[Scan]
initial_time=2016-01-28T19:15:15
final_time=2016-01-28T19:15:34
ip_count=19
run=1026
dataset=5
scan=367
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.80949E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.20532E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.45588E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.6565E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.6204E-8
mult1=-1.158E-8
mult2=-2.8722E-9
rf_tmon=-5.22916E-3
rf_agc=3.21529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.10614E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.04819E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.08181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02449E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05337E1
cs_ea1_imon=1.23937E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08762E0
lens1_imon=1.65454E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.39222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.16957E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.28986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.46614E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=9.60707E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.05396E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.89959E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2652E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=9.14109E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.35472E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4011E0
os_ea2_imon=-8.86953E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.71321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.37733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.11198E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72597E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.0531E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.30123E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=6.92498E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.63155E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.27969E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.41339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60913E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.25181E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38753E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61824E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.93169E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.80605E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.06E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80015E1	-9.77516E-4	-8.80002E1	-1.19209E-4	5.03063E-3	9.39131E-2	2.73016E1	-3.26644E1	-3.26354E1	2.67878E1	1.20295E-7	2.52026E-3	2.52026E-3	6.32644E-3	3.00637E-1
2.0E0	8.528E3	8.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80017E1	-6.67572E-4	-8.80003E1	1.43051E-4	5.03063E-3	9.38177E-2	2.7275E1	-3.26718E1	-3.26005E1	2.67885E1					
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80013E1	-6.19888E-4	-8.80001E1	4.76837E-5	4.86374E-3	9.38416E-2	2.73584E1	-3.26266E1	-3.26707E1	2.68226E1	1.19841E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01356E-1
4.0E0	1.923E3	2.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80015E1	-7.86781E-4	-8.8E1	2.14577E-4	5.07832E-3	9.36031E-2	2.7265E1	-3.26762E1	-3.26166E1	2.68124E1	1.20191E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.03349E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80017E1	-1.04904E-3	-8.79999E1	-1.19209E-4	4.93526E-3	9.37223E-2	2.72952E1	-3.26214E1	-3.26944E1	2.68018E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80016E1	-7.39098E-4	-8.80003E1	1.19209E-4	4.86374E-3	9.37223E-2	2.73171E1	-3.265E1	-3.25299E1	2.68142E1	1.20302E-7	2.52043E-3	2.52043E-3	6.29143E-3	2.99386E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80014E1	-6.4373E-4	-8.80001E1	0.0E0	4.60148E-3	9.377E-2	2.73004E1	-3.2649E1	-3.26673E1	2.6795E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80015E1	-7.86781E-4	-8.80003E1	0.0E0	4.93526E-3	9.36985E-2	2.73093E1	-3.26783E1	-3.26014E1	2.68274E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80015E1	-8.58307E-4	-8.80006E1	-9.53674E-5	4.673E-3	9.3627E-2	2.72522E1	-3.26933E1	-3.25611E1	2.6789E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-1.07288E-3	-8.80003E1	-4.76837E-5	4.93526E-3	9.35316E-2	2.73033E1	-3.2649E1	-3.26537E1	2.68227E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9926E-1
1.4E1	2.75E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80015E1	-1.04904E-3	-8.80003E1	9.53674E-5	4.93526E-3	9.35078E-2	2.73231E1	-3.26476E1	-3.2617E1	2.67962E1	1.20011E-7	2.51918E-3	2.51918E-3	6.3074E-3	3.02584E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80015E1	-4.76837E-4	-8.80003E1	9.53674E-5	4.8399E-3	9.37462E-2	2.72817E1	-3.26795E1	-3.26518E1	2.6825E1					
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80015E1	-5.96046E-4	-8.80001E1	2.6226E-4	4.81606E-3	9.35555E-2	2.73167E1	-3.26492E1	-3.27019E1	2.67972E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1
1.7E1	6.5E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80016E1	-6.19888E-4	-8.80005E1	1.19209E-4	5.22137E-3	9.3627E-2	2.73479E1	-3.26701E1	-3.25911E1	2.6797E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.8E1	2.19E2	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80019E1	-5.00679E-4	-8.80005E1	-2.14577E-4	4.76837E-3	9.34839E-2	2.73159E1	-3.26873E1	-3.26404E1	2.67974E1	1.19913E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00302E-1
1.9E1	3.43E2	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80018E1	-6.91414E-4	-8.80007E1	0.0E0	4.98295E-3	9.3627E-2	2.72931E1	-3.26765E1	-3.26104E1	2.68106E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
2.0E1	2.173E3	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80017E1	-7.39098E-4	-8.80005E1	-9.53674E-5	4.79221E-3	9.35793E-2	2.72867E1	-3.26676E1	-3.26364E1	2.68034E1	1.2033E-7	2.51225E-3	2.51225E-3	6.27461E-3	3.03449E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80017E1	-7.62939E-4	-8.80008E1	-2.38419E-5	5.14984E-3	9.38177E-2	2.73393E1	-3.26266E1	-3.25918E1	2.67896E1	1.20252E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
2.2E1	1.78E2	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80018E1	-8.34465E-4	-8.80006E1	-2.38419E-5	5.126E-3	9.36985E-2	2.73341E1	-3.26758E1	-3.26579E1	2.68059E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80015E1	-9.53674E-4	-8.80003E1	2.38419E-4	5.126E-3	9.37462E-2	2.72597E1	-3.26844E1	-3.2652E1	2.68016E1	1.20209E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1