[Scan]
initial_time=2016-01-28T19:35:38
final_time=2016-01-28T19:36:07
ip_count=19
run=1026
dataset=6
scan=408
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.43113E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.99378E-9
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=1.9334E-9
ql4_vset=
ql4_vmon=-9.14137E0
ql4_imon=-3.05474E-10
mult1=-9.93304E-9
mult2=-2.78249E-9
rf_tmon=-3.95967E-3
rf_agc=3.37962E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69032E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64915E0
bslens_imon=2.39561E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99356E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0479E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53749E1
cs_ef1b_imon=3.09888E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0518E1
cs_ea1_imon=1.23793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36263E0
lens1_imon=2.7333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.41194E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99063E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.17405E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=4.30549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.152E1
os_ea1_imon=2.43613E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63703E1
os_ef1bup_imon=3.08104E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23025E0
cs_ionrep_imon=9.59831E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93345E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.05405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.13445E-8
tplens_vset=1.4E-1
tplens_vmon=1.62356E0
tplens_imon=-4.5686E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.51006E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26338E1
iondef2_imon=1.56211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98489E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.97226E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=9.29638E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.17154E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74913E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46994E0
os_ea2_imon=-8.1044E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71271E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05659E0
os_ef2alow_imon=-2.6632E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88639E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.37053E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.10682E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69728E1
iondef4_imon=1.07246E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.91328E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.28657E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.01709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56311E1
einzel_imon=7.67973E-6
window_vset=0.0E0
window_vmon=2.01275E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39141E-4
mask2_vset=0.0E0
mask2_vmon=-1.86743E1
mask2_imon=-6.68406E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.24641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.88488E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=7.63177E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40236E0
defgridb_imon=6.28896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.41319E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07052E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30744E1
cs_fil1_imon=9.2477E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27843E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63598E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58619E-2
os_fil2_imon=-2.58037E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.68197E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32128E-1
cs_fil2_imon=-2.39792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18352E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21918E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.346E-1
res40_imon=-2.44021E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.19111E-1	-7.98583E-1	-9.13067E0	-9.14173E0	4.8399E-3	9.3627E-2	2.72744E1	-3.26787E1	-3.26237E1	2.6807E1	1.20092E-7	2.51588E-3	2.51588E-3	6.28931E-3	3.01464E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.18968E-1	-7.99179E-1	-9.13067E0	-9.14183E0	4.8399E-3	9.35078E-2	2.73381E1	-3.26621E1	-3.26266E1	2.69313E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18944E-1	-7.98941E-1	-9.13086E0	-9.14166E0	4.72069E-3	9.34601E-2	2.7311E1	-3.26567E1	-3.26561E1	2.68789E1	1.20278E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.00563E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.19206E-1	-7.99036E-1	-9.13107E0	-9.14161E0	4.79221E-3	9.36031E-2	2.73423E1	-3.26655E1	-3.26679E1	2.67746E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.18992E-1	-7.99298E-1	-9.13069E0	-9.14147E0	4.673E-3	9.35793E-2	2.72973E1	-3.26476E1	-3.26621E1	2.66396E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.19063E-1	-7.98726E-1	-9.13081E0	-9.14152E0	5.126E-3	9.37462E-2	2.73422E1	-3.26341E1	-3.26503E1	2.66857E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18872E-1	-7.98965E-1	-9.13074E0	-9.14185E0	5.03063E-3	9.377E-2	2.72922E1	-3.26505E1	-3.26352E1	2.69247E1	1.19841E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.01356E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.18753E-1	-7.98917E-1	-9.13076E0	-9.14183E0	4.72069E-3	9.35078E-2	2.72967E1	-3.26729E1	-3.26056E1	2.69427E1	1.20137E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18777E-1	-7.98965E-1	-9.13057E0	-9.14202E0	5.00679E-3	9.34839E-2	2.72841E1	-3.26512E1	-3.26122E1	2.68641E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.18586E-1	-7.98917E-1	-9.13098E0	-9.14209E0	5.03063E-3	9.36508E-2	2.7321E1	-3.26531E1	-3.26514E1	2.68052E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18682E-1	-7.99131E-1	-9.13053E0	-9.14197E0	4.93526E-3	9.36508E-2	2.73375E1	-3.26738E1	-3.26187E1	2.6783E1	1.19913E-7	2.51716E-3	2.51716E-3	6.31014E-3	2.9913E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18539E-1	-7.99084E-1	-9.13057E0	-9.14168E0	4.95911E-3	9.36508E-2	2.73021E1	-3.26687E1	-3.26416E1	2.68328E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.18443E-1	-7.99084E-1	-9.13093E0	-9.14161E0	4.93526E-3	9.377E-2	2.72692E1	-3.26724E1	-3.25941E1	2.67526E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18777E-1	-7.9875E-1	-9.1311E0	-9.14183E0	4.57764E-3	9.34839E-2	2.73429E1	-3.26891E1	-3.26002E1	2.68514E1	1.20192E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.02875E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.1861E-1	-7.98464E-1	-9.13074E0	-9.14154E0	4.57764E-3	9.39369E-2	2.72806E1	-3.26548E1	-3.26487E1	2.67966E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.18443E-1	-7.98893E-1	-9.13045E0	-9.14152E0	4.74453E-3	9.35078E-2	2.73109E1	-3.26446E1	-3.26283E1	2.69521E1	1.19872E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.98819E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18372E-1	-7.98869E-1	-9.13072E0	-9.14166E0	4.88758E-3	9.377E-2	2.726E1	-3.26494E1	-3.26711E1	2.67193E1	1.20142E-7	2.52448E-3	2.52448E-3	6.30212E-3	2.99343E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18443E-1	-7.99203E-1	-9.13095E0	-9.14159E0	4.64916E-3	9.36985E-2	2.73299E1	-3.26567E1	-3.26567E1	2.69472E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.18229E-1	-7.99131E-1	-9.131E0	-9.14185E0	4.76837E-3	9.36508E-2	2.73204E1	-3.26655E1	-3.25959E1	2.67349E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18491E-1	-7.98988E-1	-9.13081E0	-9.14137E0	4.57764E-3	9.35316E-2	2.73081E1	-3.26338E1	-3.26567E1	2.69728E1	1.20004E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.01738E-1