[Scan]
initial_time=2016-01-28T19:32:03
final_time=2016-01-28T19:32:33
ip_count=19
run=1026
dataset=5
scan=403
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.76233E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.23202E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.44748E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.55287E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62832E-8
mult1=-1.10898E-8
mult2=-2.66229E-9
rf_tmon=-4.23433E-3
rf_agc=3.32218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.34725E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.0919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.01951E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.23864E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10852E0
lens1_imon=1.54161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.40959E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84712E1
cs_ef1a_imon=2.98342E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.13376E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.46681E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=9.62562E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.04495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.86933E-8
tplens_vset=1.4E-1
tplens_vmon=1.61961E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26874E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26532E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.57532E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22555E0
ionrepsh_imon=9.37432E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33256E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40724E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.10441E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67636E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.89827E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.1144E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.17071E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.38552E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.22772E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.44819E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60541E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.8E2	0.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80019E1	-9.05991E-4	-8.80001E1	3.33786E-4	4.86374E-3	9.377E-2	2.73045E1	-3.26561E1	-3.2639E1	2.6792E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98222E-1
2.0E0	8.099E3	8.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80019E1	-1.19209E-3	-8.80003E1	1.90735E-4	4.64916E-3	9.36747E-2	2.72996E1	-3.26627E1	-3.26199E1	2.67832E1	1.19697E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80019E1	-1.26362E-3	-8.79999E1	1.19209E-4	4.52995E-3	9.3627E-2	2.73155E1	-3.27094E1	-3.25652E1	2.67989E1	1.20017E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00563E-1
4.0E0	2.006E3	1.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80019E1	-1.4782E-3	-8.80001E1	-7.15256E-5	4.62532E-3	9.34601E-2	2.73069E1	-3.26675E1	-3.2641E1	2.67986E1	1.19941E-7	2.51919E-3	2.51919E-3	6.29157E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-9.29832E-4	-8.79999E1	2.86102E-4	4.62532E-3	9.37462E-2	2.73045E1	-3.26458E1	-3.26464E1	2.67992E1	1.2005E-7	2.51622E-3	2.51622E-3	6.32957E-3	2.99041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80015E1	-1.09673E-3	-8.80002E1	3.8147E-4	4.8399E-3	9.36031E-2	2.73108E1	-3.2663E1	-3.26078E1	2.68457E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80016E1	-5.48363E-4	-8.80005E1	4.76837E-5	4.72069E-3	9.3627E-2	2.72733E1	-3.26528E1	-3.26759E1	2.68132E1	1.1987E-7	2.52058E-3	2.52058E-3	6.31761E-3	3.00878E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80015E1	-8.82149E-4	-8.80001E1	5.48363E-4	4.79221E-3	9.34124E-2	2.73033E1	-3.26627E1	-3.26334E1	2.67302E1	1.19619E-7	2.52454E-3	2.52454E-3	6.32483E-3	3.00363E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-4.52995E-4	-8.80003E1	5.00679E-4	4.64916E-3	9.35078E-2	2.72871E1	-3.26344E1	-3.25888E1	2.68905E1	1.19925E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.02277E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-5.48363E-4	-8.80005E1	-1.43051E-4	4.60148E-3	9.34124E-2	2.73305E1	-3.26508E1	-3.26626E1	2.669E1	1.2026E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
1.4E1	2.73E2	1.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80018E1	-6.91414E-4	-8.80003E1	1.66893E-4	4.98295E-3	9.33409E-2	2.73039E1	-3.26695E1	-3.26181E1	2.68444E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80018E1	-8.34465E-4	-8.80006E1	2.38419E-5	4.74453E-3	9.35078E-2	2.73393E1	-3.26632E1	-3.26325E1	2.6836E1	1.19809E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80018E1	-7.86781E-4	-8.80006E1	1.66893E-4	4.673E-3	9.35555E-2	2.73016E1	-3.26502E1	-3.26065E1	2.67848E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0071E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80017E1	-9.29832E-4	-8.80003E1	1.43051E-4	4.93526E-3	9.34124E-2	2.73526E1	-3.26404E1	-3.26549E1	2.67493E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.8E1	2.34E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80017E1	-1.09673E-3	-8.80003E1	4.29153E-4	4.74453E-3	9.3317E-2	2.73124E1	-3.26132E1	-3.26352E1	2.68304E1	1.19861E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.02396E-1
1.9E1	3.07E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-1.14441E-3	-8.79999E1	1.43051E-4	5.126E-3	9.36031E-2	2.7308E1	-3.26706E1	-3.26515E1	2.69072E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
2.0E1	2.047E3	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80019E1	-7.15256E-4	-8.80004E1	-9.53674E-5	4.74453E-3	9.35316E-2	2.73183E1	-3.26909E1	-3.26008E1	2.67613E1	1.20127E-7	2.51162E-3	2.51162E-3	6.3126E-3	3.00741E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-8.10623E-4	-8.80003E1	1.90735E-4	4.86374E-3	9.33647E-2	2.72856E1	-3.26856E1	-3.26195E1	2.68358E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
2.2E1	1.41E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80019E1	-7.15256E-4	-8.8E1	2.38419E-4	4.673E-3	9.37223E-2	2.72895E1	-3.2653E1	-3.26194E1	2.67698E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80019E1	-6.67572E-4	-8.8E1	1.19209E-4	4.60148E-3	9.34124E-2	2.73016E1	-3.26532E1	-3.26874E1	2.67636E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02396E-1