[Scan]
initial_time=2016-01-28T19:16:08
final_time=2016-01-28T19:16:28
ip_count=19
run=1026
dataset=5
scan=369
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.81798E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.39689E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.44758E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64396E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.62378E-8
mult1=-1.14261E-8
mult2=-2.73059E-9
rf_tmon=-4.60856E-3
rf_agc=3.43189E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.50485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67424E0
bslens_imon=2.47849E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19811E1
lens5a_imon=1.99441E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05166E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5378E1
cs_ef1b_imon=3.0948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05183E1
cs_ea1_imon=1.22625E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05472E0
lens1_imon=1.26766E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64465E1
os_ef1alow_imon=2.9683E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04067E1
cs_ea2_imon=1.43221E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84519E1
cs_ef1a_imon=3.0046E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.16639E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11223E1
os_restr1_imon=4.30964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15183E1
os_ea1_imon=2.43474E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63816E1
os_ef1bup_imon=3.07571E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27935E0
cs_ionrep_imon=9.56438E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.05361E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.89577E-8
tplens_vset=1.4E-1
tplens_vmon=1.63884E0
tplens_imon=-1.26164E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.49567E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.58249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.39913E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26053E0
ionrepsh_imon=9.38529E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33321E1
lens5b_imon=2.16922E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.1165E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42016E0
os_ea2_imon=-6.28406E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00397E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06641E0
os_ef2alow_imon=-2.79513E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31939E-1
os_ef2bup_imon=-5.31763E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11036E1
os_restr2_imon=3.38185E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.32147E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.0873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.0966E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.02549E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.27073E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10893E0
cs_ionaccel_imon=-8.82669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47279E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.62796E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.0436E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.866E1
mask2_imon=-6.76827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.32181E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93675E3
defgrida_imon=6.5665E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.88965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43272E0
defgridb_imon=5.97471E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33239E1
os_fil1_imon=9.39083E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07017E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60841E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30933E1
cs_fil1_imon=9.23857E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34003E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61536E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46992E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.92467E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33551E-1
cs_fil2_imon=-2.72488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44186E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94939E-1
res40_imon=-2.52192E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.93E2	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80016E1	-1.04904E-3	-8.80001E1	1.66893E-4	5.34058E-3	9.38177E-2	2.73115E1	-3.26677E1	-3.25953E1	2.68244E1	1.20171E-7	2.5199E-3	2.5199E-3	6.31902E-3	3.00363E-1
2.0E0	8.52E3	9.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80017E1	-8.34465E-4	-8.79999E1	2.38419E-5	5.00679E-3	9.36508E-2	2.72782E1	-3.26652E1	-3.26505E1	2.6797E1	1.20192E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.47149E-2	-8.80017E1	-1.19209E-3	-8.8E1	4.76837E-5	5.26905E-3	9.36985E-2	2.72999E1	-3.2648E1	-3.26185E1	2.67931E1	1.20208E-7	2.52066E-3	2.52066E-3	6.29035E-3	3.01881E-1
4.0E0	1.956E3	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80017E1	-9.05991E-4	-8.80001E1	2.6226E-4	5.43594E-3	9.36031E-2	2.72648E1	-3.26681E1	-3.26398E1	2.68136E1	1.20127E-7	2.52093E-3	2.52093E-3	6.29703E-3	3.00247E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80018E1	-1.07288E-3	-8.80004E1	0.0E0	5.36442E-3	9.34839E-2	2.73273E1	-3.26591E1	-3.27065E1	2.68214E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80018E1	-8.10623E-4	-8.80003E1	-3.8147E-4	5.07832E-3	9.34839E-2	2.72973E1	-3.26554E1	-3.25551E1	2.67854E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80017E1	-9.29832E-4	-8.80002E1	4.76837E-5	5.00679E-3	9.37462E-2	2.7311E1	-3.26579E1	-3.26077E1	2.68286E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80018E1	-1.0252E-3	-8.80004E1	-2.14577E-4	4.86374E-3	9.38177E-2	2.73051E1	-3.26609E1	-3.26364E1	2.68046E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80016E1	-1.19209E-3	-8.80004E1	-3.09944E-4	5.05447E-3	9.39131E-2	2.73135E1	-3.26591E1	-3.25509E1	2.67998E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-9.05991E-4	-8.80004E1	-2.6226E-4	5.00679E-3	9.38892E-2	2.73122E1	-3.26549E1	-3.26838E1	2.68202E1	1.20383E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.4E1	2.66E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80018E1	-9.05991E-4	-8.80002E1	2.86102E-4	4.86374E-3	9.39131E-2	2.72895E1	-3.26687E1	-3.25894E1	2.681E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80018E1	-7.86781E-4	-8.80001E1	1.19209E-4	4.69685E-3	9.39369E-2	2.7278E1	-3.26496E1	-3.2685E1	2.68141E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.6E1	3.6E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80016E1	-1.00136E-3	-8.79999E1	9.53674E-5	4.98295E-3	9.40561E-2	2.7324E1	-3.26885E1	-3.26508E1	2.6789E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0071E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80018E1	-9.77516E-4	-8.80006E1	4.76837E-5	4.95911E-3	9.377E-2	2.72886E1	-3.2659E1	-3.26001E1	2.67891E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00197E-1
1.8E1	1.99E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80021E1	-1.0252E-3	-8.80003E1	2.6226E-4	5.126E-3	9.38892E-2	2.73161E1	-3.26872E1	-3.26866E1	2.68004E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00453E-1
1.9E1	3.56E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80018E1	-9.29832E-4	-8.80004E1	1.90735E-4	5.126E-3	9.36747E-2	2.73039E1	-3.26738E1	-3.26048E1	2.6783E1	1.2035E-7	2.51025E-3	2.51025E-3	6.34099E-3	3.01475E-1
2.0E1	2.042E3	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80018E1	-8.34465E-4	-8.80003E1	1.90735E-4	4.95911E-3	9.34601E-2	2.72997E1	-3.26549E1	-3.25906E1	2.67908E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9926E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.8002E1	-5.72205E-4	-8.80004E1	9.53674E-5	5.126E-3	9.37223E-2	2.72808E1	-3.26434E1	-3.2626E1	2.67984E1	1.19876E-7	2.51471E-3	2.51471E-3	6.31548E-3	3.00838E-1
2.2E1	1.56E2	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.8002E1	-9.77516E-4	-8.80004E1	-1.66893E-4	5.03063E-3	9.377E-2	2.7263E1	-3.26627E1	-3.26302E1	2.68016E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80016E1	-7.86781E-4	-8.80005E1	0.0E0	4.8399E-3	9.377E-2	2.73213E1	-3.26428E1	-3.265E1	2.68178E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1