[Scan]
initial_time=2016-01-28T19:21:28
final_time=2016-01-28T19:21:48
ip_count=19
run=1026
dataset=5
scan=381
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.78557E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.13177E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.40424E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.58243E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.62557E-8
mult1=-1.09106E-8
mult2=-2.68939E-9
rf_tmon=-4.038E-3
rf_agc=3.38977E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.38862E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.10055E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.24622E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07681E0
lens1_imon=1.44906E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.39979E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.14693E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.46253E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.64672E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=2.05756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.87968E-8
tplens_vset=1.4E-1
tplens_vmon=1.59156E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26701E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.58116E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=9.35472E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42634E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6619E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.36472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01527E1
cs_anode2_imon=2.10009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72824E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.8959E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.20409E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33232E1
os_fil1_imon=9.40552E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60272E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.25103E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24877E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61139E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26166E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21851E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34975E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.96E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80018E1	-5.96046E-4	-8.80004E1	0.0E0	4.673E-3	9.34839E-2	2.73297E1	-3.26506E1	-3.26194E1	2.68516E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
2.0E0	8.503E3	7.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80019E1	-7.39098E-4	-8.80003E1	1.90735E-4	4.48227E-3	9.34362E-2	2.72916E1	-3.26432E1	-3.26352E1	2.68144E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80019E1	-5.96046E-4	-8.80004E1	3.09944E-4	4.93526E-3	9.36031E-2	2.73393E1	-3.26762E1	-3.25824E1	2.68018E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99879E-1
4.0E0	1.937E3	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80016E1	-5.00679E-4	-8.80003E1	7.15256E-5	4.3869E-3	9.35793E-2	2.73141E1	-3.26482E1	-3.26392E1	2.67692E1	1.19804E-7	2.51972E-3	2.51972E-3	6.31827E-3	2.99861E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80016E1	-5.24521E-4	-8.80007E1	1.19209E-4	4.52995E-3	9.37939E-2	2.73051E1	-3.26651E1	-3.26014E1	2.67974E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80014E1	-5.24521E-4	-8.80006E1	3.33786E-4	4.60148E-3	9.36508E-2	2.73075E1	-3.2649E1	-3.26248E1	2.68274E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80014E1	-6.91414E-4	-8.80004E1	2.14577E-4	4.8399E-3	9.35793E-2	2.72787E1	-3.26549E1	-3.26428E1	2.67908E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80014E1	-9.29832E-4	-8.80003E1	-1.90735E-4	4.36306E-3	9.34362E-2	2.72933E1	-3.26773E1	-3.26467E1	2.68186E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9892E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80016E1	-2.86102E-4	-8.8E1	-2.14577E-4	4.673E-3	9.35555E-2	2.72957E1	-3.26402E1	-3.26213E1	2.68088E1	1.20055E-7	2.51686E-3	2.51686E-3	6.29396E-3	3.00838E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-5.96046E-4	-8.80001E1	-7.15256E-5	4.93526E-3	9.34601E-2	2.72998E1	-3.26992E1	-3.26343E1	2.67876E1					
1.4E1	2.83E2	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.8002E1	-4.05312E-4	-8.80002E1	-1.90735E-4	4.91142E-3	9.36508E-2	2.73159E1	-3.26699E1	-3.26585E1	2.68259E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.03286E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	-6.19888E-4	-8.80001E1	2.6226E-4	4.8399E-3	9.37223E-2	2.73105E1	-3.26771E1	-3.25894E1	2.68198E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.8002E1	-6.19888E-4	-8.8E1	2.38419E-5	4.62532E-3	9.35555E-2	2.73308E1	-3.26444E1	-3.26321E1	2.68038E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.99E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80017E1	-6.4373E-4	-8.80001E1	1.66893E-4	4.45843E-3	9.377E-2	2.73305E1	-3.26868E1	-3.26213E1	2.68406E1	1.19607E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98554E-1
1.8E1	2.27E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80017E1	-5.96046E-4	-8.80003E1	4.76837E-5	4.57764E-3	9.38177E-2	2.73027E1	-3.26765E1	-3.25725E1	2.68163E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.9E1	3.26E2	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80017E1	-7.62939E-4	-8.80003E1	1.43051E-4	5.03063E-3	9.37462E-2	2.73228E1	-3.26626E1	-3.26431E1	2.68707E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.0E1	2.195E3	1.0E0	8.08E2	5.58E2	-7.286E-2	-8.80017E1	-5.72205E-4	-8.80002E1	-4.76837E-5	4.74453E-3	9.35078E-2	2.72354E1	-3.26356E1	-3.26705E1	2.6801E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80014E1	-7.15256E-4	-8.79999E1	-9.53674E-5	4.79221E-3	9.36747E-2	2.72962E1	-3.26903E1	-3.26036E1	2.68024E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.2E1	1.71E2	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80016E1	-5.96046E-4	-8.80001E1	3.09944E-4	4.93526E-3	9.39846E-2	2.73552E1	-3.2662E1	-3.26384E1	2.67631E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80015E1	-6.91414E-4	-8.80004E1	4.52995E-4	4.88758E-3	9.38416E-2	2.72824E1	-3.26701E1	-3.26474E1	2.68046E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1