[Scan]
initial_time=2016-01-28T19:26:47
final_time=2016-01-28T19:27:07
ip_count=19
run=1026
dataset=5
scan=393
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.8098E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.04725E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.43188E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.6083E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.63178E-8
mult1=-1.06073E-8
mult2=-2.8803E-9
rf_tmon=-5.26346E-3
rf_agc=3.28529E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.21922E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64763E0
bslens_imon=2.41619E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19623E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05123E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53639E1
cs_ef1b_imon=3.10065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02183E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05131E1
cs_ea1_imon=1.23326E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08587E0
lens1_imon=1.52072E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64829E1
os_ef1alow_imon=2.97104E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.40456E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84011E1
cs_ef1a_imon=3.00957E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.13082E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.29831E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.44097E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63622E1
os_ef1bup_imon=3.08936E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22679E0
cs_ionrep_imon=9.6734E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93432E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01997E1
cs_anode1_imon=2.04078E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.86488E-8
tplens_vset=1.4E-1
tplens_vmon=1.6622E0
tplens_imon=-2.62431E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25773E1
iondef3_imon=1.50306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.58249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98416E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.45706E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27351E0
ionrepsh_imon=9.28796E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33502E1
lens5b_imon=2.20231E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74488E1
cs_ef2b_imon=3.13412E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43054E0
os_ea2_imon=-7.76353E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71219E1
cs_ef2a_imon=3.19562E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03964E0
os_ef2alow_imon=-2.54887E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7061E-1
os_ef2bup_imon=-5.18394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1078E1
os_restr2_imon=3.35287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02042E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72871E1
iondef1_imon=1.07869E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.10118E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.91611E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.10252E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14895E0
cs_ionaccel_imon=-1.06591E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5658E1
einzel_imon=7.39592E-6
window_vset=0.0E0
window_vmon=2.06194E-1
window_imon=-8.94645E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86565E1
mask2_imon=-4.31463E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.17387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.39909E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.97531E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50093E0
defgridb_imon=6.1577E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.38716E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59954E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.26254E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.39642E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60479E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72065E-2
os_fil2_imon=-2.60038E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75249E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41887E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33847E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11675E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21803E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54845E-1
res40_imon=-2.38539E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.27E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80015E1	-8.34465E-4	-8.80001E1	9.53674E-5	5.05447E-3	9.38654E-2	2.72831E1	-3.26602E1	-3.26301E1	2.67827E1	1.1995E-7	2.51758E-3	2.51758E-3	6.29002E-3	3.00363E-1
2.0E0	8.164E3	7.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80016E1	-7.15256E-4	-8.80003E1	-1.19209E-4	5.29289E-3	9.37462E-2	2.72708E1	-3.26666E1	-3.25761E1	2.6802E1	1.20092E-7	2.52342E-3	2.52342E-3	6.31798E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80014E1	-9.05991E-4	-8.80002E1	2.38419E-5	4.95911E-3	9.36508E-2	2.7341E1	-3.26718E1	-3.26417E1	2.67966E1	1.19883E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.01065E-1
4.0E0	1.889E3	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80013E1	-5.48363E-4	-8.8E1	9.53674E-5	4.76837E-3	9.34601E-2	2.72727E1	-3.26832E1	-3.26349E1	2.6792E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80016E1	-6.67572E-4	-8.79997E1	4.76837E-5	4.88758E-3	9.37939E-2	2.73541E1	-3.26627E1	-3.25844E1	2.68136E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80015E1	-5.00679E-4	-8.80001E1	1.90735E-4	4.95911E-3	9.36985E-2	2.7255E1	-3.26443E1	-3.26095E1	2.67944E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80014E1	-6.67572E-4	-8.80002E1	1.43051E-4	5.03063E-3	9.37223E-2	2.73147E1	-3.26627E1	-3.265E1	2.68099E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80016E1	-7.15256E-4	-8.80001E1	4.76837E-5	5.07832E-3	9.37939E-2	2.73117E1	-3.26687E1	-3.26284E1	2.6792E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80016E1	-5.72205E-4	-8.80001E1	1.66893E-4	4.74453E-3	9.41277E-2	2.72624E1	-3.26819E1	-3.25864E1	2.6813E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80019E1	-5.24521E-4	-8.80002E1	2.14577E-4	4.72069E-3	9.39369E-2	2.73296E1	-3.26603E1	-3.26113E1	2.68088E1	1.2026E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.99686E-1
1.4E1	2.71E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80017E1	-6.67572E-4	-8.80006E1	7.15256E-5	4.8399E-3	9.35316E-2	2.72886E1	-3.26608E1	-3.26107E1	2.68076E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80016E1	-8.58307E-4	-8.80002E1	1.19209E-4	4.76837E-3	9.37223E-2	2.72847E1	-3.26374E1	-3.26567E1	2.6782E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.02769E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80015E1	-5.96046E-4	-8.80004E1	9.53674E-5	4.74453E-3	9.41277E-2	2.73479E1	-3.26444E1	-3.26799E1	2.68004E1	1.1966E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80015E1	-6.19888E-4	-8.80003E1	1.43051E-4	4.48227E-3	9.38654E-2	2.72971E1	-3.26715E1	-3.26106E1	2.68244E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
1.8E1	2.35E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80016E1	-5.96046E-4	-8.80004E1	0.0E0	4.45843E-3	9.39131E-2	2.73121E1	-3.26419E1	-3.2682E1	2.67758E1	1.20092E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.006E-1
1.9E1	3.49E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80013E1	-5.96046E-4	-8.80001E1	3.09944E-4	4.43459E-3	9.38177E-2	2.73411E1	-3.26762E1	-3.26213E1	2.67818E1	1.19559E-7	2.51725E-3	2.51725E-3	6.3245E-3	2.9971E-1
2.0E1	2.117E3	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80011E1	-4.05312E-4	-8.8E1	-2.38419E-5	4.1008E-3	9.36747E-2	2.72498E1	-3.2629E1	-3.26446E1	2.68134E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80013E1	-7.39098E-4	-8.80002E1	-1.43051E-4	4.74453E-3	9.38177E-2	2.72072E1	-3.26562E1	-3.27649E1	2.67729E1	1.20311E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
2.2E1	1.46E2	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80014E1	-6.19888E-4	-8.80003E1	2.86102E-4	4.52995E-3	9.38416E-2	2.73424E1	-3.26843E1	-3.2632E1	2.68106E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.99594E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80015E1	-8.82149E-4	-8.80001E1	7.15256E-5	4.64916E-3	9.377E-2	2.72871E1	-3.26807E1	-3.25773E1	2.67854E1	1.19757E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00302E-1