[Scan]
initial_time=2016-01-28T19:20:08
final_time=2016-01-28T19:20:28
ip_count=19
run=1026
dataset=5
scan=378
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.76794E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.22702E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.44862E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.58216E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.62647E-8
mult1=-9.9812E-9
mult2=-2.83838E-9
rf_tmon=-3.68329E-3
rf_agc=3.39765E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.58972E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.09082E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0714E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15657E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.31148E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.44198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=9.59986E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.04279E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.88381E-8
tplens_vset=1.4E-1
tplens_vmon=1.6138E0
tplens_imon=-4.75989E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.45552E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=9.13842E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41853E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68186E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.98806E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.24651E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.19233E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.31214E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.46933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24216E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.41111E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60637E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.25169E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33587E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61499E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.11601E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21963E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77912E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.2E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80015E1	-8.82149E-4	-8.80002E1	7.15256E-5	4.45843E-3	9.35793E-2	2.73405E1	-3.26703E1	-3.25835E1	2.67798E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
2.0E0	8.645E3	7.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80013E1	-8.58307E-4	-8.80003E1	2.38419E-5	4.86374E-3	9.3627E-2	2.72727E1	-3.26554E1	-3.26419E1	2.67926E1	1.19646E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99175E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80017E1	-9.05991E-4	-8.80003E1	3.8147E-4	4.57764E-3	9.35793E-2	2.73249E1	-3.26629E1	-3.26128E1	2.68039E1	1.1979E-7	2.51972E-3	2.51972E-3	6.31269E-3	3.00222E-1
4.0E0	1.999E3	1.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80019E1	-9.29832E-4	-8.80004E1	1.43051E-4	4.62532E-3	9.34124E-2	2.73099E1	-3.26771E1	-3.26392E1	2.67878E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80015E1	-5.00679E-4	-8.80004E1	4.76837E-5	4.98295E-3	9.35793E-2	2.73393E1	-3.2652E1	-3.26083E1	2.68202E1	1.198E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80017E1	-6.91414E-4	-8.80004E1	9.53674E-5	4.74453E-3	9.36031E-2	2.72811E1	-3.26567E1	-3.26699E1	2.68209E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80018E1	-9.29832E-4	-8.80006E1	1.66893E-4	5.05447E-3	9.377E-2	2.72793E1	-3.26554E1	-3.26362E1	2.68088E1	1.19902E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80016E1	-8.10623E-4	-8.80005E1	3.09944E-4	4.93526E-3	9.35316E-2	2.72859E1	-3.26651E1	-3.25227E1	2.67946E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99083E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80015E1	-5.24521E-4	-8.80005E1	2.86102E-4	4.57764E-3	9.37223E-2	2.73334E1	-3.27145E1	-3.25676E1	2.68016E1	1.20004E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80015E1	-6.91414E-4	-8.80004E1	3.33786E-4	4.64916E-3	9.36508E-2	2.73123E1	-3.26825E1	-3.26272E1	2.67812E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80015E1	-9.05991E-4	-8.80003E1	2.38419E-4	4.62532E-3	9.38177E-2	2.72919E1	-3.27095E1	-3.25972E1	2.68256E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80016E1	-8.82149E-4	-8.79999E1	2.86102E-4	4.55379E-3	9.35078E-2	2.73033E1	-3.26416E1	-3.26128E1	2.6792E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.6E1	2.0E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80016E1	-5.00679E-4	-8.80002E1	-7.15256E-5	4.57764E-3	9.35793E-2	2.73255E1	-3.26765E1	-3.26218E1	2.68142E1	1.20069E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00563E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80015E1	-7.86781E-4	-8.80003E1	2.38419E-5	4.62532E-3	9.34601E-2	2.73129E1	-3.2653E1	-3.26338E1	2.6789E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00942E-1
1.8E1	2.29E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80015E1	-8.10623E-4	-8.80002E1	9.53674E-5	4.48227E-3	9.39131E-2	2.73111E1	-3.26753E1	-3.26549E1	2.6801E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.9E1	3.17E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-8.10623E-4	-8.80002E1	3.57628E-4	4.673E-3	9.3627E-2	2.73225E1	-3.26975E1	-3.26224E1	2.68118E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01995E-1
2.0E1	2.121E3	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80017E1	-7.15256E-4	-8.8E1	3.57628E-4	5.03063E-3	9.36747E-2	2.73358E1	-3.26687E1	-3.26271E1	2.67965E1	1.19705E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00302E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80017E1	-5.24521E-4	-8.80003E1	1.66893E-4	4.95911E-3	9.36508E-2	2.73312E1	-3.26903E1	-3.26387E1	2.68004E1	1.1993E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.0E-1
2.2E1	1.53E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80018E1	-7.39098E-4	-8.8E1	0.0E0	4.95911E-3	9.3627E-2	2.73287E1	-3.26649E1	-3.25995E1	2.67842E1	1.19895E-7	2.5118E-3	2.5118E-3	6.33065E-3	3.00087E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80017E1	-1.00136E-3	-8.8E1	-4.76837E-5	4.72069E-3	9.35555E-2	2.73255E1	-3.26699E1	-3.26398E1	2.68186E1	1.19861E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.00824E-1