[Scan]
initial_time=2016-01-28T19:13:28
final_time=2016-01-28T19:13:48
ip_count=19
run=1026
dataset=5
scan=363
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.86232E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.4292E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.44681E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.68748E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.62623E-8
mult1=-1.02341E-8
mult2=-2.71262E-9
rf_tmon=-4.10386E-3
rf_agc=3.2913E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.80168E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65654E0
bslens_imon=2.77016E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.96855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53519E1
cs_ef1b_imon=3.10699E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04919E1
cs_ea1_imon=1.24538E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03655E0
lens1_imon=1.53588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.9436E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.39905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.99671E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.18013E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1188E1
os_restr1_imon=4.28279E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15286E1
os_ea1_imon=2.46185E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.08429E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23208E0
cs_ionrep_imon=9.6705E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93437E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01842E1
cs_anode1_imon=2.05608E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.89434E-8
tplens_vset=1.4E-1
tplens_vmon=1.61313E0
tplens_imon=-2.28551E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.47981E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.5904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.55243E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28868E0
ionrepsh_imon=9.2646E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33603E1
lens5b_imon=2.1802E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74521E1
cs_ef2b_imon=3.13172E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45298E0
os_ea2_imon=-6.80014E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06037E2
lens4b_imon=2.00544E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71346E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07753E0
os_ef2alow_imon=-2.59022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61609E-1
os_ef2bup_imon=-5.05533E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10623E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30674E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0191E1
cs_anode2_imon=2.09986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08675E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.09922E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.0356E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.31093E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10514E0
cs_ionaccel_imon=-1.09818E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55973E1
einzel_imon=7.57837E-6
window_vset=0.0E0
window_vmon=1.57352E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39072E-4
mask2_vset=0.0E0
mask2_vmon=-1.86945E1
mask2_imon=-5.95426E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.71968E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53511E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.09426E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39651E0
defgridb_imon=5.82685E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.41711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07214E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61133E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.2552E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30546E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61843E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56683E-2
os_fil2_imon=-2.62768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87278E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33876E-1
cs_fil2_imon=-2.66822E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.87553E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40095E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.27832E-1
res40_imon=-2.51319E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.19E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80015E1	-5.72205E-4	-8.80001E1	-9.53674E-5	5.03063E-3	9.35316E-2	2.73416E1	-3.26868E1	-3.2677E1	2.67839E1	1.20226E-7	2.51375E-3	2.51375E-3	6.31357E-3	3.00726E-1
2.0E0	8.464E3	1.1E1	3.16E2	1.6E2	-7.30918E-2	-8.80017E1	-5.96046E-4	-8.80002E1	4.76837E-5	5.45979E-3	9.35793E-2	2.72732E1	-3.26608E1	-3.26024E1	2.68366E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80015E1	-8.34465E-4	-8.80003E1	-2.38419E-5	5.05447E-3	9.38177E-2	2.7291E1	-3.26529E1	-3.26119E1	2.6762E1	1.1974E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
4.0E0	1.898E3	1.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80015E1	-9.29832E-4	-8.80003E1	4.76837E-5	5.126E-3	9.36985E-2	2.73015E1	-3.26639E1	-3.26338E1	2.67896E1	1.19937E-7	2.52179E-3	2.52179E-3	6.3074E-3	2.99981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80013E1	-8.10623E-4	-8.80003E1	9.53674E-5	5.24521E-3	9.36747E-2	2.72847E1	-3.26669E1	-3.26194E1	2.67974E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80013E1	-4.52995E-4	-8.80004E1	-2.38419E-5	5.126E-3	9.38416E-2	2.72951E1	-3.26567E1	-3.26248E1	2.6854E1	1.20166E-7	2.51538E-3	2.51538E-3	6.30469E-3	3.00249E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80014E1	-4.76837E-4	-8.80003E1	4.76837E-5	4.64916E-3	9.37939E-2	2.73027E1	-3.2644E1	-3.26326E1	2.67926E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80012E1	-6.67572E-4	-8.80003E1	0.0E0	4.79221E-3	9.36031E-2	2.72845E1	-3.26408E1	-3.26284E1	2.6813E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80016E1	-1.07288E-3	-8.80001E1	-9.53674E-5	5.17368E-3	9.35555E-2	2.72979E1	-3.26705E1	-3.26308E1	2.68136E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80017E1	-8.82149E-4	-8.80004E1	1.90735E-4	4.93526E-3	9.36747E-2	2.72919E1	-3.26693E1	-3.26158E1	2.67998E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
1.4E1	2.67E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80017E1	-2.6226E-4	-8.80006E1	2.6226E-4	4.72069E-3	9.3317E-2	2.73248E1	-3.26638E1	-3.26095E1	2.68093E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80015E1	-2.86102E-4	-8.80003E1	-2.38419E-5	5.36442E-3	9.35555E-2	2.73039E1	-3.26874E1	-3.26413E1	2.681E1	1.20273E-7	2.51891E-3	2.51891E-3	6.29754E-3	3.00197E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80018E1	-8.10623E-4	-8.80002E1	1.43051E-4	4.98295E-3	9.3627E-2	2.73057E1	-3.26651E1	-3.2611E1	2.68052E1	1.19941E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.01356E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80017E1	-9.05991E-4	-8.80003E1	3.09944E-4	5.22137E-3	9.38177E-2	2.72886E1	-3.26537E1	-3.26537E1	2.6795E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.8E1	2.1E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80017E1	-6.91414E-4	-8.80004E1	5.00679E-4	4.93526E-3	9.35555E-2	2.72859E1	-3.26524E1	-3.2644E1	2.68124E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.9E1	3.27E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80016E1	-1.21593E-3	-8.80002E1	2.86102E-4	4.60148E-3	9.36747E-2	2.72654E1	-3.26729E1	-3.26176E1	2.68247E1	1.20017E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01085E-1
2.0E1	2.205E3	0.0E0	8.08E2	5.58E2	-7.46377E-2	-8.80015E1	-7.15256E-4	-8.80002E1	5.24521E-4	4.8399E-3	9.37223E-2	2.73104E1	-3.26738E1	-3.26012E1	2.68188E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01995E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80016E1	-8.10623E-4	-8.80004E1	6.4373E-4	4.93526E-3	9.36985E-2	2.73068E1	-3.26498E1	-3.26295E1	2.67758E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80016E1	-8.58307E-4	-8.80005E1	5.24521E-4	4.69685E-3	9.33886E-2	2.73092E1	-3.26773E1	-3.25641E1	2.68214E1	1.19979E-7	2.51783E-3	2.51783E-3	6.323E-3	3.0E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80018E1	-1.04904E-3	-8.80005E1	3.57628E-4	4.60148E-3	9.36747E-2	2.73045E1	-3.26446E1	-3.26026E1	2.68034E1	1.20174E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00824E-1