[Scan]
initial_time=2016-01-28T19:25:54
final_time=2016-01-28T19:26:13
ip_count=19
run=1026
dataset=5
scan=391
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.768E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.43201E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.40353E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.59268E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.62831E-8
mult1=-1.24977E-8
mult2=-2.66871E-9
rf_tmon=-4.09786E-3
rf_agc=3.3622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=5.49841E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66223E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.99567E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.0511E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53669E1
cs_ef1b_imon=3.09394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04883E1
cs_ea1_imon=1.25058E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08116E0
lens1_imon=1.3465E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64827E1
os_ef1alow_imon=2.9543E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04161E1
cs_ea2_imon=1.39755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84224E1
cs_ef1a_imon=2.98982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.13239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11618E1
os_restr1_imon=4.30006E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15478E1
os_ea1_imon=2.47309E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63481E1
os_ef1bup_imon=3.09248E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26994E0
cs_ionrep_imon=9.688E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01831E1
cs_anode1_imon=2.03718E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.86812E-8
tplens_vset=1.4E-1
tplens_vmon=1.62602E0
tplens_imon=-3.22778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.48564E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.57811E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98253E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.63051E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=9.15266E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.17476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74558E1
cs_ef2b_imon=3.12702E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38837E0
os_ea2_imon=-6.34246E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71436E1
cs_ef2a_imon=3.17519E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.61698E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85531E-1
os_ef2bup_imon=-5.31239E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10767E1
os_restr2_imon=3.35521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.31242E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.08535E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.07879E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.91053E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.12025E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09365E0
cs_ionaccel_imon=-1.01628E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47328E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56259E1
einzel_imon=7.58567E-6
window_vset=0.0E0
window_vmon=1.75056E-1
window_imon=-1.04061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86806E1
mask2_imon=-5.39474E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.82892E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.64632E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.14759E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37344E0
defgridb_imon=5.88225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.40271E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60126E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.24126E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35344E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64055E-2
os_fil2_imon=-2.52091E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50309E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31924E-1
cs_fil2_imon=-2.18033E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37137E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21851E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07165E-1
res40_imon=-2.51481E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=434
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.99E2	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80017E1	-8.10623E-4	-8.80003E1	9.53674E-5	4.673E-3	9.37223E-2	2.72873E1	-3.26795E1	-3.26779E1	2.68431E1	1.20082E-7	2.51384E-3	2.51384E-3	6.31499E-3	2.989E-1
2.0E0	8.22E3	5.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80015E1	-9.29832E-4	-8.80003E1	4.52995E-4	4.3869E-3	9.37223E-2	2.73069E1	-3.26658E1	-3.2615E1	2.68364E1	1.20249E-7	2.52038E-3	2.52038E-3	6.2786E-3	3.0006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80015E1	-8.10623E-4	-8.80002E1	2.38419E-4	4.69685E-3	9.39369E-2	2.72738E1	-3.26671E1	-3.26341E1	2.68186E1	1.19925E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00144E-1
4.0E0	1.898E3	1.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80018E1	-9.29832E-4	-8.80003E1	3.57628E-4	4.98295E-3	9.377E-2	2.72968E1	-3.26667E1	-3.26366E1	2.67842E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80018E1	-9.05991E-4	-8.80003E1	3.8147E-4	4.36306E-3	9.39608E-2	2.72853E1	-3.26416E1	-3.26014E1	2.68292E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80016E1	-9.77516E-4	-8.80004E1	1.90735E-4	4.45843E-3	9.4223E-2	2.72474E1	-3.26735E1	-3.26038E1	2.67956E1	1.2014E-7	2.5208E-3	2.5208E-3	6.31827E-3	3.00507E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80018E1	-1.04904E-3	-8.80004E1	1.43051E-4	4.81606E-3	9.38416E-2	2.72739E1	-3.26374E1	-3.25942E1	2.6828E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-8.34465E-4	-8.80005E1	4.05312E-4	4.22001E-3	9.38177E-2	2.72939E1	-3.26667E1	-3.26242E1	2.67937E1	1.19913E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80016E1	-7.39098E-4	-8.80004E1	9.53674E-5	4.45843E-3	9.34362E-2	2.73281E1	-3.26543E1	-3.26349E1	2.6819E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80016E1	-7.62939E-4	-8.80003E1	-2.38419E-5	4.52995E-3	9.35793E-2	2.72823E1	-3.26771E1	-3.26675E1	2.67986E1	1.19601E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.4E1	2.96E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80018E1	-7.86781E-4	-8.80007E1	7.15256E-5	4.55379E-3	9.38177E-2	2.73405E1	-3.26632E1	-3.26107E1	2.68036E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80015E1	-9.77516E-4	-8.80006E1	-9.53674E-5	4.79221E-3	9.38892E-2	2.73327E1	-3.26561E1	-3.2647E1	2.67876E1	1.1964E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00097E-1
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80019E1	-8.82149E-4	-8.80007E1	1.90735E-4	4.62532E-3	9.3627E-2	2.72853E1	-3.26753E1	-3.26188E1	2.68099E1	1.20244E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.0201E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80018E1	-1.12057E-3	-8.80007E1	1.19209E-4	4.673E-3	9.34124E-2	2.72895E1	-3.26669E1	-3.26488E1	2.6804E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
1.8E1	1.94E2	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80019E1	-9.29832E-4	-8.80007E1	3.33786E-4	4.8399E-3	9.37462E-2	2.72702E1	-3.26549E1	-3.26416E1	2.68001E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.9E1	3.16E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80017E1	-1.0252E-3	-8.80006E1	1.90735E-4	4.62532E-3	9.39131E-2	2.72897E1	-3.26475E1	-3.26123E1	2.68087E1	1.20137E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99613E-1
2.0E1	2.059E3	1.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80018E1	-8.10623E-4	-8.80005E1	7.15256E-5	5.14984E-3	9.36985E-2	2.73393E1	-3.26708E1	-3.25782E1	2.67794E1	1.20132E-7	2.52483E-3	2.52483E-3	6.28279E-3	2.99728E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80017E1	-6.19888E-4	-8.80006E1	-2.38419E-5	4.93526E-3	9.38892E-2	2.7245E1	-3.26152E1	-3.27143E1	2.68215E1	1.19985E-7	2.5143E-3	2.5143E-3	6.32916E-3	2.99732E-1
2.2E1	1.6E2	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80016E1	-8.10623E-4	-8.80002E1	2.38419E-4	4.8399E-3	9.377E-2	2.7301E1	-3.26467E1	-3.26319E1	2.68208E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80016E1	-8.58307E-4	-8.80002E1	4.76837E-5	5.07832E-3	9.36747E-2	2.73243E1	-3.26699E1	-3.26296E1	2.68178E1	1.19809E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.00563E-1