[Scan]
initial_time=2016-01-28T19:26:21
final_time=2016-01-28T19:26:40
ip_count=19
run=1026
dataset=5
scan=392
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79362E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.00386E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.43417E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.53624E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.62887E-8
mult1=-1.01498E-8
mult2=-2.79846E-9
rf_tmon=-4.43432E-3
rf_agc=3.36941E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.5052E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67162E0
bslens_imon=2.56956E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.98835E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.04886E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53786E1
cs_ef1b_imon=3.10453E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05293E1
cs_ea1_imon=1.23678E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05118E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64646E1
os_ef1alow_imon=2.9653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0404E1
cs_ea2_imon=1.39328E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.0061E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.13419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11379E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1516E1
os_ea1_imon=2.45746E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63822E1
os_ef1bup_imon=3.07197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27564E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9184E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01746E1
cs_anode1_imon=2.03265E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.88546E-8
tplens_vset=1.4E-1
tplens_vmon=1.61344E0
tplens_imon=-2.6266E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.52077E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.57001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.60333E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29154E0
ionrepsh_imon=9.11573E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33461E1
lens5b_imon=2.2105E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.12212E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39206E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00989E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71152E1
cs_ef2a_imon=3.19398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05331E0
os_ef2alow_imon=-2.63045E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85157E-1
os_ef2bup_imon=-5.38125E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10942E1
os_restr2_imon=3.35715E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.26951E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01703E1
cs_anode2_imon=2.10788E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.07761E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.08316E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.91128E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.15498E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13513E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47189E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55975E1
einzel_imon=7.6579E-6
window_vset=0.0E0
window_vmon=1.88904E-1
window_imon=-9.53778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39118E-4
mask2_vset=0.0E0
mask2_vmon=-1.86594E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.71489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18803E0
defgridb_imon=5.84837E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.38297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07473E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59994E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.24899E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2895E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60673E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.68596E-2
os_fil2_imon=-2.63755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42536E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.60013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06136E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11157E-1
res40_imon=-2.46578E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.15E2	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80014E1	-6.67572E-4	-8.80005E1	9.53674E-5	4.48227E-3	9.35793E-2	2.73466E1	-3.26458E1	-3.26092E1	2.67866E1	1.19907E-7	2.52384E-3	2.52384E-3	6.31925E-3	3.00197E-1
2.0E0	8.195E3	5.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80014E1	-5.24521E-4	-8.80004E1	-4.76837E-5	4.48227E-3	9.3627E-2	2.72769E1	-3.26689E1	-3.26217E1	2.68082E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80013E1	-4.52995E-4	-8.80004E1	1.43051E-4	4.673E-3	9.35078E-2	2.73184E1	-3.2695E1	-3.26422E1	2.68163E1	1.19925E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.96973E-1
4.0E0	1.892E3	1.0E0	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-3.57628E-4	-8.80002E1	2.86102E-4	4.69685E-3	9.34362E-2	2.73461E1	-3.26585E1	-3.26468E1	2.68226E1	1.19953E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80016E1	-8.10623E-4	-8.80001E1	1.66893E-4	4.74453E-3	9.35555E-2	2.73248E1	-3.26283E1	-3.26266E1	2.68166E1	1.19779E-7	2.51918E-3	2.51918E-3	6.32371E-3	2.99603E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80015E1	-5.72205E-4	-8.80001E1	2.14577E-4	4.72069E-3	9.35793E-2	2.72843E1	-3.26468E1	-3.26236E1	2.67818E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80015E1	-7.39098E-4	-8.80001E1	-2.38419E-5	4.95911E-3	9.37223E-2	2.72721E1	-3.26518E1	-3.26663E1	2.67974E1	1.20031E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80015E1	-6.67572E-4	-8.79999E1	0.0E0	5.03063E-3	9.37939E-2	2.73399E1	-3.26807E1	-3.2626E1	2.68106E1	1.19749E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.98665E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80012E1	-6.67572E-4	-8.80002E1	1.90735E-4	4.88758E-3	9.36985E-2	2.73424E1	-3.2647E1	-3.26056E1	2.68556E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80015E1	-3.33786E-4	-8.80003E1	2.38419E-5	4.95911E-3	9.38654E-2	2.73069E1	-3.26868E1	-3.26437E1	2.67998E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97963E-1
1.4E1	2.58E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80017E1	-5.72205E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.36747E-2	2.73333E1	-3.27007E1	-3.2593E1	2.67896E1	1.20278E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80016E1	-7.15256E-4	-8.80006E1	7.15256E-5	4.72069E-3	9.38892E-2	2.7298E1	-3.26266E1	-3.26325E1	2.67578E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00824E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80015E1	-6.4373E-4	-8.80003E1	7.15256E-5	4.79221E-3	9.35555E-2	2.7248E1	-3.26693E1	-3.26549E1	2.68106E1	1.19933E-7	2.52297E-3	2.52297E-3	6.31827E-3	2.99991E-1
1.7E1	7.1E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80016E1	-6.19888E-4	-8.80001E1	-7.15256E-5	4.673E-3	9.39369E-2	2.73454E1	-3.26981E1	-3.26074E1	2.67734E1					
1.8E1	2.16E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80015E1	-3.09944E-4	-8.80003E1	-9.53674E-5	4.64916E-3	9.37462E-2	2.73087E1	-3.26338E1	-3.2632E1	2.68178E1	1.20191E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.98026E-1
1.9E1	3.24E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80015E1	-3.09944E-4	-8.79999E1	1.43051E-4	4.64916E-3	9.34124E-2	2.72991E1	-3.26458E1	-3.2632E1	2.68034E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9952E-1
2.0E1	2.126E3	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80016E1	-5.00679E-4	-8.80002E1	1.19209E-4	4.45843E-3	9.34839E-2	2.73393E1	-3.27137E1	-3.26176E1	2.67872E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80016E1	-7.15256E-4	-8.80002E1	-4.76837E-5	4.45843E-3	9.36985E-2	2.72402E1	-3.25682E1	-3.26396E1	2.67806E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
2.2E1	1.62E2	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80013E1	-8.58307E-4	-8.80003E1	-4.76837E-5	4.62532E-3	9.36031E-2	2.72856E1	-3.26685E1	-3.26319E1	2.68279E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80016E1	-9.05991E-4	-8.8E1	2.38419E-5	4.62532E-3	9.3627E-2	2.7346E1	-3.26428E1	-3.2638E1	2.68148E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1