[Scan]
initial_time=2016-01-28T19:25:01
final_time=2016-01-28T19:25:21
ip_count=19
run=1026
dataset=5
scan=389
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.78038E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.13666E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.45158E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.56256E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.63096E-8
mult1=-1.04569E-8
mult2=-2.79185E-9
rf_tmon=-4.86342E-3
rf_agc=3.30495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.60999E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.08289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=1.24261E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06299E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.1348E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.46217E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.76208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=2.04747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.86776E-8
tplens_vset=1.4E-1
tplens_vmon=1.63963E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26455E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.40807E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23347E0
ionrepsh_imon=9.23936E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38849E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.36184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02356E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72998E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.93454E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.16443E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.09503E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.91417E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.40047E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59912E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.24394E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25418E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60923E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37252E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21857E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.01E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80017E1	-1.00136E-3	-8.80008E1	-9.53674E-5	4.3869E-3	9.38416E-2	2.72865E1	-3.26795E1	-3.26681E1	2.68022E1	1.1966E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.99083E-1
2.0E0	8.458E3	5.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80015E1	-9.53674E-4	-8.80003E1	1.19209E-4	4.64916E-3	9.37939E-2	2.731E1	-3.26658E1	-3.25997E1	2.68119E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80013E1	-7.15256E-4	-8.80005E1	2.38419E-4	4.74453E-3	9.35078E-2	2.72856E1	-3.26608E1	-3.26667E1	2.67943E1	1.1984E-7	2.52063E-3	2.52063E-3	6.29359E-3	2.99829E-1
4.0E0	1.926E3	1.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80016E1	-4.52995E-4	-8.80003E1	1.90735E-4	4.64916E-3	9.36031E-2	2.72709E1	-3.26452E1	-3.26254E1	2.67854E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80015E1	-7.86781E-4	-8.80006E1	1.90735E-4	4.62532E-3	9.32693E-2	2.7308E1	-3.26496E1	-3.26148E1	2.68004E1	1.20158E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80015E1	-9.29832E-4	-8.80004E1	2.6226E-4	4.72069E-3	9.33647E-2	2.73106E1	-3.26731E1	-3.26346E1	2.67962E1	1.19601E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80016E1	-9.53674E-4	-8.80002E1	0.0E0	5.126E-3	9.35793E-2	2.73228E1	-3.26921E1	-3.26136E1	2.67962E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80016E1	-9.05991E-4	-8.80006E1	1.66893E-4	4.52995E-3	9.35793E-2	2.73315E1	-3.26543E1	-3.2611E1	2.6807E1	1.19809E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00041E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80016E1	-6.19888E-4	-8.80006E1	3.57628E-4	4.88758E-3	9.38892E-2	2.72886E1	-3.26419E1	-3.26401E1	2.67962E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80017E1	-7.86781E-4	-8.80006E1	4.76837E-5	4.62532E-3	9.36031E-2	2.73454E1	-3.27149E1	-3.2638E1	2.68244E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00563E-1
1.4E1	2.74E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80017E1	-6.91414E-4	-8.80008E1	-1.19209E-4	4.93526E-3	9.377E-2	2.72933E1	-3.26667E1	-3.26413E1	2.68004E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00041E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80016E1	-4.76837E-4	-8.80006E1	2.14577E-4	4.673E-3	9.37223E-2	2.73195E1	-3.26777E1	-3.26452E1	2.68088E1	1.19965E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.9874E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80015E1	-3.57628E-4	-8.80003E1	1.90735E-4	4.60148E-3	9.33886E-2	2.73117E1	-3.26855E1	-3.26176E1	2.67758E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97704E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80016E1	-5.48363E-4	-8.80003E1	4.05312E-4	4.91142E-3	9.35793E-2	2.73346E1	-3.26614E1	-3.26242E1	2.68204E1	1.20036E-7	2.51863E-3	2.51863E-3	6.32099E-3	3.00378E-1
1.8E1	2.21E2	1.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80016E1	-7.39098E-4	-8.80006E1	1.90735E-4	4.69685E-3	9.35793E-2	2.73002E1	-3.26511E1	-3.26652E1	2.68132E1					
1.9E1	3.16E2	1.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80017E1	-5.72205E-4	-8.80006E1	-1.43051E-4	4.8399E-3	9.3627E-2	2.73021E1	-3.26974E1	-3.26148E1	2.67769E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
2.0E1	2.153E3	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80015E1	-1.43051E-4	-8.80004E1	-4.76837E-5	4.8399E-3	9.3627E-2	2.73151E1	-3.26502E1	-3.2639E1	2.68106E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80018E1	-5.72205E-4	-8.80004E1	-2.14577E-4	4.3869E-3	9.36508E-2	2.72992E1	-3.26862E1	-3.2639E1	2.67848E1	1.20122E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00041E-1
2.2E1	1.65E2	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80015E1	-1.14441E-3	-8.80004E1	7.15256E-5	4.57764E-3	9.377E-2	2.73093E1	-3.26621E1	-3.26585E1	2.6825E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80017E1	-8.10623E-4	-8.80006E1	7.15256E-5	4.98295E-3	9.35555E-2	2.72998E1	-3.26455E1	-3.2616E1	2.6801E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1