[Scan]
initial_time=2016-01-28T19:25:28
final_time=2016-01-28T19:25:47
ip_count=19
run=1026
dataset=5
scan=390
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81316E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.96821E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.4101E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.52874E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63195E-8
mult1=-1.04378E-8
mult2=-2.71708E-9
rf_tmon=-5.62303E-3
rf_agc=3.23995E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.57137E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.26208E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10925E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03612E1
cs_ea2_imon=1.3933E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.13313E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.46902E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20403E0
cs_ionrep_imon=9.79092E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.04567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.87498E-8
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26004E1
iondef3_imon=1.46828E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.59698E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.55207E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=9.40519E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34126E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40771E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.35787E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68107E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.86791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.12667E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.04097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.55089E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.40083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.30132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.40624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60026E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.26418E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32566E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60861E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36478E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21889E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00149E-1
chamber_ion_pmon=1.19773E-7
chamber_cvt_pmon=2.51244E-3
foreline_cvt_pmon=2.51244E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.1215E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.31E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80018E1	-8.10623E-4	-8.80003E1	-9.53674E-5	4.52995E-3	9.34839E-2	2.73028E1	-3.26747E1	-3.26254E1	2.68012E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
2.0E0	8.184E3	1.1E1	3.16E2	1.6E2	-7.36328E-2	-8.80021E1	-5.48363E-4	-8.80004E1	-4.76837E-4	4.43459E-3	9.32932E-2	2.73425E1	-3.2641E1	-3.26079E1	2.67932E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01995E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80018E1	-6.4373E-4	-8.80006E1	-4.76837E-5	4.60148E-3	9.33409E-2	2.72821E1	-3.26419E1	-3.26508E1	2.68082E1	1.20084E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00942E-1
4.0E0	1.912E3	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80021E1	-5.00679E-4	-8.80003E1	2.38419E-5	4.72069E-3	9.34601E-2	2.73664E1	-3.26639E1	-3.26524E1	2.68004E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80017E1	-6.19888E-4	-8.80002E1	1.90735E-4	4.72069E-3	9.36985E-2	2.72797E1	-3.26467E1	-3.2629E1	2.68018E1	1.20383E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80018E1	-1.90735E-4	-8.80001E1	1.19209E-4	5.00679E-3	9.34601E-2	2.7321E1	-3.26779E1	-3.2616E1	2.6834E1	1.20132E-7	2.52438E-3	2.52438E-3	6.33166E-3	3.00582E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80018E1	-5.00679E-4	-8.80004E1	-2.14577E-4	4.79221E-3	9.36747E-2	2.72853E1	-3.26573E1	-3.262E1	2.67896E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80015E1	-4.76837E-4	-8.80005E1	3.57628E-4	4.76837E-3	9.38654E-2	2.72858E1	-3.26461E1	-3.26235E1	2.68186E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.98222E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80014E1	-3.8147E-4	-8.80003E1	9.53674E-5	4.57764E-3	9.35316E-2	2.72915E1	-3.26296E1	-3.26555E1	2.68487E1	1.19793E-7	2.51536E-3	2.51536E-3	6.31499E-3	2.989E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80017E1	-3.33786E-4	-8.80005E1	1.19209E-4	4.8399E-3	9.37223E-2	2.73241E1	-3.26921E1	-3.26327E1	2.68118E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.8002E1	-5.00679E-4	-8.80003E1	2.38419E-4	4.62532E-3	9.34839E-2	2.72786E1	-3.26331E1	-3.26425E1	2.68034E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.0201E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80019E1	-6.91414E-4	-8.80004E1	-3.8147E-4	4.50611E-3	9.36747E-2	2.7297E1	-3.26928E1	-3.25836E1	2.68462E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.44059E-2	-8.80017E1	-6.4373E-4	-8.80003E1	4.76837E-5	4.3869E-3	9.3627E-2	2.73486E1	-3.26544E1	-3.25959E1	2.67578E1	1.19872E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.97499E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80019E1	-4.52995E-4	-8.80002E1	1.66893E-4	4.62532E-3	9.40084E-2	2.73381E1	-3.26675E1	-3.26146E1	2.67824E1	1.19749E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.97647E-1
1.8E1	2.25E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80019E1	-4.52995E-4	-8.79999E1	5.96046E-4	4.72069E-3	9.39131E-2	2.73147E1	-3.26506E1	-3.26567E1	2.68496E1	1.20017E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.9978E-1
1.9E1	3.31E2	0.0E0	7.68E2	5.29E2	-7.48695E-2	-8.80015E1	-4.05312E-4	-8.80003E1	9.53674E-5	4.62532E-3	9.377E-2	2.73222E1	-3.26732E1	-3.2626E1	2.6792E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9841E-1
2.0E1	2.162E3	1.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80018E1	-3.09944E-4	-8.80002E1	-2.38419E-5	4.76837E-3	9.40084E-2	2.72806E1	-3.2656E1	-3.26327E1	2.67962E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.80017E1	-2.6226E-4	-8.80004E1	3.33786E-4	4.8399E-3	9.377E-2	2.73794E1	-3.27115E1	-3.2593E1	2.68018E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.2E1	1.56E2	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80017E1	-7.15256E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.39369E-2	2.72967E1	-3.26864E1	-3.26277E1	2.67819E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-7.39098E-4	-8.80002E1	3.33786E-4	4.673E-3	9.36508E-2	2.72889E1	-3.26585E1	-3.26004E1	2.68107E1	1.19773E-7	2.51244E-3	2.51244E-3	6.3074E-3	3.00149E-1