[Scan]
initial_time=2016-01-28T19:22:22
final_time=2016-01-28T19:22:41
ip_count=19
run=1026
dataset=5
scan=383
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81396E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.36005E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.44331E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.54852E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.62776E-8
mult1=-1.00655E-8
mult2=-2.79446E-9
rf_tmon=-3.87555E-3
rf_agc=3.39825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.44369E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.9582E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1244E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.09929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=1.26129E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03596E0
lens1_imon=1.33278E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.4241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.1547E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.2979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.44416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.55129E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.04594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.88212E-8
tplens_vset=1.4E-1
tplens_vmon=1.67742E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26963E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.96001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=9.2646E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40665E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06383E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75221E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.35889E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01543E1
cs_anode2_imon=2.10224E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68117E1
iondef4_imon=1.08746E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.95241E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.18368E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-1.12193E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.80037E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86564E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.56214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.45784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.40109E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07601E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60542E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.24748E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28973E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61222E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.11235E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21868E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15389E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.16E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80018E1	-6.91414E-4	-8.8E1	3.09944E-4	4.64916E-3	9.35078E-2	2.73021E1	-3.2649E1	-3.26148E1	2.6831E1	1.20414E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00197E-1
2.0E0	8.318E3	5.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80014E1	-5.48363E-4	-8.80002E1	3.09944E-4	5.00679E-3	9.35555E-2	2.72984E1	-3.26505E1	-3.26064E1	2.67818E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80018E1	-9.05991E-4	-8.80004E1	3.09944E-4	5.14984E-3	9.37462E-2	2.73138E1	-3.26532E1	-3.26243E1	2.678E1	1.19872E-7	2.51359E-3	2.51359E-3	6.29624E-3	2.98026E-1
4.0E0	1.882E3	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80019E1	-8.58307E-4	-8.79999E1	2.6226E-4	5.10216E-3	9.38892E-2	2.73157E1	-3.2662E1	-3.26354E1	2.68238E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00069E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80016E1	-9.29832E-4	-8.80002E1	2.14577E-4	4.43459E-3	9.34601E-2	2.73541E1	-3.26536E1	-3.26291E1	2.67794E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80017E1	-6.91414E-4	-8.80003E1	3.8147E-4	4.64916E-3	9.37223E-2	2.72751E1	-3.26392E1	-3.26308E1	2.68316E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80019E1	-5.96046E-4	-8.80005E1	1.43051E-4	4.673E-3	9.35316E-2	2.72919E1	-3.26789E1	-3.26314E1	2.6783E1	1.20122E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80019E1	-9.05991E-4	-8.80005E1	1.90735E-4	4.74453E-3	9.34601E-2	2.73015E1	-3.26524E1	-3.26164E1	2.68178E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80017E1	-7.62939E-4	-8.80002E1	1.66893E-4	4.88758E-3	9.34124E-2	2.72853E1	-3.265E1	-3.25882E1	2.68136E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80018E1	-6.67572E-4	-8.80002E1	2.38419E-5	4.81606E-3	9.36031E-2	2.73111E1	-3.26765E1	-3.25972E1	2.68064E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.4E1	2.61E2	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80017E1	-7.86781E-4	-8.80001E1	-2.38419E-5	4.93526E-3	9.37223E-2	2.7254E1	-3.26428E1	-3.26482E1	2.68178E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80016E1	-8.34465E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.32932E-2	2.73363E1	-3.26687E1	-3.26218E1	2.67884E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80017E1	-9.53674E-4	-8.80002E1	2.6226E-4	4.79221E-3	9.33647E-2	2.73634E1	-3.2653E1	-3.26585E1	2.67986E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80015E1	-9.29832E-4	-8.79997E1	-1.43051E-4	4.95911E-3	9.36508E-2	2.729E1	-3.26353E1	-3.26405E1	2.68106E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01609E-1
1.8E1	2.22E2	2.0E0	7.27E2	5.0E2	-7.201E-2	-8.80016E1	-4.76837E-4	-8.80001E1	3.57628E-4	4.93526E-3	9.33647E-2	2.73502E1	-3.26873E1	-3.26104E1	2.68082E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03545E-1
1.9E1	3.24E2	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80018E1	-9.29832E-4	-8.80005E1	7.15256E-5	4.93526E-3	9.33409E-2	2.73123E1	-3.26609E1	-3.26639E1	2.6804E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01738E-1
2.0E1	2.22E3	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80018E1	-6.19888E-4	-8.80004E1	2.86102E-4	4.81606E-3	9.36031E-2	2.73063E1	-3.26658E1	-3.26505E1	2.6801E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80017E1	-4.76837E-4	-8.80006E1	-4.76837E-5	4.69685E-3	9.36985E-2	2.73225E1	-3.27025E1	-3.26469E1	2.67902E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99879E-1
2.2E1	1.58E2	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80017E1	-7.39098E-4	-8.80006E1	7.15256E-5	4.673E-3	9.33409E-2	2.72791E1	-3.26555E1	-3.2629E1	2.68106E1	1.1979E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80014E1	-7.86781E-4	-8.80003E1	2.38419E-5	4.3869E-3	9.35555E-2	2.73261E1	-3.26963E1	-3.26386E1	2.68117E1	1.19697E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1