[Scan]
initial_time=2016-01-28T19:29:01
final_time=2016-01-28T19:29:20
ip_count=19
run=1026
dataset=5
scan=398
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.80105E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.73122E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.45078E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.54656E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63057E-8
mult1=-1.09597E-8
mult2=-2.73616E-9
rf_tmon=-5.21947E-3
rf_agc=3.26672E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.67436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20139E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.10971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.25775E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04736E0
lens1_imon=1.33009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.95472E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.40628E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84087E1
cs_ef1a_imon=3.00094E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.12534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11552E1
os_restr1_imon=4.30346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.45784E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.07774E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.73324E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.05115E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.86418E-8
tplens_vset=1.4E-1
tplens_vmon=1.66006E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26095E1
iondef3_imon=1.49027E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.66365E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=9.27541E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33405E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40471E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.20077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.78657E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92597E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=3.36619E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.08382E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73247E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68307E1
iondef4_imon=1.06905E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.93164E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.09622E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09481E0
cs_ionaccel_imon=-1.05242E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55924E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.38949E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.74691E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.73752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.38499E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=9.23862E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36039E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60545E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6541E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54266E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.69815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03775E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21808E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.86226E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=253
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.94E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80018E1	-5.72205E-4	-8.80004E1	1.43051E-4	4.88758E-3	9.3627E-2	2.7265E1	-3.26803E1	-3.25794E1	2.67613E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
2.0E0	8.258E3	8.0E0	3.16E2	1.6E2	-7.286E-2	-8.8002E1	-6.4373E-4	-8.80004E1	-1.43051E-4	4.93526E-3	9.35793E-2	2.72764E1	-3.26728E1	-3.26753E1	2.68282E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.80018E1	-6.91414E-4	-8.80004E1	1.19209E-4	5.07832E-3	9.37462E-2	2.72744E1	-3.26626E1	-3.25605E1	2.68215E1	1.19775E-7	2.51838E-3	2.51838E-3	6.30171E-3	3.01337E-1
4.0E0	1.89E3	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80016E1	-6.67572E-4	-8.80004E1	2.38419E-5	4.62532E-3	9.37223E-2	2.73293E1	-3.26602E1	-3.26543E1	2.68142E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80019E1	-7.39098E-4	-8.80002E1	-7.15256E-5	4.79221E-3	9.38416E-2	2.72476E1	-3.26624E1	-3.25913E1	2.67635E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80021E1	-7.86781E-4	-8.80003E1	-7.15256E-5	4.74453E-3	9.36985E-2	2.72943E1	-3.26623E1	-3.26317E1	2.6805E1	1.19773E-7	2.5165E-3	2.5165E-3	6.32273E-3	3.00149E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.8002E1	-5.96046E-4	-8.80004E1	0.0E0	4.98295E-3	9.377E-2	2.73263E1	-3.26225E1	-3.26248E1	2.68388E1	1.19963E-7	2.51911E-3	2.51911E-3	6.29558E-3	3.01043E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80016E1	-6.19888E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.36985E-2	2.73073E1	-3.2673E1	-3.26752E1	2.68346E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80016E1	-6.67572E-4	-8.80003E1	1.66893E-4	4.95911E-3	9.38177E-2	2.72798E1	-3.26656E1	-3.26234E1	2.67262E1	1.19919E-7	2.5216E-3	2.5216E-3	6.3023E-3	3.00392E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80018E1	-6.19888E-4	-8.80002E1	2.14577E-4	4.95911E-3	9.33886E-2	2.73526E1	-3.2653E1	-3.26062E1	2.6855E1	1.20132E-7	2.52147E-3	2.52147E-3	6.28967E-3	3.00479E-1
1.4E1	2.66E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80019E1	-5.00679E-4	-8.80004E1	3.33786E-4	4.86374E-3	9.37223E-2	2.73175E1	-3.26467E1	-3.2577E1	2.67794E1	1.198E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00966E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80019E1	-6.4373E-4	-8.80003E1	3.09944E-4	4.86374E-3	9.37939E-2	2.73183E1	-3.26765E1	-3.26554E1	2.68004E1	1.19902E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.01223E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80022E1	-8.34465E-4	-8.80003E1	7.15256E-5	4.74453E-3	9.36985E-2	2.72871E1	-3.26639E1	-3.25918E1	2.67872E1	1.20137E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00676E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.47149E-2	-8.8002E1	-1.0252E-3	-8.80006E1	2.38419E-4	4.3869E-3	9.37462E-2	2.73093E1	-3.26675E1	-3.26404E1	2.68334E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
1.8E1	2.27E2	0.0E0	7.27E2	5.0E2	-7.47923E-2	-8.8002E1	-9.05991E-4	-8.80006E1	1.19209E-4	4.91142E-3	9.36985E-2	2.72396E1	-3.26561E1	-3.25948E1	2.68304E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01871E-1
1.9E1	3.41E2	1.0E0	7.68E2	5.29E2	-7.46377E-2	-8.80019E1	-7.86781E-4	-8.80006E1	-4.76837E-5	4.86374E-3	9.37462E-2	2.73045E1	-3.26284E1	-3.26378E1	2.67862E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9943E-1
2.0E1	2.143E3	1.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80016E1	-7.15256E-4	-8.80006E1	1.19209E-4	4.55379E-3	9.38177E-2	2.73094E1	-3.26725E1	-3.26272E1	2.6792E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80017E1	-6.91414E-4	-8.80003E1	1.19209E-4	4.8399E-3	9.377E-2	2.73387E1	-3.2637E1	-3.26023E1	2.68169E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
2.2E1	1.5E2	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80018E1	-7.15256E-4	-8.80001E1	-7.15256E-5	5.10216E-3	9.34601E-2	2.73275E1	-3.26938E1	-3.2636E1	2.67752E1	1.19979E-7	2.51686E-3	2.51686E-3	6.32626E-3	3.00838E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80018E1	-5.24521E-4	-8.80001E1	1.66893E-4	4.91142E-3	9.33409E-2	2.73247E1	-3.26799E1	-3.26095E1	2.68307E1