[Scan]
initial_time=2016-01-28T19:14:21
final_time=2016-01-28T19:14:41
ip_count=19
run=1026
dataset=5
scan=365
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80958E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.09791E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.46445E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.6652E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.62365E-8
mult1=-9.88947E-9
mult2=-2.81537E-9
rf_tmon=-6.24968E-3
rf_agc=3.24243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.5784E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.59028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19921E1
lens5a_imon=1.98774E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53608E1
cs_ef1b_imon=3.09577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.23793E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0603E0
lens1_imon=1.57523E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64485E1
os_ef1alow_imon=2.9649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.038E1
cs_ea2_imon=1.40131E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.00248E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16943E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1114E1
os_restr1_imon=4.29264E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15398E1
os_ea1_imon=2.45529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63742E1
os_ef1bup_imon=3.09711E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23935E0
cs_ionrep_imon=9.67131E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93389E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01837E1
cs_anode1_imon=2.04183E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.90069E-8
tplens_vset=1.4E-1
tplens_vmon=1.64085E0
tplens_imon=-3.1235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25753E1
iondef3_imon=1.49656E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.58311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.7049E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=9.36193E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17511E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74714E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42765E0
os_ea2_imon=-6.04351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00383E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71157E1
cs_ef2a_imon=3.18267E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06295E0
os_ef2alow_imon=-2.54954E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93136E-1
os_ef2bup_imon=-5.3748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10654E1
os_restr2_imon=3.36722E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.29337E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01742E1
cs_anode2_imon=2.0935E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.1034E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.08386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.05713E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.31796E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12007E0
cs_ionaccel_imon=-1.1E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4735E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56086E1
einzel_imon=7.67106E-6
window_vset=0.0E0
window_vmon=1.75503E-1
window_imon=-1.0396E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86914E1
mask2_imon=-6.47015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.33183E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.49754E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.8973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41231E0
defgridb_imon=5.83358E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.38556E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07391E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60875E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.24659E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32282E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66791E-2
os_fil2_imon=-2.5156E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90237E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.87764E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34715E-1
cs_fil2_imon=-2.31427E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19214E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21869E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23438E-1
res40_imon=-2.5596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.24E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80017E1	-5.24521E-4	-8.80005E1	2.14577E-4	4.98295E-3	9.39369E-2	2.73092E1	-3.26632E1	-3.26437E1	2.68118E1	1.20192E-7	2.51182E-3	2.51182E-3	6.30212E-3	3.00852E-1
2.0E0	8.391E3	6.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80017E1	-7.39098E-4	-8.80001E1	7.15256E-5	4.86374E-3	9.40323E-2	2.72931E1	-3.27005E1	-3.26134E1	2.68106E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80018E1	-7.62939E-4	-8.80004E1	1.43051E-4	4.86374E-3	9.36985E-2	2.73063E1	-3.2659E1	-3.25791E1	2.67931E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99686E-1
4.0E0	2.006E3	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80017E1	-8.82149E-4	-8.80007E1	2.38419E-4	4.81606E-3	9.37939E-2	2.72943E1	-3.26735E1	-3.26819E1	2.68136E1	1.20209E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80016E1	-1.23978E-3	-8.80008E1	4.76837E-5	4.79221E-3	9.37939E-2	2.73213E1	-3.26861E1	-3.25749E1	2.68058E1	1.2026E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80015E1	-1.3113E-3	-8.80007E1	3.09944E-4	5.03063E-3	9.35078E-2	2.72925E1	-3.26452E1	-3.27131E1	2.684E1	1.2033E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80017E1	-1.12057E-3	-8.80006E1	9.53674E-5	4.91142E-3	9.36508E-2	2.72856E1	-3.26644E1	-3.25381E1	2.67992E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80018E1	-9.53674E-4	-8.80007E1	2.38419E-4	4.93526E-3	9.33647E-2	2.72961E1	-3.2641E1	-3.26669E1	2.68566E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80018E1	-1.19209E-3	-8.80005E1	3.09944E-4	4.88758E-3	9.38177E-2	2.72925E1	-3.26308E1	-3.27444E1	2.68135E1	1.19851E-7	2.52061E-3	2.52061E-3	6.28056E-3	3.02511E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80016E1	-1.09673E-3	-8.80007E1	4.76837E-4	4.3869E-3	9.38416E-2	2.7288E1	-3.26685E1	-3.25611E1	2.6789E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.02922E-1
1.4E1	2.9E2	1.0E0	5.66E2	3.82E2	-7.07733E-2	-8.80019E1	-9.77516E-4	-8.80005E1	2.86102E-4	4.8399E-3	9.35078E-2	2.73267E1	-3.26603E1	-3.26512E1	2.68124E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01738E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80018E1	-1.09673E-3	-8.80005E1	2.14577E-4	4.79221E-3	9.35793E-2	2.72925E1	-3.26843E1	-3.26693E1	2.67986E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.10051E-2	-8.80016E1	-1.19209E-3	-8.80004E1	2.38419E-5	4.95911E-3	9.3627E-2	2.73016E1	-3.26673E1	-3.25658E1	2.67872E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80016E1	-1.0252E-3	-8.80004E1	3.57628E-4	4.8399E-3	9.36031E-2	2.72886E1	-3.26762E1	-3.26211E1	2.68154E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
1.8E1	2.3E2	0.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80017E1	-1.14441E-3	-8.80005E1	1.43051E-4	4.72069E-3	9.39131E-2	2.73375E1	-3.26639E1	-3.26807E1	2.6804E1	1.19757E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
1.9E1	3.32E2	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80015E1	-9.29832E-4	-8.80004E1	2.38419E-4	4.60148E-3	9.3627E-2	2.73237E1	-3.26536E1	-3.2617E1	2.68034E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
2.0E1	2.301E3	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80018E1	-8.10623E-4	-8.80002E1	2.14577E-4	5.03063E-3	9.35793E-2	2.73345E1	-3.26639E1	-3.25858E1	2.67962E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98819E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	-1.19209E-3	-8.80003E1	2.14577E-4	4.98295E-3	9.37462E-2	2.73234E1	-3.26915E1	-3.26685E1	2.67868E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32626E-3	3.01095E-1
2.2E1	1.66E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	-1.04904E-3	-8.80004E1	2.6226E-4	4.62532E-3	9.34362E-2	2.72856E1	-3.2652E1	-3.26455E1	2.6801E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80017E1	-9.05991E-4	-8.80006E1	3.8147E-4	5.05447E-3	9.35793E-2	2.7321E1	-3.26921E1	-3.25753E1	2.67884E1	1.20106E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.01223E-1