[Scan]
initial_time=2016-01-28T19:15:41
final_time=2016-01-28T19:16:01
ip_count=19
run=1026
dataset=5
scan=368
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.80409E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.6638E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.43738E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.633E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61882E-8
mult1=-9.77126E-9
mult2=-3.03095E-9
rf_tmon=-4.76903E-3
rf_agc=3.3079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.25427E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.09731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0533E1
cs_ea1_imon=1.24678E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0861E0
lens1_imon=1.36817E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.42233E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.16635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.45938E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=9.67871E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.03522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.89271E-8
tplens_vset=1.4E-1
tplens_vmon=1.65559E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25835E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.60667E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=9.42741E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44087E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00347E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.37121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.27734E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68001E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.01445E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.31901E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3524E0
defgridb_imon=5.87384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.40618E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.25626E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30944E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21954E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74909E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.12E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80016E1	-3.09944E-4	-8.80003E1	7.15256E-5	4.72069E-3	9.3627E-2	2.72915E1	-3.26661E1	-3.2734E1	2.68076E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
2.0E0	8.307E3	9.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80014E1	-5.00679E-4	-8.80006E1	3.09944E-4	4.72069E-3	9.36747E-2	2.73007E1	-3.26541E1	-3.25224E1	2.68094E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80014E1	-6.67572E-4	-8.80005E1	1.90735E-4	4.79221E-3	9.37462E-2	2.72981E1	-3.27007E1	-3.2706E1	2.6807E1	1.20137E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00942E-1
4.0E0	1.918E3	1.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80018E1	-6.67572E-4	-8.80004E1	2.86102E-4	5.03063E-3	9.37223E-2	2.73092E1	-3.26856E1	-3.2544E1	2.68124E1	1.19646E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80017E1	-8.10623E-4	-8.80005E1	3.57628E-4	5.07832E-3	9.34362E-2	2.72975E1	-3.26619E1	-3.26895E1	2.6803E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80017E1	-7.86781E-4	-8.80007E1	1.43051E-4	5.03063E-3	9.39131E-2	2.72963E1	-3.2676E1	-3.25958E1	2.68055E1	1.20156E-7	2.51843E-3	2.51843E-3	6.32948E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80017E1	-9.29832E-4	-8.80005E1	2.86102E-4	5.17368E-3	9.34839E-2	2.73181E1	-3.26026E1	-3.27753E1	2.68082E1	1.20226E-7	2.52285E-3	2.52285E-3	6.31727E-3	2.99963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80019E1	-8.58307E-4	-8.80004E1	1.43051E-4	4.93526E-3	9.38892E-2	2.72987E1	-3.26864E1	-3.2542E1	2.68231E1	1.19738E-7	2.51439E-3	2.51439E-3	6.33112E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	-1.04904E-3	-8.80005E1	4.05312E-4	5.26905E-3	9.38892E-2	2.73129E1	-3.2644E1	-3.26651E1	2.68058E1	1.20171E-7	2.52454E-3	2.52454E-3	6.31321E-3	3.0147E-1
1.3E1	0.0E0	1.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80018E1	-7.86781E-4	-8.80006E1	3.09944E-4	4.86374E-3	9.38416E-2	2.73098E1	-3.26874E1	-3.27039E1	2.68214E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.4E1	2.55E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80017E1	-9.29832E-4	-8.80006E1	4.52995E-4	4.93526E-3	9.35316E-2	2.73165E1	-3.26603E1	-3.25906E1	2.68018E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9978E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80018E1	-7.86781E-4	-8.80005E1	2.86102E-4	5.19753E-3	9.38416E-2	2.73269E1	-3.26602E1	-3.26077E1	2.67902E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.9892E-1
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80018E1	-7.62939E-4	-8.80006E1	9.53674E-5	4.76837E-3	9.34362E-2	2.73051E1	-3.26573E1	-3.27083E1	2.67968E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9874E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80018E1	-8.10623E-4	-8.80005E1	2.38419E-4	4.74453E-3	9.31263E-2	2.72815E1	-3.2659E1	-3.25906E1	2.67836E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
1.8E1	2.41E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80013E1	-9.29832E-4	-8.80003E1	1.90735E-4	5.14984E-3	9.36031E-2	2.73118E1	-3.26652E1	-3.26058E1	2.67938E1	1.20192E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01609E-1
1.9E1	3.47E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80013E1	-6.91414E-4	-8.80004E1	2.14577E-4	5.14984E-3	9.34362E-2	2.72591E1	-3.26626E1	-3.26874E1	2.678E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.03887E-1
2.0E1	2.119E3	6.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-9.05991E-4	-8.80003E1	1.19209E-4	4.95911E-3	9.377E-2	2.73255E1	-3.26332E1	-3.27227E1	2.67943E1	1.20055E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00966E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80014E1	-1.09673E-3	-8.80005E1	4.76837E-4	5.26905E-3	9.33886E-2	2.72786E1	-3.26502E1	-3.24915E1	2.68016E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29098E-3	2.99E-1
2.2E1	1.55E2	1.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80016E1	-1.33514E-3	-8.80005E1	4.05312E-4	5.19753E-3	9.34124E-2	2.72745E1	-3.26669E1	-3.27263E1	2.67746E1	1.20158E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80015E1	-1.00136E-3	-8.80008E1	2.86102E-4	4.98295E-3	9.35078E-2	2.7334E1	-3.26732E1	-3.25835E1	2.68001E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1