[Scan]
initial_time=2016-01-28T19:17:28
final_time=2016-01-28T19:17:48
ip_count=19
run=1026
dataset=5
scan=372
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84701E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.18637E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.44057E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.58457E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.62611E-8
mult1=-1.00173E-8
mult2=-2.85834E-9
rf_tmon=-3.99571E-3
rf_agc=3.42769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.8099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66256E0
bslens_imon=2.58361E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19733E1
lens5a_imon=1.97572E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05011E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53606E1
cs_ef1b_imon=3.09248E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.01981E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04735E1
cs_ea1_imon=1.24338E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08262E0
lens1_imon=1.48179E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.97493E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03632E1
cs_ea2_imon=1.41352E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.842E1
cs_ef1a_imon=2.99361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.15937E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.29753E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15352E1
os_ea1_imon=2.4546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6359E1
os_ef1bup_imon=3.07535E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24431E0
cs_ionrep_imon=9.64225E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=2.04623E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.88013E-8
tplens_vset=1.4E-1
tplens_vmon=1.60639E0
tplens_imon=-2.31284E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.49138E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.59495E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.69322E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25794E0
ionrepsh_imon=9.24124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.18674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74676E1
cs_ef2b_imon=3.13685E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40005E0
os_ea2_imon=-6.51766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71303E1
cs_ef2a_imon=3.17966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0578E0
os_ef2alow_imon=-2.49437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03046E-1
os_ef2bup_imon=-5.37466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10773E1
os_restr2_imon=3.36766E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.3094E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01776E1
cs_anode2_imon=2.1015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.07861E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.07139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.24877E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11652E0
cs_ionaccel_imon=-1.08147E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56198E1
einzel_imon=7.60221E-6
window_vset=0.0E0
window_vmon=1.85435E-1
window_imon=-1.03866E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39096E-4
mask2_vset=0.0E0
mask2_vmon=-1.86487E1
mask2_imon=-7.00031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.43861E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.4497E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.26341E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41323E0
defgridb_imon=6.11877E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.38774E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08529E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60752E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30951E1
cs_fil1_imon=9.2545E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33998E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6166E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7485E-2
os_fil2_imon=-2.67173E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92116E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03187E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35525E-1
cs_fil2_imon=-2.6912E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83218E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22124E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.39994E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34086E-1
res40_imon=-2.47102E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.36E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80014E1	-1.35899E-3	-8.80005E1	1.19209E-4	4.55379E-3	9.37939E-2	2.73544E1	-3.26777E1	-3.26122E1	2.68024E1	1.20019E-7	2.51439E-3	2.51439E-3	6.29558E-3	3.01043E-1
2.0E0	8.42E3	9.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80016E1	-9.29832E-4	-8.80004E1	-9.53674E-5	4.69685E-3	9.35793E-2	2.72842E1	-3.2667E1	-3.26516E1	2.6795E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02396E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80015E1	-7.62939E-4	-8.80005E1	3.57628E-4	4.52995E-3	9.36985E-2	2.73281E1	-3.2649E1	-3.26284E1	2.67914E1	1.19954E-7	2.51964E-3	2.51964E-3	6.29962E-3	3.01423E-1
4.0E0	1.926E3	2.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80015E1	-6.67572E-4	-8.80005E1	4.29153E-4	4.72069E-3	9.36508E-2	2.72841E1	-3.26242E1	-3.25821E1	2.68136E1	1.20106E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80017E1	-9.05991E-4	-8.80006E1	3.8147E-4	4.55379E-3	9.3627E-2	2.72715E1	-3.26502E1	-3.27334E1	2.6804E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80019E1	-5.00679E-4	-8.80003E1	-2.38419E-5	4.86374E-3	9.36985E-2	2.73333E1	-3.26855E1	-3.24626E1	2.68142E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99941E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80019E1	-1.04904E-3	-8.80003E1	9.53674E-5	4.76837E-3	9.35793E-2	2.73466E1	-3.26549E1	-3.26855E1	2.6816E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80017E1	-8.10623E-4	-8.80002E1	1.90735E-4	4.72069E-3	9.3317E-2	2.72901E1	-3.26651E1	-3.25527E1	2.6822E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01609E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80019E1	-6.91414E-4	-8.80001E1	-7.15256E-5	4.52995E-3	9.36747E-2	2.72654E1	-3.2644E1	-3.27414E1	2.68178E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-8.10623E-4	-8.80001E1	0.0E0	4.86374E-3	9.34362E-2	2.73213E1	-3.26687E1	-3.25365E1	2.6792E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.4E1	2.98E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-7.15256E-4	-8.79999E1	2.38419E-4	4.79221E-3	9.34601E-2	2.73057E1	-3.26921E1	-3.27191E1	2.6804E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80017E1	-5.72205E-4	-8.80002E1	-9.53674E-5	4.57764E-3	9.34839E-2	2.72907E1	-3.26494E1	-3.25821E1	2.681E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9952E-1
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80015E1	-6.4373E-4	-8.80002E1	4.05312E-4	4.60148E-3	9.34601E-2	2.72829E1	-3.26603E1	-3.26206E1	2.67824E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.99E-1
1.7E1	5.1E1	1.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80016E1	-8.58307E-4	-8.80006E1	-7.15256E-5	4.69685E-3	9.32693E-2	2.73321E1	-3.26813E1	-3.2617E1	2.681E1	1.19913E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00824E-1
1.8E1	2.14E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80015E1	-1.16825E-3	-8.80003E1	1.43051E-4	4.88758E-3	9.35078E-2	2.73123E1	-3.27023E1	-3.26651E1	2.67862E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.9E1	3.06E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80017E1	-9.05991E-4	-8.80003E1	3.8147E-4	4.72069E-3	9.35078E-2	2.73184E1	-3.26967E1	-3.25391E1	2.68208E1	1.20069E-7	2.50898E-3	2.50898E-3	6.3074E-3	3.01347E-1
2.0E1	2.157E3	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80019E1	-6.67572E-4	-8.80007E1	7.15256E-5	4.55379E-3	9.32455E-2	2.72576E1	-3.26374E1	-3.26068E1	2.68022E1	1.1979E-7	2.52025E-3	2.52025E-3	6.29684E-3	2.98092E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80019E1	-8.34465E-4	-8.80004E1	-1.19209E-4	4.3869E-3	9.35078E-2	2.72979E1	-3.26723E1	-3.26332E1	2.67878E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
2.2E1	1.48E2	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80019E1	-8.10623E-4	-8.80005E1	-4.76837E-5	4.62532E-3	9.36031E-2	2.73139E1	-3.26714E1	-3.26437E1	2.68134E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80018E1	-4.52995E-4	-8.80006E1	-2.38419E-5	4.69685E-3	9.34362E-2	2.73159E1	-3.26783E1	-3.26398E1	2.6834E1	1.19902E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0148E-1