[Scan]
initial_time=2016-01-28T19:29:27
final_time=2016-01-28T19:29:53
ip_count=19
run=1026
dataset=5
scan=399
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79787E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.76222E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.42641E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.52345E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.63401E-8
mult1=-1.0824E-8
mult2=-2.86632E-9
rf_tmon=-4.53646E-3
rf_agc=3.31353E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.11289E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.10937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=1.2397E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0395E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.41915E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12706E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.29234E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.46044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.07566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=9.77073E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.04142E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87155E-8
tplens_vset=1.4E-1
tplens_vmon=1.61489E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.65054E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=9.22566E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41078E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71385E1
cs_ef2a_imon=3.19764E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05166E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79275E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.35959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.32264E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.10015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.07405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.06522E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.86553E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.07607E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=1.95097E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.81532E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.40213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59848E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.23503E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35228E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6069E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69912E-2
os_fil2_imon=-2.66339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.41433E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15938E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21787E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52459E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.05E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.8002E1	-6.4373E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.39846E-2	2.73482E1	-3.26467E1	-3.25829E1	2.6822E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02659E-1
2.0E0	8.254E3	1.3E1	3.16E2	1.6E2	-7.30146E-2	-8.80018E1	-8.10623E-4	-8.79999E1	-4.76837E-5	4.91142E-3	9.39131E-2	2.72451E1	-3.26805E1	-3.26211E1	2.6825E1	1.19851E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.03545E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80017E1	-9.29832E-4	-8.8E1	1.66893E-4	4.72069E-3	9.37939E-2	2.72797E1	-3.26614E1	-3.26225E1	2.67764E1	1.19713E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01475E-1
4.0E0	1.982E3	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80017E1	-6.19888E-4	-8.80003E1	2.38419E-5	4.98295E-3	9.38416E-2	2.73222E1	-3.26661E1	-3.26001E1	2.68023E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80018E1	-8.10623E-4	-8.80003E1	-2.38419E-4	4.88758E-3	9.35078E-2	2.7351E1	-3.26713E1	-3.26168E1	2.67837E1	1.198E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80018E1	-6.19888E-4	-8.79999E1	-7.15256E-5	4.93526E-3	9.34362E-2	2.73003E1	-3.26645E1	-3.26008E1	2.67764E1	1.20137E-7	2.51136E-3	2.51136E-3	6.28511E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80017E1	-6.67572E-4	-8.8E1	2.6226E-4	5.05447E-3	9.3627E-2	2.73177E1	-3.26765E1	-3.25725E1	2.68322E1	1.20122E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80018E1	-8.34465E-4	-8.79999E1	2.14577E-4	4.88758E-3	9.38416E-2	2.73003E1	-3.26627E1	-3.25894E1	2.68442E1	1.2026E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80018E1	-1.0252E-3	-8.8E1	-9.53674E-5	5.29289E-3	9.37462E-2	2.73509E1	-3.26382E1	-3.26556E1	2.68036E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.9829E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80016E1	-1.09673E-3	-8.8E1	1.43051E-4	4.76837E-3	9.35078E-2	2.73051E1	-3.26537E1	-3.26142E1	2.67665E1	1.19841E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.98842E-1
1.4E1	2.88E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80016E1	-1.04904E-3	-8.80001E1	1.43051E-4	4.64916E-3	9.34601E-2	2.72457E1	-3.26462E1	-3.26236E1	2.67939E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.97901E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80016E1	-1.0252E-3	-8.80002E1	2.38419E-5	4.88758E-3	9.34839E-2	2.73424E1	-3.26711E1	-3.2641E1	2.67908E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99879E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80015E1	-1.0252E-3	-8.79999E1	-1.19209E-4	4.93526E-3	9.35793E-2	2.73895E1	-3.26649E1	-3.26024E1	2.68372E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01085E-1
1.7E1	6.3E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80016E1	-6.67572E-4	-8.80002E1	7.15256E-5	4.64916E-3	9.3627E-2	2.72378E1	-3.26927E1	-3.26458E1	2.68334E1	1.19953E-7	2.52707E-3	2.52707E-3	6.32356E-3	3.02769E-1
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80016E1	-6.91414E-4	-8.79997E1	-1.43051E-4	4.76837E-3	9.34839E-2	2.73126E1	-3.26683E1	-3.26121E1	2.67862E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.9E1	3.43E2	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80016E1	-5.00679E-4	-8.8E1	-1.43051E-4	4.88758E-3	9.35555E-2	2.72895E1	-3.26452E1	-3.262E1	2.6813E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99845E-1
2.0E1	2.119E3	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-5.24521E-4	-8.80001E1	-1.19209E-4	4.74453E-3	9.34601E-2	2.72522E1	-3.26609E1	-3.26458E1	2.67902E1	1.20226E-7	2.51116E-3	2.51116E-3	6.36244E-3	2.9978E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-5.24521E-4	-8.80001E1	1.19209E-4	4.673E-3	9.32932E-2	2.72921E1	-3.26384E1	-3.25912E1	2.67595E1	1.19851E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.0148E-1
2.2E1	1.61E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80016E1	-6.67572E-4	-8.79999E1	-9.53674E-5	4.88758E-3	9.33886E-2	2.72803E1	-3.26703E1	-3.26514E1	2.67984E1	1.20069E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.8002E1	-1.12057E-3	-8.79999E1	1.90735E-4	4.55379E-3	9.34601E-2	2.73231E1	-3.26819E1	-3.26506E1	2.67788E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1