[Scan]
initial_time=2016-01-28T19:27:14
final_time=2016-01-28T19:27:33
ip_count=19
run=1026
dataset=5
scan=394
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.83573E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.89263E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.41538E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.56125E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.63184E-8
mult1=-1.04387E-8
mult2=-2.7246E-9
rf_tmon=-5.3656E-3
rf_agc=3.34778E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.65553E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=3.09767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05216E1
cs_ea1_imon=1.25631E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0696E0
lens1_imon=1.57883E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.39042E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.12778E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.45568E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.79092E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=2.0417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.86867E-8
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.52346E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=9.18168E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38067E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.35355E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.11234E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.95061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.09967E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.11665E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.40991E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.258E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29923E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60241E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.52685E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.75E2	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80019E1	-6.67572E-4	-8.80005E1	-1.66893E-4	4.74453E-3	9.36747E-2	2.72534E1	-3.26615E1	-3.26603E1	2.68034E1	1.19601E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
2.0E0	8.305E3	1.7E1	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	-7.15256E-4	-8.80004E1	-1.43051E-4	4.45843E-3	9.36747E-2	2.73646E1	-3.26627E1	-3.26615E1	2.67992E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.9978E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80014E1	-7.62939E-4	-8.80002E1	-1.66893E-4	4.79221E-3	9.34839E-2	2.72829E1	-3.26458E1	-3.26128E1	2.68502E1	1.19925E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.0041E-1
4.0E0	2.006E3	1.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80017E1	-2.86102E-4	-8.79999E1	-1.43051E-4	4.55379E-3	9.33647E-2	2.7281E1	-3.26724E1	-3.26344E1	2.67942E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80016E1	-2.6226E-4	-8.80002E1	-7.15256E-5	4.64916E-3	9.32932E-2	2.73395E1	-3.26818E1	-3.26033E1	2.67835E1	1.19913E-7	2.51389E-3	2.51389E-3	6.3074E-3	3.00171E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80015E1	-7.62939E-4	-8.79999E1	7.15256E-5	4.74453E-3	9.37462E-2	2.7278E1	-3.26832E1	-3.26071E1	2.68024E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80014E1	-7.86781E-4	-8.80004E1	-9.53674E-5	4.79221E-3	9.37462E-2	2.72544E1	-3.27021E1	-3.26001E1	2.67866E1	1.19697E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80016E1	-8.10623E-4	-8.80004E1	-1.43051E-4	4.52995E-3	9.36747E-2	2.73183E1	-3.2644E1	-3.26392E1	2.6807E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80018E1	-1.00136E-3	-8.80002E1	-3.33786E-4	4.79221E-3	9.35555E-2	2.73393E1	-3.26278E1	-3.26242E1	2.67668E1	1.19653E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80019E1	-1.04904E-3	-8.80002E1	-4.29153E-4	4.64916E-3	9.34601E-2	2.723E1	-3.26963E1	-3.26026E1	2.68058E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.4E1	2.67E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80016E1	-1.04904E-3	-8.80005E1	-2.38419E-4	4.60148E-3	9.37223E-2	2.73387E1	-3.2632E1	-3.26458E1	2.67535E1	1.19757E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02396E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-7.39098E-4	-8.80004E1	-7.15256E-5	4.55379E-3	9.35316E-2	2.72612E1	-3.26669E1	-3.26266E1	2.68406E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.02396E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80021E1	-7.39098E-4	-8.80002E1	-7.15256E-5	4.64916E-3	9.36985E-2	2.73664E1	-3.26687E1	-3.26338E1	2.68262E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8002E1	-8.58307E-4	-8.8E1	4.76837E-5	4.8399E-3	9.35078E-2	2.73081E1	-3.26518E1	-3.26332E1	2.67872E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03449E-1
1.8E1	2.24E2	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80019E1	-5.48363E-4	-8.80002E1	-4.76837E-5	4.55379E-3	9.36747E-2	2.73129E1	-3.2638E1	-3.26224E1	2.68052E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01609E-1
1.9E1	3.59E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80018E1	-7.15256E-4	-8.80003E1	-2.86102E-4	4.43459E-3	9.39369E-2	2.73069E1	-3.26765E1	-3.26308E1	2.67818E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00432E-1
2.0E1	2.136E3	1.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80019E1	-6.19888E-4	-8.79999E1	1.43051E-4	4.41074E-3	9.3627E-2	2.72626E1	-3.26626E1	-3.25747E1	2.68383E1					
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80019E1	-1.12057E-3	-8.80003E1	-1.19209E-4	4.52995E-3	9.35555E-2	2.72095E1	-3.25263E1	-3.26136E1	2.67631E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.97901E-1
2.2E1	1.41E2	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80016E1	-7.15256E-4	-8.80001E1	-9.53674E-5	4.8399E-3	9.37939E-2	2.73458E1	-3.26366E1	-3.26685E1	2.68366E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80017E1	-7.39098E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.36508E-2	2.73333E1	-3.2635E1	-3.26176E1	2.681E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1