[Scan]
initial_time=2016-01-28T19:10:48
final_time=2016-01-28T19:11:08
ip_count=19
run=1026
dataset=5
scan=357
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83403E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.74236E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.43729E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.72521E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62093E-8
mult1=-1.08103E-8
mult2=-2.83287E-9
rf_tmon=-6.03956E-3
rf_agc=3.21667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.80835E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64804E0
bslens_imon=2.41473E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20072E1
lens5a_imon=1.97929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04918E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53607E1
cs_ef1b_imon=3.10821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=1.2432E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06629E0
lens1_imon=1.59551E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96509E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03623E1
cs_ea2_imon=1.4326E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83212E1
cs_ef1a_imon=3.00441E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.18103E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11036E1
os_restr1_imon=4.30144E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.44405E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6371E1
os_ef1bup_imon=3.0924E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24872E0
cs_ionrep_imon=9.61337E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=2.04391E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.90794E-8
tplens_vset=1.4E-1
tplens_vmon=1.60358E0
tplens_imon=-2.61945E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26495E1
iondef3_imon=1.48856E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2678E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.58903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28251E0
ionrepsh_imon=9.29298E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33672E1
lens5b_imon=2.1776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7465E1
cs_ef2b_imon=3.12726E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4515E0
os_ea2_imon=-3.91723E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00696E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7119E1
cs_ef2a_imon=3.16173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05726E0
os_ef2alow_imon=-2.67131E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58231E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.36202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30983E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01748E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73146E1
iondef1_imon=1.08706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68127E1
iondef4_imon=1.08706E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.14611E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.4146E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.12251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56169E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.88436E-1
window_imon=-8.71129E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39125E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-6.3597E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92551E3
multa_neg_imon=8.24259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.21886E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.1922E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30645E0
defgridb_imon=6.1418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.37899E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07187E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61548E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.24797E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37776E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54769E-2
os_fil2_imon=-2.68174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.44365E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.4655E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31867E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21912E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74459E-1
res40_imon=-2.24559E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.09E2	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.8002E1	-5.24521E-4	-8.80005E1	-2.38419E-5	4.95911E-3	9.38177E-2	2.73198E1	-3.2685E1	-3.26968E1	2.6834E1	1.1992E-7	2.51588E-3	2.51588E-3	6.31344E-3	3.00312E-1
2.0E0	8.521E3	6.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80017E1	-5.48363E-4	-8.80005E1	0.0E0	5.00679E-3	9.37939E-2	2.72971E1	-3.26523E1	-3.25495E1	2.67914E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80017E1	-7.62939E-4	-8.80006E1	0.0E0	4.79221E-3	9.377E-2	2.73115E1	-3.2633E1	-3.2655E1	2.6807E1	1.19978E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.01742E-1
4.0E0	2.065E3	1.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80016E1	-9.77516E-4	-8.80006E1	2.38419E-4	4.81606E-3	9.39131E-2	2.72868E1	-3.26785E1	-3.2708E1	2.68064E1	1.20142E-7	2.52342E-3	2.52342E-3	6.30212E-3	3.01862E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80016E1	-5.48363E-4	-8.80004E1	2.6226E-4	4.74453E-3	9.38416E-2	2.72757E1	-3.26676E1	-3.25623E1	2.68184E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80017E1	-4.76837E-4	-8.80004E1	1.43051E-4	4.64916E-3	9.40323E-2	2.73105E1	-3.26458E1	-3.26512E1	2.67956E1	1.19872E-7	2.51248E-3	2.51248E-3	6.30182E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80017E1	-6.19888E-4	-8.80003E1	1.43051E-4	5.29289E-3	9.40323E-2	2.73027E1	-3.26537E1	-3.27328E1	2.68226E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80016E1	-9.05991E-4	-8.80006E1	7.15256E-5	5.17368E-3	9.36985E-2	2.72702E1	-3.26332E1	-3.25719E1	2.68166E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80015E1	-3.33786E-4	-8.80005E1	5.24521E-4	4.98295E-3	9.36031E-2	2.731E1	-3.26621E1	-3.27178E1	2.6807E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80015E1	-5.72205E-4	-8.80003E1	2.38419E-4	4.55379E-3	9.37462E-2	2.72817E1	-3.26741E1	-3.25533E1	2.67932E1	1.20084E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00676E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-7.39098E-4	-8.80001E1	1.90735E-4	5.03063E-3	9.36985E-2	2.73243E1	-3.26278E1	-3.27191E1	2.68202E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
1.5E1	1.1E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80018E1	-5.96046E-4	-8.80005E1	1.66893E-4	5.00679E-3	9.34601E-2	2.72835E1	-3.26999E1	-3.25239E1	2.68298E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80018E1	-5.96046E-4	-8.80005E1	1.19209E-4	4.8399E-3	9.35793E-2	2.73321E1	-3.2653E1	-3.27107E1	2.67836E1	1.20226E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.99E-1
1.7E1	3.6E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80019E1	-6.67572E-4	-8.80003E1	1.43051E-4	4.81606E-3	9.37462E-2	2.72715E1	-3.26773E1	-3.25995E1	2.68184E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.8E1	2.38E2	1.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80017E1	-6.91414E-4	-8.80004E1	2.38419E-5	4.8399E-3	9.36985E-2	2.73063E1	-3.2644E1	-3.26723E1	2.68034E1	1.20114E-7	2.52406E-3	2.52406E-3	6.32371E-3	3.00766E-1
1.9E1	3.44E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80015E1	-6.4373E-4	-8.80003E1	0.0E0	4.95911E-3	9.36747E-2	2.73015E1	-3.26753E1	-3.26945E1	2.6825E1					
2.0E1	2.122E3	1.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80021E1	-1.04904E-3	-8.80001E1	1.43051E-4	4.86374E-3	9.38416E-2	2.72943E1	-3.26639E1	-3.25876E1	2.68316E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00824E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80013E1	-9.77516E-4	-8.80003E1	7.15256E-5	4.86374E-3	9.38892E-2	2.73092E1	-3.26891E1	-3.27481E1	2.67989E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80014E1	-8.10623E-4	-8.80003E1	4.76837E-5	5.14984E-3	9.377E-2	2.73111E1	-3.265E1	-3.25894E1	2.6816E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80017E1	-8.34465E-4	-8.80005E1	1.19209E-4	5.03063E-3	9.37939E-2	2.73146E1	-3.2678E1	-3.26495E1	2.68127E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1