[Scan]
initial_time=2016-01-28T19:34:18
final_time=2016-01-28T19:34:47
ip_count=19
run=1026
dataset=6
scan=406
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=1.45498E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.93343E-9
ql3_vset=
ql3_vmon=-9.13057E0
ql3_imon=2.79056E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-4.15838E-10
mult1=-1.00053E-8
mult2=-2.59485E-9
rf_tmon=-4.69267E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.66174E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.33588E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53813E1
cs_ef1b_imon=3.10345E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=1.24334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.96969E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04255E1
cs_ea2_imon=1.41709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=2.99906E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.12719E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11218E1
os_restr1_imon=4.3051E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14921E1
os_ea1_imon=2.4391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63691E1
os_ef1bup_imon=3.08823E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.75126E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93341E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=2.04227E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.08348E-8
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-2.63296E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.59482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.9127E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.12928E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42814E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18377E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07137E0
os_ef2alow_imon=-2.58071E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69903E-1
os_ef2bup_imon=-5.34777E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10893E1
os_restr2_imon=3.35432E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.2809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01898E1
cs_anode2_imon=2.10525E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67337E1
iondef4_imon=1.08795E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.80409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.07386E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12247E0
cs_ionaccel_imon=-1.02734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56334E1
einzel_imon=7.62769E-6
window_vset=0.0E0
window_vmon=1.93633E-1
window_imon=-1.10164E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.3918E-4
mask2_vset=0.0E0
mask2_vmon=-1.86556E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.40816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07258E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59901E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=9.25689E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34127E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60369E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.64991E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89108E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52719E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.24889E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.87851E-1
res40_imon=-2.45333E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.19516E-1	-7.9906E-1	-9.1305E0	-9.14202E0	4.72069E-3	9.34839E-2	2.73445E1	-3.26938E1	-3.25849E1	2.68589E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
2.0E0	3.1E1	2.0E0	3.16E2	1.6E2	-2.09634E0	-8.1954E-1	-7.98965E-1	-9.13057E0	-9.14168E0	4.79221E-3	9.3627E-2	2.72665E1	-3.26536E1	-3.26511E1	2.69741E1	1.20142E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0968E0	-8.19612E-1	-7.99012E-1	-9.13026E0	-9.14202E0	4.76837E-3	9.35793E-2	2.73045E1	-3.26648E1	-3.26405E1	2.6688E1	1.19721E-7	2.51158E-3	2.51158E-3	6.33592E-3	3.01065E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.19445E-1	-7.98988E-1	-9.13041E0	-9.14216E0	4.64916E-3	9.33647E-2	2.73437E1	-3.26467E1	-3.26579E1	2.68893E1	1.20142E-7	2.52025E-3	2.52025E-3	6.33388E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.19111E-1	-7.99012E-1	-9.13033E0	-9.14168E0	4.673E-3	9.3627E-2	2.73144E1	-3.2675E1	-3.26108E1	2.68943E1	1.20064E-7	2.51956E-3	2.51956E-3	6.32273E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.19564E-1	-7.98726E-1	-9.13041E0	-9.14192E0	4.79221E-3	9.36508E-2	2.72362E1	-3.26718E1	-3.26231E1	2.69085E1	1.19963E-7	2.51439E-3	2.51439E-3	6.31332E-3	3.02459E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.19826E-1	-7.98798E-1	-9.13064E0	-9.14152E0	4.55379E-3	9.35078E-2	2.73273E1	-3.26188E1	-3.26284E1	2.6831E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09696E0	-8.19135E-1	-7.9906E-1	-9.13036E0	-9.14159E0	4.31538E-3	9.34839E-2	2.73521E1	-3.26523E1	-3.26305E1	2.67948E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.97762E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.19254E-1	-7.98988E-1	-9.13076E0	-9.14149E0	4.41074E-3	9.36508E-2	2.73013E1	-3.26693E1	-3.25948E1	2.68749E1	1.20307E-7	2.51345E-3	2.51345E-3	6.32273E-3	2.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.18992E-1	-7.98798E-1	-9.13057E0	-9.14168E0	4.3869E-3	9.34839E-2	2.72709E1	-3.26506E1	-3.26296E1	2.68082E1	1.19721E-7	2.51384E-3	2.51384E-3	6.33021E-3	3.00251E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.1892E-1	-7.98607E-1	-9.13069E0	-9.14156E0	4.57764E-3	9.35316E-2	2.72541E1	-3.26544E1	-3.26144E1	2.67879E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.18825E-1	-7.98297E-1	-9.13107E0	-9.14185E0	4.52995E-3	9.34362E-2	2.73087E1	-3.2632E1	-3.26549E1	2.67956E1	1.20062E-7	2.52243E-3	2.52243E-3	6.32099E-3	3.00896E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.18872E-1	-7.98845E-1	-9.13062E0	-9.14223E0	4.64916E-3	9.35316E-2	2.73308E1	-3.26768E1	-3.26438E1	2.6855E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.19039E-1	-7.99131E-1	-9.13095E0	-9.14192E0	4.3869E-3	9.37223E-2	2.73016E1	-3.26484E1	-3.26596E1	2.6803E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.19135E-1	-7.98941E-1	-9.13067E0	-9.1418E0	4.14848E-3	9.40084E-2	2.73117E1	-3.26687E1	-3.26116E1	2.67878E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01995E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.18896E-1	-7.98917E-1	-9.13067E0	-9.14156E0	4.36306E-3	9.34601E-2	2.7324E1	-3.26552E1	-3.26087E1	2.66276E1	1.20017E-7	2.50789E-3	2.50789E-3	6.32386E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09711E0	-8.18539E-1	-7.99012E-1	-9.13048E0	-9.14171E0	4.64916E-3	9.36508E-2	2.72762E1	-3.26673E1	-3.26614E1	2.6783E1	1.19813E-7	2.51623E-3	2.51623E-3	6.3074E-3	3.00054E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0968E0	-8.18896E-1	-7.98774E-1	-9.13067E0	-9.14145E0	4.8399E-3	9.37462E-2	2.73007E1	-3.26341E1	-3.26085E1	2.70515E1	1.20243E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.006E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.1892E-1	-7.98607E-1	-9.13088E0	-9.14199E0	4.57764E-3	9.3627E-2	2.73147E1	-3.26446E1	-3.26338E1	2.69776E1	1.20371E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.00794E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.19111E-1	-7.98893E-1	-9.13057E0	-9.14166E0	4.43459E-3	9.35793E-2	2.72769E1	-3.26506E1	-3.2587E1	2.67337E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1