[Scan]
initial_time=2016-01-28T19:36:57
final_time=2016-01-28T19:37:21
ip_count=19
run=1026
dataset=6
scan=410
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=1.40726E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.96793E-9
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=1.47172E-9
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-2.09033E-10
mult1=-9.78308E-9
mult2=-2.79969E-9
rf_tmon=-3.96087E-3
rf_agc=3.37102E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.63954E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65137E0
bslens_imon=2.54306E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.97473E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.111E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02014E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04945E1
cs_ea1_imon=1.24307E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38725E0
lens1_imon=2.53938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03745E1
cs_ea2_imon=1.40284E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.22681E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=2.42503E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25577E0
cs_ionrep_imon=9.6723E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93369E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.04927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.20012E-8
tplens_vset=1.4E-1
tplens_vmon=1.62001E0
tplens_imon=-2.70438E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.49981E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.5696E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.95526E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29434E0
ionrepsh_imon=9.42253E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.19474E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4688E0
os_ea2_imon=-5.78968E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00483E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.28606E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.07228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66262E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.0944E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.53336E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-9.79699E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.65951E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.96164E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.54564E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39436E0
defgridb_imon=6.01402E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.41729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.25992E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38212E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63807E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21315E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36466E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21928E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68903E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.18205E-1	-7.98869E-1	-9.13103E0	-9.14202E0	4.55379E-3	9.3627E-2	2.72898E1	-3.26785E1	-3.26661E1	2.67868E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18062E-1	-7.98774E-1	-9.13079E0	-9.14209E0	4.52995E-3	9.35793E-2	2.73237E1	-3.26687E1	-3.26158E1	2.68058E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.03545E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.18038E-1	-7.98941E-1	-9.1311E0	-9.14221E0	4.50611E-3	9.34362E-2	2.73219E1	-3.26543E1	-3.26549E1	2.66514E1	1.20017E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.02133E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18086E-1	-7.99012E-1	-9.13091E0	-9.14185E0	4.86374E-3	9.36747E-2	2.73246E1	-3.26461E1	-3.26667E1	2.66484E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03449E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.18038E-1	-7.98631E-1	-9.13098E0	-9.14207E0	4.64916E-3	9.377E-2	2.73688E1	-3.26428E1	-3.26109E1	2.6748E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.18062E-1	-7.98821E-1	-9.13081E0	-9.14171E0	4.74453E-3	9.33409E-2	2.72476E1	-3.26278E1	-3.26432E1	2.69043E1	1.20495E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.01356E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18348E-1	-7.98941E-1	-9.13084E0	-9.14176E0	4.64916E-3	9.36985E-2	2.73381E1	-3.26284E1	-3.26402E1	2.68911E1	1.19978E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18086E-1	-7.99108E-1	-9.13103E0	-9.14183E0	4.64916E-3	9.35555E-2	2.73195E1	-3.26518E1	-3.26002E1	2.68502E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.18324E-1	-7.98941E-1	-9.13076E0	-9.14214E0	4.43459E-3	9.34839E-2	2.73135E1	-3.2641E1	-3.26609E1	2.68028E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.18181E-1	-7.98941E-1	-9.13088E0	-9.14202E0	4.72069E-3	9.33886E-2	2.72901E1	-3.2641E1	-3.26026E1	2.698E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18133E-1	-7.99179E-1	-9.13079E0	-9.14202E0	4.72069E-3	9.32693E-2	2.72787E1	-3.26843E1	-3.26332E1	2.70352E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18205E-1	-7.98726E-1	-9.13067E0	-9.14204E0	4.64916E-3	9.34839E-2	2.72833E1	-3.26697E1	-3.26366E1	2.67902E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28006E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.178E-1	-7.98798E-1	-9.13081E0	-9.14209E0	4.64916E-3	9.35555E-2	2.73277E1	-3.26285E1	-3.26444E1	2.67421E1	1.20017E-7	2.51716E-3	2.51716E-3	6.3074E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18014E-1	-7.98798E-1	-9.1311E0	-9.14209E0	4.36306E-3	9.35078E-2	2.73417E1	-3.26602E1	-3.26231E1	2.6898E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17895E-1	-7.98774E-1	-9.13105E0	-9.14187E0	4.45843E-3	9.34124E-2	2.73086E1	-3.26649E1	-3.26231E1	2.66544E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.18324E-1	-7.98774E-1	-9.13098E0	-9.14178E0	4.74453E-3	9.35316E-2	2.73033E1	-3.26554E1	-3.26008E1	2.68599E1	1.20311E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18157E-1	-7.98893E-1	-9.13117E0	-9.14192E0	4.69685E-3	9.36985E-2	2.72992E1	-3.26903E1	-3.26331E1	2.67827E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18133E-1	-7.98535E-1	-9.13086E0	-9.14197E0	4.62532E-3	9.34124E-2	2.72552E1	-3.26699E1	-3.26645E1	2.68641E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17847E-1	-7.9875E-1	-9.13076E0	-9.14202E0	4.86374E-3	9.34839E-2	2.72901E1	-3.26591E1	-3.26356E1	2.66658E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.17943E-1	-7.9844E-1	-9.13062E0	-9.14209E0	4.95911E-3	9.33886E-2	2.73405E1	-3.26673E1	-3.26296E1	2.66262E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1