[Scan]
initial_time=2016-01-28T19:24:35
final_time=2016-01-28T19:24:54
ip_count=19
run=1026
dataset=5
scan=388
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.75367E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.08647E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.45105E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.54939E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.62626E-8
mult1=-1.09005E-8
mult2=-2.81035E-9
rf_tmon=-4.61849E-3
rf_agc=3.3298E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.28598E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68957E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.08217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=1.23288E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04196E0
lens1_imon=1.45987E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.40123E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.14132E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.48416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.53136E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.03197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.88002E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26672E1
iondef2_imon=1.55444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.66008E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20764E0
ionrepsh_imon=9.23576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40651E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04495E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33754E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68101E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.93216E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.14758E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.34098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.38324E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06674E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60337E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.24232E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34728E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61232E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29721E-3
inlet_lpb_pmon=3.00149E-1
chamber_ion_pmon=1.19967E-7
chamber_cvt_pmon=2.51549E-3
foreline_cvt_pmon=2.51549E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20559E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.16E2	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80018E1	-7.15256E-5	-8.80005E1	9.53674E-5	4.81606E-3	9.34362E-2	2.73393E1	-3.26463E1	-3.2637E1	2.67804E1					
2.0E0	8.17E3	5.0E0	3.16E2	1.6E2	-7.22418E-2	-8.8002E1	-5.96046E-4	-8.80004E1	2.86102E-4	4.64916E-3	9.36508E-2	2.7302E1	-3.26468E1	-3.26744E1	2.68069E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80016E1	-5.72205E-4	-8.80005E1	1.43051E-4	4.52995E-3	9.36031E-2	2.73144E1	-3.26764E1	-3.26283E1	2.67966E1	1.20036E-7	2.51972E-3	2.51972E-3	6.32099E-3	3.00637E-1
4.0E0	1.907E3	1.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-4.76837E-4	-8.80005E1	5.00679E-4	4.26769E-3	9.33409E-2	2.72907E1	-3.26374E1	-3.2623E1	2.68142E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80015E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.62532E-3	9.35555E-2	2.73225E1	-3.26663E1	-3.2611E1	2.68112E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80018E1	-7.62939E-4	-8.80002E1	3.33786E-4	4.50611E-3	9.37939E-2	2.72727E1	-3.26104E1	-3.26663E1	2.68184E1	1.20122E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80016E1	-9.77516E-4	-8.80005E1	7.15256E-5	5.14984E-3	9.35316E-2	2.7308E1	-3.26266E1	-3.26225E1	2.67984E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80018E1	-1.04904E-3	-8.80005E1	-2.38419E-5	4.8399E-3	9.37223E-2	2.73104E1	-3.2659E1	-3.26408E1	2.68064E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.03185E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80013E1	-1.21593E-3	-8.80004E1	2.38419E-5	4.45843E-3	9.377E-2	2.73321E1	-3.26416E1	-3.265E1	2.68406E1	1.2014E-7	2.51809E-3	2.51809E-3	6.31555E-3	3.00766E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80017E1	-1.12057E-3	-8.80004E1	-1.19209E-4	4.76837E-3	9.37223E-2	2.73105E1	-3.26729E1	-3.26308E1	2.68166E1					
1.4E1	2.97E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80015E1	-1.00136E-3	-8.80004E1	4.05312E-4	4.8399E-3	9.36508E-2	2.73345E1	-3.26771E1	-3.26747E1	2.68022E1	1.19861E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01609E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.80016E1	-9.29832E-4	-8.80005E1	4.76837E-4	4.74453E-3	9.37462E-2	2.72974E1	-3.26992E1	-3.26024E1	2.67926E1	1.19653E-7	2.50898E-3	2.50898E-3	6.33486E-3	2.9952E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80016E1	-8.10623E-4	-8.80004E1	3.33786E-4	4.86374E-3	9.38654E-2	2.725E1	-3.26419E1	-3.2596E1	2.68196E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01995E-1
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80017E1	-1.12057E-3	-8.80004E1	1.19209E-4	4.76837E-3	9.36508E-2	2.73442E1	-3.26494E1	-3.26386E1	2.67968E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
1.8E1	2.52E2	2.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80013E1	-1.23978E-3	-8.80004E1	-2.38419E-5	4.673E-3	9.37223E-2	2.72886E1	-3.26897E1	-3.26248E1	2.68148E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80014E1	-9.05991E-4	-8.80004E1	2.38419E-4	4.64916E-3	9.36985E-2	2.73157E1	-3.26826E1	-3.26189E1	2.6792E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
2.0E1	2.124E3	3.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80013E1	-7.86781E-4	-8.80002E1	3.33786E-4	4.74453E-3	9.39846E-2	2.73243E1	-3.26783E1	-3.26885E1	2.67944E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80014E1	-7.62939E-4	-8.80003E1	1.66893E-4	4.93526E-3	9.34839E-2	2.72697E1	-3.26136E1	-3.26602E1	2.67978E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
2.2E1	1.24E2	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80018E1	-8.58307E-4	-8.80006E1	9.53674E-5	5.07832E-3	9.38177E-2	2.73097E1	-3.2655E1	-3.26539E1	2.67827E1	1.20363E-7	2.50882E-3	2.50882E-3	6.31817E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80017E1	-9.05991E-4	-8.80004E1	1.66893E-4	5.03063E-3	9.38654E-2	2.73263E1	-3.26672E1	-3.26422E1	2.68101E1	1.19967E-7	2.51549E-3	2.51549E-3	6.29721E-3	3.00149E-1