[Scan]
initial_time=2016-01-28T19:18:48
final_time=2016-01-28T19:19:08
ip_count=19
run=1026
dataset=5
scan=375
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79489E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.05965E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.37568E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.61973E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.63211E-8
mult1=-1.1178E-8
mult2=-2.66642E-9
rf_tmon=-3.99036E-3
rf_agc=3.384E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.56099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53624E1
cs_ef1b_imon=3.10769E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=1.26518E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10498E0
lens1_imon=1.60531E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64641E1
os_ef1alow_imon=2.95837E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.41631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.00897E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.15433E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11265E1
os_restr1_imon=4.29236E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.45725E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.07868E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.7141E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02139E1
cs_anode1_imon=2.03555E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.88268E-8
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.81302E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=9.31061E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.1649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12963E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40547E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71346E1
cs_ef2a_imon=3.17846E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04188E0
os_ef2alow_imon=-2.66563E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68133E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.36954E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.11198E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68036E1
iondef4_imon=1.0876E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.02086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.2354E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12601E0
cs_ionaccel_imon=-1.03441E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47163E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56511E1
einzel_imon=7.74092E-6
window_vset=0.0E0
window_vmon=1.97761E-1
window_imon=-1.08749E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39123E-4
mask2_vset=0.0E0
mask2_vmon=-1.86621E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.73557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.39837E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07217E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60542E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30903E1
cs_fil1_imon=9.25017E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28053E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61303E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.6912E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82621E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04655E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35436E-1
cs_fil2_imon=-2.36094E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20698E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78081E-1
res40_imon=-2.44625E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.26E2	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80018E1	-5.00679E-4	-8.80007E1	3.33786E-4	4.72069E-3	9.39131E-2	2.72859E1	-3.26543E1	-3.2638E1	2.68186E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
2.0E0	8.541E3	1.0E1	3.16E2	1.6E2	-7.30146E-2	-8.8002E1	-4.76837E-4	-8.80007E1	9.53674E-5	4.74453E-3	9.36985E-2	2.73241E1	-3.2656E1	-3.26315E1	2.6813E1	1.19705E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01609E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80018E1	-5.00679E-4	-8.80006E1	2.14577E-4	4.93526E-3	9.35793E-2	2.73198E1	-3.26708E1	-3.25405E1	2.68094E1	1.19978E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.03349E-1
4.0E0	2.014E3	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80018E1	-5.00679E-4	-8.80005E1	5.24521E-4	4.88758E-3	9.35793E-2	2.73111E1	-3.26801E1	-3.26368E1	2.68052E1	1.20293E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80016E1	-5.00679E-4	-8.80003E1	4.52995E-4	4.93526E-3	9.35316E-2	2.7311E1	-3.26862E1	-3.25304E1	2.67842E1	1.2035E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01475E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80018E1	-1.04904E-3	-8.80004E1	2.38419E-4	5.10216E-3	9.34839E-2	2.73171E1	-3.26425E1	-3.25725E1	2.67885E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80019E1	-6.91414E-4	-8.80007E1	9.53674E-5	4.57764E-3	9.33647E-2	2.72517E1	-3.26686E1	-3.2717E1	2.68157E1	1.19979E-7	2.51679E-3	2.51679E-3	6.33863E-3	3.00989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-6.19888E-4	-8.80004E1	1.90735E-4	4.74453E-3	9.34362E-2	2.72985E1	-3.26506E1	-3.25852E1	2.68202E1	1.20038E-7	2.51765E-3	2.51765E-3	6.31869E-3	2.99795E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80015E1	-9.05991E-4	-8.79999E1	2.14577E-4	4.86374E-3	9.36031E-2	2.73075E1	-3.26785E1	-3.25971E1	2.67998E1					
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80018E1	-7.15256E-4	-8.80006E1	1.19209E-4	5.10216E-3	9.32455E-2	2.73117E1	-3.26621E1	-3.26789E1	2.67806E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
1.4E1	3.1E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80016E1	-7.15256E-4	-8.80006E1	2.38419E-5	4.93526E-3	9.33409E-2	2.73382E1	-3.26689E1	-3.27142E1	2.67674E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80015E1	-9.29832E-4	-8.80007E1	9.53674E-5	4.55379E-3	9.34839E-2	2.73027E1	-3.26735E1	-3.26356E1	2.68106E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99348E-1
1.6E1	1.7E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80013E1	-8.10623E-4	-8.80007E1	1.66893E-4	4.52995E-3	9.34362E-2	2.72871E1	-3.26422E1	-3.26008E1	2.67872E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.97963E-1
1.7E1	4.4E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80014E1	-1.40667E-3	-8.80005E1	1.43051E-4	4.64916E-3	9.34124E-2	2.73293E1	-3.26602E1	-3.26124E1	2.67943E1	1.19697E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.9841E-1
1.8E1	2.17E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80016E1	-9.53674E-4	-8.80005E1	3.09944E-4	5.05447E-3	9.32932E-2	2.73303E1	-3.26482E1	-3.2635E1	2.68166E1	1.20055E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.00453E-1
1.9E1	3.1E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-9.29832E-4	-8.80004E1	1.19209E-4	4.86374E-3	9.32693E-2	2.73039E1	-3.2644E1	-3.26573E1	2.68148E1	1.20137E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.03618E-1
2.0E1	2.088E3	2.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-9.77516E-4	-8.80008E1	1.19209E-4	5.03063E-3	9.34839E-2	2.73216E1	-3.26703E1	-3.26496E1	2.6813E1	1.19646E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80017E1	-1.04904E-3	-8.80004E1	2.14577E-4	4.69685E-3	9.3627E-2	2.72892E1	-3.26467E1	-3.26467E1	2.68202E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9874E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80015E1	-9.77516E-4	-8.8E1	9.53674E-5	4.64916E-3	9.36985E-2	2.73297E1	-3.26657E1	-3.26735E1	2.68268E1	1.20209E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80014E1	-8.58307E-4	-8.80002E1	1.19209E-4	5.03063E-3	9.34124E-2	2.72915E1	-3.26626E1	-3.26496E1	2.68036E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9926E-1