[Scan]
initial_time=2016-01-28T19:32:58
final_time=2016-01-28T19:33:28
ip_count=19
run=1026
dataset=6
scan=404
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08857E-4
ql1_vset=
ql1_vmon=-8.20017E-1
ql1_imon=1.64561E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.78319E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=7.49567E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-7.58815E-10
mult1=-1.0055E-8
mult2=-2.73306E-9
rf_tmon=-4.86342E-3
rf_agc=3.30555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.62352E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66513E0
bslens_imon=2.62852E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20176E1
lens5a_imon=1.98531E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05204E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53534E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04913E1
cs_ea1_imon=1.24001E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40327E0
lens1_imon=2.51033E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.43294E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.00198E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.13383E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.45147E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24804E0
cs_ionrep_imon=9.61222E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93444E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.04455E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.0681E-8
tplens_vset=1.4E-1
tplens_vmon=1.64085E0
tplens_imon=-2.8454E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.49343E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.56817E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.82661E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27701E0
ionrepsh_imon=9.36193E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33362E1
lens5b_imon=2.1772E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42011E0
os_ea2_imon=-6.07827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.71359E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=3.36376E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.27217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02041E1
cs_anode2_imon=2.0859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.08845E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.4253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.08505E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-1.06632E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.55926E-6
window_vset=0.0E0
window_vmon=2.04364E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-7.50074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.59602E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50184E3
multb_neg_imon=6.51492E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43841E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.39646E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06709E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.23828E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36618E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60509E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61817E-2
os_fil2_imon=-2.61126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54883E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.74448E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21624E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18865E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.21209E-1	-7.98917E-1	-9.13208E0	-9.14185E0	5.07832E-3	9.37223E-2	2.73493E1	-3.2672E1	-3.26461E1	2.67325E1	1.1954E-7	2.52342E-3	2.52342E-3	6.3074E-3	3.00852E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.20684E-1	-7.99251E-1	-9.132E0	-9.14178E0	4.93526E-3	9.38654E-2	2.73059E1	-3.26585E1	-3.26387E1	2.69148E1	1.20278E-7	2.51007E-3	2.51007E-3	6.34588E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.20327E-1	-7.99251E-1	-9.132E0	-9.14142E0	4.8399E-3	9.34124E-2	2.72732E1	-3.26585E1	-3.26069E1	2.66993E1	1.19956E-7	2.51719E-3	2.51719E-3	6.32222E-3	3.00197E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.20351E-1	-7.99036E-1	-9.13179E0	-9.14171E0	4.72069E-3	9.377E-2	2.73375E1	-3.26891E1	-3.26266E1	2.67776E1	1.19697E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99941E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.2016E-1	-7.99322E-1	-9.13155E0	-9.14183E0	4.86374E-3	9.34601E-2	2.72618E1	-3.26969E1	-3.26116E1	2.69097E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.20136E-1	-7.98845E-1	-9.13174E0	-9.14178E0	5.126E-3	9.34839E-2	2.73523E1	-3.26726E1	-3.26154E1	2.68226E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.20374E-1	-7.98917E-1	-9.13169E0	-9.14183E0	4.91142E-3	9.35316E-2	2.72794E1	-3.26487E1	-3.26383E1	2.6804E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.20065E-1	-7.98917E-1	-9.13191E0	-9.14187E0	4.76837E-3	9.35078E-2	2.73015E1	-3.26567E1	-3.26218E1	2.67728E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.2016E-1	-7.98821E-1	-9.13174E0	-9.14168E0	4.81606E-3	9.36031E-2	2.72909E1	-3.26467E1	-3.26366E1	2.67589E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.20327E-1	-7.98678E-1	-9.13177E0	-9.14154E0	4.88758E-3	9.35078E-2	2.72709E1	-3.26543E1	-3.26213E1	2.68458E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.03027E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.20351E-1	-7.98702E-1	-9.13146E0	-9.1419E0	4.673E-3	9.33886E-2	2.736E1	-3.26555E1	-3.26254E1	2.68623E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.20279E-1	-7.99203E-1	-9.13136E0	-9.14178E0	4.81606E-3	9.35316E-2	2.73015E1	-3.26825E1	-3.26536E1	2.66466E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.19993E-1	-7.99012E-1	-9.13124E0	-9.14166E0	4.76837E-3	9.36031E-2	2.73358E1	-3.26632E1	-3.26862E1	2.68325E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.20065E-1	-7.98965E-1	-9.13181E0	-9.1418E0	4.673E-3	9.37462E-2	2.73063E1	-3.26797E1	-3.26284E1	2.68545E1	1.2026E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.20327E-1	-7.98869E-1	-9.1316E0	-9.14161E0	4.50611E-3	9.36508E-2	2.73688E1	-3.26639E1	-3.2617E1	2.66941E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.98481E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.19945E-1	-7.98869E-1	-9.13136E0	-9.14154E0	4.57764E-3	9.3317E-2	2.73021E1	-3.26667E1	-3.26366E1	2.68151E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.97647E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.19802E-1	-7.9875E-1	-9.13129E0	-9.14216E0	4.69685E-3	9.377E-2	2.73234E1	-3.26838E1	-3.26537E1	2.677E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1985E-1	-7.98631E-1	-9.13103E0	-9.14204E0	4.673E-3	9.38892E-2	2.72856E1	-3.26756E1	-3.26307E1	2.68304E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.19778E-1	-7.98821E-1	-9.13112E0	-9.14183E0	4.86374E-3	9.36031E-2	2.73387E1	-3.26443E1	-3.26478E1	2.68292E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.20017E-1	-7.98678E-1	-9.13112E0	-9.14199E0	4.3869E-3	9.34601E-2	2.73193E1	-3.26744E1	-3.26266E1	2.68151E1	1.20278E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1