[Scan]
initial_time=2016-01-28T19:21:55
final_time=2016-01-28T19:22:14
ip_count=19
run=1026
dataset=5
scan=382
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.84417E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.20031E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.43757E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.53143E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.63266E-8
mult1=-1.12541E-8
mult2=-2.74226E-9
rf_tmon=-4.54609E-3
rf_agc=3.37752E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.40888E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64808E0
bslens_imon=2.69552E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1991E1
lens5a_imon=1.97537E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05085E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53518E1
cs_ef1b_imon=3.09367E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02159E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.25472E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05182E0
lens1_imon=1.34048E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64546E1
os_ef1alow_imon=2.97541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.39672E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.00498E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.14914E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.31488E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15331E1
os_ea1_imon=2.44716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22283E0
cs_ionrep_imon=9.69973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93302E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.0465E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.87878E-8
tplens_vset=1.4E-1
tplens_vmon=1.61281E0
tplens_imon=-3.73354E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.49481E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.5765E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=8.28755E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27882E0
ionrepsh_imon=9.22643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33308E1
lens5b_imon=2.16393E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.121E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41814E0
os_ea2_imon=-7.05433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71033E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03647E0
os_ef2alow_imon=-2.60051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82661E-1
os_ef2bup_imon=-5.3326E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.36988E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.31035E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.10451E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72849E1
iondef1_imon=1.09403E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.08877E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.94925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.17663E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11891E0
cs_ionaccel_imon=-1.08103E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47249E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56143E1
einzel_imon=7.61299E-6
window_vset=0.0E0
window_vmon=1.81418E-1
window_imon=-1.14465E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86675E1
mask2_imon=-8.1156E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.32555E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.56597E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=6.9553E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.90181E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.36912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.23688E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33566E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60921E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6723E-2
os_fil2_imon=-2.62508E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90968E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03776E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.12607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21868E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77474E-1
res40_imon=-2.60051E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=246
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.95E2	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80019E1	-4.52995E-4	-8.8E1	2.6226E-4	4.8399E-3	9.39369E-2	2.72766E1	-3.26764E1	-3.26249E1	2.68088E1	1.1984E-7	2.50834E-3	2.50834E-3	6.31321E-3	3.00639E-1
2.0E0	8.287E3	9.0E0	3.16E2	1.6E2	-7.19325E-2	-8.8002E1	-7.15256E-4	-8.80002E1	9.53674E-5	4.81606E-3	9.39608E-2	2.72824E1	-3.26675E1	-3.26137E1	2.67972E1	1.19725E-7	2.51549E-3	2.51549E-3	6.31761E-3	3.01853E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80016E1	-6.19888E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.35316E-2	2.73323E1	-3.26492E1	-3.26005E1	2.6785E1	1.19738E-7	2.52266E-3	2.52266E-3	6.34301E-3	3.01326E-1
4.0E0	1.969E3	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80019E1	-7.86781E-4	-8.80003E1	3.09944E-4	5.126E-3	9.37223E-2	2.72437E1	-3.26419E1	-3.26384E1	2.68028E1	1.1974E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80018E1	-5.00679E-4	-8.80004E1	1.43051E-4	4.74453E-3	9.35555E-2	2.73479E1	-3.26536E1	-3.26236E1	2.67884E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80019E1	-7.86781E-4	-8.80001E1	6.4373E-4	4.98295E-3	9.38177E-2	2.73069E1	-3.26669E1	-3.26158E1	2.6795E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80018E1	-7.86781E-4	-8.80004E1	4.76837E-4	4.76837E-3	9.377E-2	2.72886E1	-3.26537E1	-3.25983E1	2.68136E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80018E1	-5.72205E-4	-8.80007E1	9.53674E-5	4.52995E-3	9.36031E-2	2.72522E1	-3.26687E1	-3.26338E1	2.67986E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80016E1	-7.62939E-4	-8.80003E1	1.43051E-4	5.22137E-3	9.34601E-2	2.73237E1	-3.26735E1	-3.2623E1	2.68142E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80017E1	-7.15256E-4	-8.80004E1	0.0E0	4.93526E-3	9.36747E-2	2.72871E1	-3.26573E1	-3.26759E1	2.6828E1	1.20278E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97963E-1
1.4E1	2.94E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-6.91414E-4	-8.8E1	1.19209E-4	5.03063E-3	9.35316E-2	2.73333E1	-3.26795E1	-3.26158E1	2.68274E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9926E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80016E1	-7.62939E-4	-8.80004E1	2.6226E-4	4.95911E-3	9.36747E-2	2.72797E1	-3.26679E1	-3.26254E1	2.68256E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.6E1	3.9E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80018E1	-5.96046E-4	-8.80003E1	1.43051E-4	4.79221E-3	9.36985E-2	2.73478E1	-3.26777E1	-3.26314E1	2.68099E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80016E1	-5.48363E-4	-8.80001E1	1.90735E-4	4.673E-3	9.3317E-2	2.72973E1	-3.2653E1	-3.2617E1	2.68046E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.8E1	2.1E2	2.0E0	7.27E2	5.0E2	-7.286E-2	-8.80016E1	-3.8147E-4	-8.8E1	1.43051E-4	4.95911E-3	9.35555E-2	2.72907E1	-3.26476E1	-3.2626E1	2.67926E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80018E1	-1.43051E-4	-8.80001E1	1.19209E-4	4.69685E-3	9.35793E-2	2.72974E1	-3.26655E1	-3.26248E1	2.68322E1	1.20278E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.98481E-1
2.0E1	2.122E3	1.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	-8.34465E-4	-8.79999E1	1.19209E-4	4.81606E-3	9.38416E-2	2.7362E1	-3.26915E1	-3.26181E1	2.68082E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80016E1	-6.19888E-4	-8.80001E1	-9.53674E-5	4.93526E-3	9.38416E-2	2.72862E1	-3.26549E1	-3.25806E1	2.68166E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80015E1	-4.52995E-4	-8.79998E1	-9.53674E-5	4.88758E-3	9.37462E-2	2.72968E1	-3.2662E1	-3.25924E1	2.67782E1	1.20055E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80017E1	-5.72205E-4	-8.8E1	-2.38419E-5	4.8399E-3	9.39846E-2	2.72849E1	-3.26615E1	-3.26474E1	2.68226E1	1.19809E-7	2.52867E-3	2.52867E-3	6.32386E-3	3.00824E-1