[Scan]
initial_time=2016-01-28T19:36:17
final_time=2016-01-28T19:36:47
ip_count=19
run=1026
dataset=6
scan=409
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.41314E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.96354E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.70726E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.21086E-10
mult1=-9.42843E-9
mult2=-2.80361E-9
rf_tmon=-3.53614E-3
rf_agc=3.33032E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.70213E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.10163E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=1.23156E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41031E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.42729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.99784E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.22478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.41053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22201E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.06729E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.19917E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.48604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.96427E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=9.28583E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.16879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45915E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81206E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.36796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72833E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66531E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.05673E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.5353E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0917E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.41585E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62545E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3063E1
cs_fil1_imon=9.24881E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38212E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64023E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.65278E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21893E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.43074E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.18396E-1	-7.99227E-1	-9.13074E0	-9.14192E0	4.79221E-3	9.40323E-2	2.72803E1	-3.26508E1	-3.25971E1	2.69449E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03286E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18372E-1	-7.99108E-1	-9.13081E0	-9.14202E0	4.41074E-3	9.37939E-2	2.73314E1	-3.26572E1	-3.26523E1	2.68824E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18443E-1	-7.99108E-1	-9.13129E0	-9.14185E0	4.52995E-3	9.36031E-2	2.72933E1	-3.26549E1	-3.26242E1	2.67833E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.0201E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.18348E-1	-7.98988E-1	-9.131E0	-9.14176E0	4.79221E-3	9.38654E-2	2.73081E1	-3.26488E1	-3.26627E1	2.69019E1	1.20295E-7	2.51972E-3	2.51972E-3	6.33461E-3	3.00637E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18467E-1	-7.98798E-1	-9.13084E0	-9.14202E0	4.72069E-3	9.37462E-2	2.72609E1	-3.26744E1	-3.25912E1	2.67385E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18372E-1	-7.98941E-1	-9.131E0	-9.14168E0	4.64916E-3	9.36747E-2	2.73297E1	-3.26326E1	-3.26068E1	2.69776E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.18467E-1	-7.98702E-1	-9.13088E0	-9.14207E0	4.86374E-3	9.377E-2	2.72981E1	-3.26341E1	-3.25924E1	2.68111E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.183E-1	-7.98917E-1	-9.13081E0	-9.14233E0	4.8399E-3	9.3317E-2	2.72558E1	-3.26446E1	-3.26494E1	2.68887E1	1.20042E-7	2.51393E-3	2.51393E-3	6.33388E-3	3.01104E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.18324E-1	-7.98845E-1	-9.13115E0	-9.14242E0	4.81606E-3	9.37939E-2	2.73039E1	-3.26335E1	-3.26722E1	2.68712E1	1.19913E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1811E-1	-7.98798E-1	-9.13107E0	-9.14202E0	4.60148E-3	9.36747E-2	2.7304E1	-3.26601E1	-3.26513E1	2.69001E1	1.20045E-7	2.51045E-3	2.51045E-3	6.33592E-3	3.01337E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.18443E-1	-7.98893E-1	-9.13091E0	-9.14216E0	4.48227E-3	9.37462E-2	2.7309E1	-3.27013E1	-3.26026E1	2.69081E1	1.20051E-7	2.52023E-3	2.52023E-3	6.33253E-3	3.0101E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18324E-1	-7.98893E-1	-9.13084E0	-9.14199E0	4.52995E-3	9.37939E-2	2.7298E1	-3.26791E1	-3.26425E1	2.66767E1	1.20011E-7	2.51259E-3	2.51259E-3	6.32716E-3	3.01811E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18205E-1	-7.9906E-1	-9.13086E0	-9.14202E0	4.93526E-3	9.3627E-2	2.72974E1	-3.2675E1	-3.26113E1	2.66472E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.1811E-1	-7.98941E-1	-9.13081E0	-9.14192E0	4.60148E-3	9.37223E-2	2.73482E1	-3.26724E1	-3.26501E1	2.66645E1	1.19953E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.1799E-1	-7.98965E-1	-9.13088E0	-9.14237E0	4.62532E-3	9.36985E-2	2.73525E1	-3.2687E1	-3.26481E1	2.68899E1	1.20356E-7	2.51549E-3	2.51549E-3	6.32784E-3	3.00149E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18539E-1	-7.98965E-1	-9.13064E0	-9.14235E0	4.57764E-3	9.377E-2	2.7301E1	-3.26632E1	-3.26107E1	2.67277E1	1.20132E-7	2.51557E-3	2.51557E-3	6.3074E-3	2.99916E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.18396E-1	-7.98678E-1	-9.13055E0	-9.14211E0	4.69685E-3	9.35793E-2	2.72823E1	-3.26603E1	-3.26669E1	2.67415E1	1.19646E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18038E-1	-7.98917E-1	-9.13072E0	-9.14211E0	4.48227E-3	9.36747E-2	2.72727E1	-3.26191E1	-3.26509E1	2.69235E1	1.19705E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.98481E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.1799E-1	-7.98988E-1	-9.13041E0	-9.14226E0	4.52995E-3	9.35555E-2	2.73273E1	-3.2641E1	-3.26428E1	2.67404E1	1.19891E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18205E-1	-7.98559E-1	-9.13095E0	-9.14195E0	4.69685E-3	9.36747E-2	2.72833E1	-3.26885E1	-3.26148E1	2.66531E1	1.20226E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01347E-1