1
2.2E1	1.52E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80016E1	-7.39098E-4	-8.80005E1	-2.38419E-5	4.45843E-3	9.33886E-2	2.73157E1	-3.26797E1	-3.26272E1	2.68112E1	1.20142E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80016E1	-6.19888E-4	-8.80005E1	4.76837E-5	4.673E-3	9.35793E-2	2.72835E1	-3.26915E1	-3.26446E1	2.67866E1	1.20069E-7	2.52045E-3	2.52045E-3	6.33211E-3	2.9978E-1