[Scan]
initial_time=2016-01-28T19:34:58
final_time=2016-01-28T19:35:27
ip_count=19
run=1026
dataset=6
scan=407
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.18825E-1
ql1_imon=1.44573E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.00316E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=2.27703E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-3.43072E-10
mult1=-9.49958E-9
mult2=-2.81442E-9
rf_tmon=-4.33218E-3
rf_agc=3.39825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.69433E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64524E0
bslens_imon=2.52102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2008E1
lens5a_imon=1.99419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04584E1
cs_ea1_imon=1.23646E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37562E0
lens1_imon=2.65325E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03917E1
cs_ea2_imon=1.41129E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.99027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12676E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15226E1
os_ea1_imon=2.45148E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=9.69433E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.04603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.07732E-8
tplens_vset=1.4E-1
tplens_vmon=1.65E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.58539E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.9835E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.86119E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25883E0
ionrepsh_imon=9.27561E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33211E1
lens5b_imon=2.18776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41799E0
os_ea2_imon=-8.10365E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00568E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.35859E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.28055E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.09E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.09174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67163E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.85332E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.08211E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.1671E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.37669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.68617E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.45749E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39129E0
defgridb_imon=6.06544E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.4054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59599E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3074E1
cs_fil1_imon=9.24851E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34067E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84391E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37378E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.19111E-1	-7.98631E-1	-9.13074E0	-9.14164E0	4.91142E-3	9.36985E-2	2.73381E1	-3.26845E1	-3.26185E1	2.68227E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18944E-1	-7.98607E-1	-9.13072E0	-9.14161E0	4.673E-3	9.35555E-2	2.71882E1	-3.26529E1	-3.26829E1	2.69457E1	1.20344E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99093E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1892E-1	-7.98225E-1	-9.13067E0	-9.14171E0	4.55379E-3	9.36031E-2	2.74013E1	-3.26312E1	-3.26289E1	2.68472E1	1.19925E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99879E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.19016E-1	-7.98678E-1	-9.13084E0	-9.14142E0	4.26769E-3	9.33647E-2	2.72907E1	-3.26549E1	-3.25876E1	2.67469E1	1.19991E-7	2.52025E-3	2.52025E-3	6.3074E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.18968E-1	-7.98583E-1	-9.13088E0	-9.14173E0	4.50611E-3	9.36031E-2	2.73446E1	-3.26413E1	-3.26502E1	2.68348E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18849E-1	-7.98678E-1	-9.13076E0	-9.14161E0	4.50611E-3	9.36747E-2	2.72949E1	-3.26561E1	-3.26266E1	2.69896E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18825E-1	-7.98726E-1	-9.1305E0	-9.14178E0	4.33922E-3	9.35793E-2	2.7266E1	-3.26729E1	-3.26422E1	2.68232E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.19016E-1	-7.98726E-1	-9.13064E0	-9.14197E0	4.43459E-3	9.37223E-2	2.72685E1	-3.26667E1	-3.2603E1	2.69644E1	1.19601E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.19063E-1	-7.98631E-1	-9.13043E0	-9.14171E0	4.45843E-3	9.36031E-2	2.73399E1	-3.26693E1	-3.26284E1	2.67926E1	1.20158E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.18944E-1	-7.98821E-1	-9.13067E0	-9.14211E0	4.60148E-3	9.36985E-2	2.72538E1	-3.26856E1	-3.26661E1	2.68974E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
1.4E1	1.0E0	1.0E0	5.66E2	3.82E2	-2.0958E0	-8.19182E-1	-7.98583E-1	-9.13053E0	-9.1419E0	4.72069E-3	9.36747E-2	2.72833E1	-3.26708E1	-3.26148E1	2.68683E1	1.19902E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1923E-1	-7.99155E-1	-9.13093E0	-9.14173E0	4.95911E-3	9.37223E-2	2.73247E1	-3.26554E1	-3.25997E1	2.68412E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.18968E-1	-7.98607E-1	-9.13062E0	-9.14171E0	4.64916E-3	9.35316E-2	2.73417E1	-3.26543E1	-3.26183E1	2.69512E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18706E-1	-7.9875E-1	-9.13074E0	-9.1419E0	4.64916E-3	9.37223E-2	2.72845E1	-3.2649E1	-3.26602E1	2.67821E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.18872E-1	-7.98655E-1	-9.13088E0	-9.14156E0	4.64916E-3	9.38654E-2	2.72444E1	-3.26657E1	-3.259E1	2.66941E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.18849E-1	-7.98917E-1	-9.13057E0	-9.14195E0	4.62532E-3	9.36985E-2	2.73105E1	-3.26729E1	-3.26152E1	2.68028E1	1.20278E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.18706E-1	-7.98631E-1	-9.13043E0	-9.14171E0	4.64916E-3	9.35793E-2	2.72951E1	-3.26661E1	-3.26172E1	2.68629E1	1.20226E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.18753E-1	-7.9906E-1	-9.13074E0	-9.14168E0	4.72069E-3	9.35793E-2	2.72614E1	-3.26915E1	-3.26248E1	2.67966E1	1.19959E-7	2.52026E-3	2.52026E-3	6.31012E-3	3.02714E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18801E-1	-7.99155E-1	-9.13067E0	-9.1419E0	5.00679E-3	9.35793E-2	2.74135E1	-3.2648E1	-3.26462E1	2.68569E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18825E-1	-7.98869E-1	-9.13103E0	-9.1418E0	4.74453E-3	9.34839E-2	2.73267E1	-3.26452E1	-3.26392E1	2.67163E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1